وأيد هذا العمل "مختبر أبحاث الجيش الأمريكي"، اديلفي، ماريلاند، الولايات المتحدة الأمريكية، تحت W91ZLK المنحة-12-P-0447. وقد أجريت قياسات الرنين بمساعدة مايكل ستون وأنطوني بروك. وأجرى قياس الكاميرا الحرارية بمساعدة Conover ديمون من جامعة جورج واشنطن.

1-اختيار وتصميم بنية الأمثل
<ol><li>حدد شعاع ثابت ثابت لضبط تردد واسعة النطاق (مقارنة بالمرشحين الآخرين، فإنه يمكن ضبط واسعة النطاق عند تسخين فإنه سبب لها معامل حرارة كبيرة من التردد (TCF) وثابت التمدد الحراري ضئيلة).</li>
	<li>تصميم شعاع أطول إذا كان الغرض هو ضبط تحسين الكفاءة. تصميم شعاع أقصر إذا كان الغرض هو تردد التنقل أو إشارة تتبع التطبيقات.</li>
</ol>2-التصميم والتصنيع في التكميلية أكسيد معدني متمم (CMOS)
<ol><li>تصميم وإنشاء 3D-نموذج لتصفية ممس في برنامج يستند إلى FEM.</li>
	<li>إعادة تخطيط نفس في أداة تصميم دوائر المتكاملة (IC)، طبقة بطبقة لإنشاء ملف gds.</li>
	<li>إرسال هذا الملف التوزيع العالمي مسبك المكمل لتصنيع (استخدمنا تكنولوجيا CMOS 0.6 ميكرومتر).</li>
	<li>تواصل مع مرحلة ما بعد المعالجة بمجرد اكتمال عملية CMOS (ملاحظة ضرورة أن الرقائق سليكون والألومنيوم وأكسيد الطبقات).<ol>
<li>سلوك جاف/O3فرنك سويسري2 أحفر العملية عبر الحث يقترن بلازما (ICP) أحفر النظام. أحفر SiO2 بين طبقات الألومنيوم وتشكيل الحزم في نسبة العرض إلى الارتفاع 5.7. لهذه العملية، استخدم المعلمات التالية: CHF3 40 sccm، س2 في 5 sccm، الضغط على 0.5 السلطة الفلسطينية، وبرنامج المقارنات الدولية قوة 500 واط، والسلطة عينة على 100 W الذي بلغ 56 دقيقة أحفر الوقت.</li>
		<li>تطبيق شيف2 أحفر العملية في الركيزة السيليكون لإنشاء 9 ميكرومتر عمق تجويف تحت الحزم. لهذه العملية، استخدم شيف2 النقش النظام لدورات 3 في 3T، 60 s/دورة.</li>
	</ol>
</li>
	<li>وتتميز أجهزة المسح الإلكتروني المجهري (SEM) التأكد من أنها هي ملفقة بشكل صحيح. بالنسبة لهذه الخطوة، تغيير شعاع تسريع الجهد إلى 2.58 كيلو فولت والمسافة العامل إلى 9.5 ملم.</li>
</ol>3-جهاز اختبار
ملاحظة: اختبار الجهاز تتألف من العديد من الخطوات بما في ذلك الجول تدفئة استجابة التردد واختبار.
<ol><li>
اختبار الكاميرا الحرارية لسخانات مضمن
	<ol>
<li>ضع الكاميرا الحرارية على رأس الرقاقة واختبار سخانات المضمنة لضمان أنها الحرارة الحزم.</li>
		<li>توصيل التيار الكهربائي إلى مجموعة شرائح وتطبيق جهد DC في سخانات جزءا لا يتجزأ من 0 الخامس إلى 5.7 V تزايدات صغيرة زيادة درجة الحرارة في جميع أنحاء الحزم.</li>
		<li>سجل التشكيل الجانبي لدرجة الحرارة في جميع أنحاء مجموعة شرائح عن طريق كاميرا حرارية أثناء عملية التدفئة. حفظ النتائج في برنامج الحوسبة عددية وارسم الشخصية التدفئة.</li>
	</ol>
</li>
	<li>
معايرة الإعداد لدف والاختبار
	<ol>
<li>وضع الليزر على رأس الحزم الطويل 120 ميكرومتر.</li>
		<li>قم بتوصيل التيار الكهربائي بين الحزم اثنين 120 ميكرومتر طويلة لتطبيق كل 7 V DC وجهد "التيار المتردد الخامس" 3 لتشغيل الرنين. قم بتوصيل إضافية العاصمة جهد تحيز سخانات مضمن بحد أقصى يبلغ 5.7 V لتطبيق جول تدفئة للحزم أثناء عملية الرنين.</li>
		<li>نقل الليزر إلى بقعة مختلفة عن شعاع للحصول على انعكاس ليزر منخفضة ضوضاء. تأكد من زيادة كثافة الشريط الأزرق لتقليل الضوضاء.</li>
		<li>تقسيم الشاشة إلى طرق عرض متعددة لمعايرة والبدء في إعداد القياس.</li>
		<li>الذهاب "الحصول على إعدادات" تعيين وضع القياس إلى الاتحاد الفرنسي للتنس، عدم استخدام أي عامل تصفية وتعيين عرض النطاق الترددي إلى 2 ميجا هرتز.</li>
		<li>تغيير السرعة بحيث أنها يمكن أن تدعم أقصى تردد 2.5 ميغاهرتز.</li>
		<li>استخدام الموجي غرد الدوري. ملاحظة: هنا، تقف السعة للجهد الكهربي المتردد وإزاحة لتقف على الجهد DC.</li>
		<li>بدء القياس مع هذا الإعداد الجديد.</li>
		<li>قم بتحديث "الإعدادات اقتناء" بتغيير الجهد DC إلى 1 V.</li>
		<li>إنقاص الجهد التحيز التطبيقية في نافذة "الإعدادات اقتناء" عندما يظهر Ref1 الإنذار الأحمر (وهذا يعني أن الإشارة صاخبة).</li>
		<li>نقل الليزر إلى بقعة مختلفة عن شعاع لزيادة نسبة الإشارة إلى الضوضاء. في بعض الأحيان، قد يكون هناك بقع سيئة على الحزم التي تسبب إنذار حمراء على شريط الاهتزاز؛ وفي هذه الحالة، يواصل البحث عن أفضل بقعة.</li>
	</ol>
</li>
	<li>
اختبار 68 ميكرومتر طويلة ممس عوامل التصفية عن طريق LDV
	<ol>
<li>حدد 68 ميكرومتر طويلة ممس عامل التصفية للاختبار.</li>
		<li>تطبيق 25 V DC الجهد والجهد V AC 5 معا بين الحزم اثنين 68 ميكرومتر المجاورة لها منذ وقت طويل. هنا، ويوفر الجهد DC الانحناء وجهد التيار المتردد بتمكين عملية الرنين.</li>
		<li>تنطبق جهد DC إضافية سخانات المضمنة في شعاع طويل 68 ميكرومتر، وزيادة الجهد من 0 الخامس إلى 5.7 الخامس بزيادات صغيرة. سيوفر هذا التردد ضبط استناداً إلى الجول التدفئة.</li>
		<li>مراقبة وتسجيل تردد صدى واستجابة المرحلة فيما يتعلق بالجهد التحيز التطبيقية في كل خطوة وتلخيص النتائج في جدول. ضبط التردد الكلي لهذه العينة هو هنا، حوالي 874 كيلوهرتز عند تطبيق الجهد V DC 5.7 سخان المضمنة. ملاحظة: يتم مزامنتها المحاكاة (على الجانب الأيمن)، والقياس الحقيقي (على الجانب اليسار).</li>
	</ol>
</li>
	<li>
أعلى طرق القياس
	<ol>
<li>تضغط على الزر A/D للذهاب إلى نافذة "الإعدادات اقتناء" أظهر في الفرع 3-2 وتغيير السرعة بحيث أنها يمكن أن تدعم ترددات عالية جداً.</li>
		<li>قياس الأولى ووضع الثانية مع تلك المرحلة. ملاحظة: تشريد الرنين الأساسية في اتجاه Y لوضع-1 وفي الاتجاه Z (أي نحو المجهر) لوضع--2.</li>
	</ol>
</li>
</ol>4-تجنب فشل الجهاز
<ol><li>
تطبيق إشارة مربع موجه التردد المنخفض لحل ستيكشن
	<ol>
<li>تطبيق إشارة 1 هرتز مربع موجه لحل مشكلة ستيكشن التي تنتج من الشحن الكهربائي بين الدعامات المجاورة اثنين.</li>
		<li>الانتقال إلى المربع المقابل وتعيين الجهد DC إلى 1 V، مع الحفاظ على جهد التيار المتردد في 1 V.</li>
		<li>انتقل إلى مربع التردد والتردد إلى 1 هرتز.</li>
		<li>تفعيل وتطبيق هذا الإعداد الجديد في الحزم.</li>
		<li>احترام الفصل بين الحزم.</li>
	</ol>
</li>
	<li>
عالية من الإجهاد الحراري وحرق
	<ol>
<li>استخدام نموذج إضافي لاختبار الإجهاد الحراري.</li>
		<li>زيادة الجهد التحيز المطبقة على سخان مضمن بزيادات صغيرة لإيجاد الجهد الحد الأقصى المسموح به قبل فشل الجهاز بسبب الإجهاد الحراري عالية.</li>
	</ol>
</li>
</ol>5-تعزيز القدرة على ضبط
<ol><li>تطبيق جهد V DC 25 وجهد التيار المتردد الخامس 5 معا بين عوارض ميكرومتر 68 اثنين المتاخمة مع زيادة الجهد التحيز المطبقة على سخان جزءا لا يتجزأ من 0 الخامس إلى 5.7 الخامس، لتحول تردد 661 kHz مجموع.</li>
	<li>زيادة الجهد التحيز التطبيقية من 25 الخامس إلى 35 الخامس إضافة ربيع إضافية تليين تأثير بين الحزم المجاورة منذ فترة طويلة هما 68 ميكرومتر، أثناء تطبيق جهد V AC 1 والاحتفاظ بنفس الإعداد الجهد التحيز في سخانات جزءا لا يتجزأ.</li>
	<li>سجل تحسين نسبة 32 في المائة في مجموع التردد العالي كما أنه ينبغي أن تزيد من 661 كيلو هرتز إلى 875 كيلو هرتز قادمة من هذا الربيع إضافية تليين تأثير. ملاحظة: على حد علمنا، تغيير القدرة على ضبط مرنانات ممس قد تحقق لأول مرة في هذا العمل.</li>
</ol>

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<li>Davila, A. P., Jang, J., Gupta, A. K., Walter, T., Aronson, A., Bashir, R. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/pubmed?term=((Microresonator+mass+sensors+for+detection+of+Bacillus+anthracis+Sterne+spores+in+air+and+water%5BTitle%5D)+AND+%22Biosens.+Bioelectron%22%5BJournal%5D)">Microresonator mass sensors for detection of Bacillus anthracis Sterne spores in air and water.</a> Biosens. Bioelectron. 22 (12), 3028-3035 (2007).</li>
<li>Lee, J., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/pubmed?term=((Suspended+microchannel+resonators+with+piezoresistive+sensors%5BTitle%5D)+AND+%22Lab+Chip%22%5BJournal%5D)">Suspended microchannel resonators with piezoresistive sensors.</a> Lab Chip. 11 (4), 645-651 (2011).</li>
<li>Arash, H., Pourkamali, S. <a target="_blank" href="http://ieeexplore.ieee.org/document/6111426/">Fabrication and Characterization of MEMS-Based Resonant Organic Gas Sensors.</a> IEEE Sensors J. 12 (6), 1958-1964 (2012).</li>
<li>Göktaş, H., Zaghloul, M. <a target="_blank" href="http://ieeexplore.ieee.org/document/6985576/">Tuning In-Plane Fixed-Fixed Beam Resonators with Embedded Heater in CMOS Technology.</a> IEEE Electron Device Lett. 36 (2), 189-191 (2015).</li>
<li>Li, C. S., Hou, L. J., Li, S. S. <a target="_blank" href="http://ieeexplore.ieee.org/document/6112657/">Advanced CMOS-MEMS Resonator Platform.</a> IEEE Electron Device Lett. 33 (2), 272-274 (2012).</li>
<li>Li, M. H., Chen, W. C., Li, S. S. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/pubmed?term=((Mechanically+Coupled+CMOS-MEMS+Free-Free+Beam+Resonator+Arrays+With+Ehanced+Power+Handling+Capability%5BTitle%5D)+AND+%22IEEE+Trans.+Ultrason.+Ferroelect.+Freq.+Control%22%5BJournal%5D)">Mechanically Coupled CMOS-MEMS Free-Free Beam Resonator Arrays With Ehanced Power Handling Capability.</a> IEEE Trans. Ultrason. Ferroelect. Freq. Control. 59 (3), 346-357 (2012).</li>
<li>Lopez, J. L., et al. <a target="_blank" href="http://ieeexplore.ieee.org/abstract/document/5109806/">A CMOS-MEMS RF-Tunable Bandpass Filter Based on Two High-Q 22-MHz Polysilicon Clamped-Clamped Beam Resonators.</a> IEEE Electron Device Lett. 30 (7), 718-720 (2009).</li>
<li>Khine, L., Palaniapan, M. <a target="_blank" href="http://iopscience.iop.org/article/10.1088/0960-1317/19/1/015017/meta">High-Q bulk-mode SOI square resonator with straight-beam anchors.</a> J. Micromech. Microeng. 19 (1), (2009).</li>
<li>Manca, N., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/pubmed?term=((Programmable+mechanical+resonances+in+MEMS+by+localized+joule+heating+of+phase+change+materials%5BTitle%5D)+AND+%22Adv.+Mater%22%5BJournal%5D)">Programmable mechanical resonances in MEMS by localized joule heating of phase change materials.</a> Adv. Mater. 25 (44), 6430-6435 (2013).</li>
<li>Rúa, A., et al. <a target="_blank" href="http://aip.scitation.org/doi/abs/10.1063/1.4716191?journalCode=jap">Phase transition behavior in microcantilevers coated with M1-phase VO2 and M2-phase VO2:Cr thin films.</a> J. Appl. Phys. 111 (10), 104502(2012).</li>
<li>Remtema, T., Lin, L. <a target="_blank" href="http://www.sciencedirect.com/science/article/pii/S0924424701006033">Active frequency tuning for micro resonators by localized thermal stressing effects.</a> Sens. Actuators A, Phys. 91 (3), 326-332 (2001).</li>
<li>Göktaş, H., Zaghloul, M. <a target="_blank" href="http://onlinelibrary.wiley.com/doi/10.1002/2015RS005893/abstract">The Implementation of Low Power and Wide Tuning Range MEMS filters for Communication Applications.</a> Radio Sci. 51 (10), 1636-1644 (2016).</li>
<li>Göktaş, H., Zaghloul, M. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/pubmed?term=((The+Novel+Microhotplate%3A+A+Design+Featuring+Ultra+High+Temperature%2C+Ultra+Low+Thermal+Stress%2C+Low+Power+Consumption+and+Small+Response+Time%5BTitle%5D)+AND+%22Sensor+Comm%22%5BJournal%5D)">The Novel Microhotplate: A Design Featuring Ultra High Temperature, Ultra Low Thermal Stress, Low Power Consumption and Small Response Time.</a> Sensor Comm. , (2013).</li>
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<li>Kim, J. M., et al. <a target="_blank" href="http://iopscience.iop.org/article/10.1088/0960-1317/12/5/327/meta">Continuous anti-stiction coatings using self-assembled monolayers for gold microstructures.</a> J. Micromech. Microeng. 12 (5), 688-695 (2002).</li>
<li>Bhattacharya, E., et al. <a target="_blank" href="http://onlinelibrary.wiley.com/doi/10.1002/pssa.200461149/abstract">Effect of porous silicon formation on stiction in surface micromachined MEMS structures.</a> Phys. Stat. Sol. (A). 202 (8), 1482-1486 (2005).</li>
<li>Koppaka, S. B., Phinney, L. M. <a target="_blank" href="http://ieeexplore.ieee.org/document/1416917/">Release Processing Effects on Laser Repair of Stiction-Failed Microcantilevers.</a> J. Microelectromech. Syst. 14 (2), 410-418 (2005).</li>
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</ol>

ليس لدينا شيء الكشف عنها.

إحدى الخطوات الحاسمة في بناء المرشحات ممس تصميم الجهاز استناداً إلى مجال التطبيق. الشعاع ينبغي أن تكون أطول أو أرق لضبط كفاءة (جزء في المليون/ميغاواط)، لكن أقصر أو أرق لتردد التنقل أو إشارة تتبع تطبيقات أفضل. بنفس الطريقة، الكشف عن إشارة واضحة عن طريق LDV الحاسمة في جهاز الاختبار الذي هو الس?...

وهناك طلب متزايد على مرشحات ممس نظراً للموثوقية العالية، وانخفاض استهلاك الطاقة، تصميم مضغوط، عامل الجودة العالية، ومنخفضة التكلفة. أنها تستخدم على نطاق واسع كأجهزة الاستشعار والأجزاء الأساسية في مجال الاتصالات اللاسلكية. درجة الحرارة أجهزة الاستشعار1وأجهزة الاستشعار الحيوي2،3والغاز-أجهزة الاستشعار4، مرشحات5،،من67والتذبذب هي مجالات التطبيق الأكثر شعبية. مرشحات ممس الالكتروستاتيكي الأكثر شعبية هي شعاع ثابت ثابت5،8، ناتئ2، شوكة رنانة6، شعاع الحرة--الحرة6،7،7من تصميم العاطفة القرص، و تصميم مربع الشكل9.
هناك العديد من الخطوات الحاسمة في تحقيق عامل تصفية ممس، مثل منهجية تصميم (الهيكل القائم على التطبيق الأمثل، ونطاق التردد ضبط النطاق، وتجنب الفشل) ووصف (النماذج بسرعة، وتجنب الطفيلية كاباسيتانسيس، والكشف عن أوضاع أعلى). تردد ضبط القدرة مطلوب للتعويض عن أي تغييرات التردد بسبب تلفيق التحمل، أو تغيرات درجة الحرارة المحيطة. وأبلغ تقنيات مختلفة10،،من1112 في الأدب ولتلبية هذا المطلب؛ ومع ذلك، لديهم بعض العيوب مثل محدودية التردد ضبط القدرة، مركز منخفضة التردد، ومعالجة الاحتياجات وسخان خارجي10،11وظيفة إضافية.
في هذه الدراسة نقدم ضبط تردد واسعة النطاق خلال الجول تدفئة أسلوب5،13 على تردد محدودة ضبط النطاق عن طريق معامل مرونة تغيير12 (زيادة الجهد DC التحيز بين الدعامات المجاورة اثنين) مواد المرحلة الانتقالية الأسلوب10،11. وعلاوة على ذلك، أوجزت اختيار أفضل هيكل وتصميم على أساس التطبيق في Göktaş وزغلول13. هنا، نحن إظهار كيفية ضبط تردد صدى شعاع ثابت--الثابتة بزيادة الجهد DC المطبقة على سخان المضمنة مع المساعدة من لدف. تتم مزامنة المحاكاة (FEM) تحليل عنصر محدود بقياس لدف في نفس الإطار من أجل تصور إليه ضبط. ويشمل هذا الجول التدفئة والانحناء الشخصية في جميع أنحاء الشعاع.
ونقدم أيضا حالات الفشل المحتملة (أجهزة محترقة وستيكشن) والحلول المقترحة لها. الجول تدفئة الأسلوب في تركيبة مع الإجهاد الحراري عالية من شعاع ثابت ثابت يوفر ضبط تردد واسعة النطاق ولكن في الوقت نفسه يمكن أن ينتج أجهزة محترقة في درجة حرارة معينة. وهذا يعزى إلى الإجهاد الحراري عالية بين مختلف المواد14. الحل هو أن زيادة الجهد DC بين الحزم المتاخمة اثنين، الذي بدوره يزيد من نطاق الموالفة (بنسبة 32 في المائة)، ويلغي الحاجة لدرجة حرارة عالية. أولاً كان على هذا الأسلوب "ضبط نطاق ضبط" تظاهروا في Göktaş وزغلول5، أوضح بمزيد من التفصيل في Göktaş وزغلول13، وإعادة المقدمة هنا. ستيكشن، من ناحية أخرى، يمكن أن يحدث أثناء عملية تلفيق عملية أو الرنين. وهناك العديد من الأساليب المقترحة لمواجهة هذه المشكلة، مثل تطبيق طلاء السطح لتقليل التصاق الطاقة15،16وزيادة خشونة السطح17عملية إصلاح الليزر18. وفي المقابل، فإننا نقدم تقنية بسيطة حيث تم تطبيق إشارة مربع موجه تردد المنخفض بين اثنين من الحزمة المرفقة وتم بنجاح تسجيل الفصل قبل LDV. ويمكن القضاء على هذا الأسلوب تكلفة إضافية وتقليل تعقيد التصميم.
آخر خطوة ذات أهمية حاسمة في بناء عامل تصفية ممس الدولة من فن هو توصيف والتحقق. توصيف مع محلل شبكة اتصال واحد من الأساليب الأكثر شعبية وتستخدم على نطاق واسع؛ ومع ذلك، فإنه لديه بعض العيوب. السعة الطفيلية الصغيرة حتى يمكن أن تقتل الإشارة، وحيث أن هذا يتطلب عادة مكبر للصوت دائرة3،،من68 للقضاء على الضوضاء، ويمكن الكشف عن فقط الأولى وضع الرنين. من ناحية أخرى، وصف مع LDV خالية من هذه المسألة السعة الطفيلية، ويمكن الكشف عن الكثير من التشرد أصغر. وهذا يتيح النماذج بسرعة، مع التخلص من الحاجة إلى تصميم مكبر للصوت. وعلاوة على ذلك، يمكن اكتشاف LDV صدى وضع أعلى من مرشحات ممس. هذه الميزة واعدة جداً، لا سيما في مجال أجهزة الاستشعار الحساسة للغاية. يمكن أن توفر طريقة ناتئ أعلى أكثر حساسية19. قياس وضع أعلى من شعاع ثابت ثابت مع LDV ويرد وتطبيقها لقياس محاكاة فيم. توفر نتائج سابقة لأوانها من محاكاة فيم تحسن يصل إلى 46 مرات في حساسية مقارنة بوضع أول شعاع ثابت ثابت.

<table><tbody><tr><td>Laser Doppler Vibrometer</td><td>Polytec</td><td>Polytec MSA-500</td><td></td></tr><tr><td>Scanning Electron Microscope</td><td>Zeiss</td><td></td><td></td></tr><tr><td>Thermal Camera</td><td>X</td><td></td><td></td></tr><tr><td>Power Supply&amp;nbsp;</td><td>Egilent</td><td>(E3631A)</td><td></td></tr><tr><td>Microscope</td><td>X</td><td></td><td></td></tr><tr><td>Coventor</td><td>Coventor</td><td></td><td>Simulation Tool</td></tr><tr><td>Cadence Virtuoso</td><td>Cadence</td><td></td><td>Simulation Tool</td></tr><tr><td>Multisim</td><td>Multisim</td><td></td><td>Simulation Tool</td></tr></tbody></table>

design and characterization methodology for efficient wide range tunable mems filters

هنا، علينا أن نبرهن مزايا فيبروميتير دوبلر الليزر (لدف) على التقنيات التقليدية (محلل الشبكة)، فضلا عن التقنيات اللازمة لإنشاء عامل تصفية الكهروميكانيكية القائم على تطبيق نظم (MEMS) وكيفية استخدامها (كفاءة أي، وضبط ضبط-القدرة على تجنب الفشل وستيكشن). LDV تمكن القياسات الحاسمة التي من المستحيل مع محلل شبكة اتصال، مثل الكشف عن وضع أعلى (biosensor حساسة للغاية تطبيق) وقياس الرنين لأجهزة صغيرة جداً (سرعة النماذج). وبناء على ذلك، استخدمت LDV لوصف نطاق ضبط تردد وتردد صدى في أوضاع مختلفة من المرشحات ممس بني لهذه الدراسة. هذه الآلية ضبط تردد واسعة النطاق يستند ببساطة جول تدفئة من سخانات المضمنة والإجهاد الحراري عالية نسبيا فيما يتعلق بدرجة حرارة شعاع ثابت ثابت. ومع ذلك، نحن تبين أن قيد آخر لهذا الأسلوب الإجهاد الحراري العالية الناتجة عن ذلك، التي يمكن حرق الأجهزة. تحقيق المزيد من التحسين وسيظهر للمرة الأولى في هذه الدراسة، بحيث أن القدرة على ضبط قد ازداد بنسبة 32% من خلال زيادة التطبيقية DC التحيز الجهد (25 الخامس إلى 35 الخامس) بين الدعامات المجاورة اثنين. هذا الاستنتاج الهام يلغي الحاجة إلى الجول إضافية تدفئة في أوسع نطاق ضبط التردد. فشل محتمل آخر من خلال ستيكشن ومتطلبات الهيكل الأمثل: نقترح تقنية بسيطة وسهلة التطبيق إشارة مربع موجه الترددات المنخفضة التي يمكن بنجاح فصل الحزم ويلغي الحاجة للمزيد أساليب متطورة ومعقدة في الأدب. النتائج المشار إليها أعلاه تتطلب منهجية تصميم، وحتى نوفر أيضا تصميم على أساس التطبيق.

ستيكتيون تم تجنبها بتطبيق إشارة مربع موجه التردد المنخفض وتم التحقق من ذلك باستخدام لدف (الشكل 1). تم التحقق من احتمال فشل بسبب الإجهاد الحراري عالية14 عند تطبيق الجهد DC التحيز العالي نسبيا لسخانات مضمن تحت المجهر (الشكل 2). تم ا?...

Watch this Scientific Journal Video about Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters at JoVE.com

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters

تصميم وتوصيف المنهجية لمرشحات ممس الانضباطي كفاءة واسعة النطاق

ويرد على بروتوكول لتصميم شعاع ثابت ثابت باستخدام فيبروميتير دوبلر ليزر (لدف)، بما في ذلك قياس تردد ضبط، تعديل ضبط القدرة، وتجنب فشل الجهاز وستيكشن،. ويتجلى تفوق الأسلوب LDV عبر محلل الشبكة نظراً لقدرتها على وضع أعلى.

Here, we demonstrate the advantages of the laser Doppler vibrometer (LDV) over conventional techniques (the network analyzer), as well as the techniques ...

design-characterization-methodology-for-efficient-wide-range-tunable

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JoVE Journal

Engineering

6.1K Views.  Harran University. ويرد على بروتوكول لتصميم شعاع ثابت ثابت باستخدام فيبروميتير دوبلر ليزر (لدف)، بما في ذلك قياس تردد ضبط، تعديل ضبط القدرة، وتجنب فشل الجهاز وستيكشن،. ويتجلى تفوق الأسلوب LDV عبر محلل الشبكة نظراً لقدرتها على وضع أعلى.

Video: Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters

Fabrication of Silica Ultra High Quality Factor Microresonators

Whispering gallery resonant cavities confine light in circular orbits at their periphery.1-2 The photon storage lifetime in the cavity, quantified by the quality factor (Q) of the cavity, can be in excess of 500ns for cavities with Q factors above 100 million. As a result of their low material losses, silica microcavities have demonstrated some of the longest photon lifetimes to date1-2. Since a portion of the circulating light extends outside the resonator, these devices can also be used to probe the surroundings. This interaction has enabled numerous experiments in biology, such as single molecule biodetection and antibody-antigen kinetics, as well as discoveries in other fields, such as development of ultra-low-threshold microlasers, characterization of thin films, and cavity quantum electrodynamics studies.3-7
The two primary silica resonant cavity geometries are the microsphere and the microtoroid. Both devices rely on a carbon dioxide laser reflow step to achieve their ultra-high-Q factors (Q&gt;100 million).1-2,8-9 However, there are several notable differences between the two structures. Silica microspheres are free-standing, supported by a single optical fiber, whereas silica microtoroids can be fabricated on a silicon wafer in large arrays using a combination of lithography and etching steps. These differences influence which device is optimal for a given experiment.
Here, we present detailed fabrication protocols for both types of resonant cavities. While the fabrication of microsphere resonant cavities is fairly straightforward, the fabrication of microtoroid resonant cavities requires additional specialized equipment and facilities (cleanroom). Therefore, this additional requirement may also influence which device is selected for a given experiment.
Introduction
An optical resonator efficiently confines light at specific wavelengths, known as the resonant wavelengths of the device. 1-2 The common figure of merit for these optical resonators is the quality factor or Q. This term describes the photon lifetime (&tau;o) within the resonator, which is directly related to the resonator's optical losses. Therefore, an optical resonator with a high Q factor has low optical losses, long photon lifetimes, and very low photon decay rates (1/&tau;o). As a result of the long photon lifetimes, it is possible to build-up extremely large circulating optical field intensities in these devices. This very unique property has allowed these devices to be used as laser sources and integrated biosensors.10
A unique sub-class of resonators is the whispering gallery mode optical microcavity. In these devices, the light is confined in circular orbits at the periphery. Therefore, the field is not completely confined within the device, but evanesces into the environment. Whispering gallery mode optical cavities have demonstrated some of the highest quality factors of any optical resonant cavity to date.9,11 Therefore, these devices are used throughout science and engineering, including in fundamental physics studies and in telecommunications as well as in biodetection experiments. 3-7,12
Optical microcavities can be fabricated from a wide range of materials and in a wide variety of geometries. A few examples include silica and silicon microtoroids, silicon, silicon nitride, and silica microdisks, micropillars, and silica and polymer microrings.13-17 The range in quality factor (Q) varies as dramatically as the geometry. Although both geometry and high Q are important considerations in any field, in many applications, there is far greater leverage in boosting device performance through Q enhancement. Among the numerous options detailed previously, the silica microsphere and the silica microtoroid resonator have achieved some of the highest Q factors to date.1,9 Additionally, as a result of the extremely low optical loss of silica from the visible through the near-IR, both microspheres and microtoroids are able to maintain their Q factors over a wide range of testing wavelengths.18 Finally, because silica is inherently biocompatible, it is routinely used in biodetection experiments.
In addition to high material absorption, there are several other potential loss mechanisms, including surface roughness, radiation loss, and contamination loss.2 Through an optimization of the device size, it is possible to eliminate radiation losses, which arise from poor optical field confinement within the device. Similarly, by storing a device in an appropriately clean environment, contamination of the surface can be minimized. Therefore, in addition to material loss, surface scattering is the primary loss mechanism of concern.2,8
In silica devices, surface scattering is minimized by using a laser reflow technique, which melts the silica through surface tension induced reflow. While spherical optical resonators have been studied for many years, it is only with recent advances in fabrication technologies that researchers been able to fabricate high quality silica optical toroidal microresonators (Q&gt;100 million) on a silicon substrate, thus paving the way for integration with microfluidics.1
The present series of protocols details how to fabricate both silica microsphere and microtoroid resonant cavities. While silica microsphere resonant cavities are well-established, microtoroid resonant cavities were only recently invented.1 As many of the fundamental methods used to fabricate the microsphere are also used in the more complex microtoroid fabrication procedure, by including both in a single protocol it will enable researchers to more easily trouble-shoot their experiments.

We describe the use of a carbon dioxide laser reflow technique to fabricate silica resonant cavities, including free-standing microspheres and on-chip microtoroids. The reflow method removes surface imperfections, allowing long photon lifetimes within both devices. The resulting devices have ultra high quality factors, enabling applications ranging from telecommunications to biodetection.

تلفيق من السيليكا عالية جدا Microresonators عامل الجودة

Whispering gallery resonant cavities confine light in circular orbits at their periphery.1-2 The photon storage lifetime in the cavity, quantified by the ...

Terahertz Microfluidic Sensing Using a Parallel-plate Waveguide Sensor

Refractive index (RI) sensing is a powerful noninvasive and label-free sensing technique for the identification, detection and monitoring of microfluidic samples with a wide range of possible sensor designs such as interferometers and resonators 1,2. Most of the existing RI sensing applications focus on biological materials in aqueous solutions in visible and IR frequencies, such as DNA hybridization and genome sequencing. At terahertz frequencies, applications include quality control, monitoring of industrial processes and sensing and detection applications involving nonpolar materials.
Several potential designs for refractive index sensors in the terahertz regime exist, including photonic crystal waveguides 3, asymmetric split-ring resonators 4, and photonic band gap structures integrated into parallel-plate waveguides 5. Many of these designs are based on optical resonators such as rings or cavities. The resonant frequencies of these structures are dependent on the refractive index of the material in or around the resonator. By monitoring the shifts in resonant frequency the refractive index of a sample can be accurately measured and this in turn can be used to identify a material, monitor contamination or dilution, etc.
The sensor design we use here is based on a simple parallel-plate waveguide 6,7. A rectangular groove machined into one face acts as a resonant cavity (Figures 1 and 2). When terahertz radiation is coupled into the waveguide and propagates in the lowest-order transverse-electric (TE1) mode, the result is a single strong resonant feature with a tunable resonant frequency that is dependent on the geometry of the groove 6,8. This groove can be filled with nonpolar liquid microfluidic samples which cause a shift in the observed resonant frequency that depends on the amount of liquid in the groove and its refractive index 9.
Our technique has an advantage over other terahertz techniques in its simplicity, both in fabrication and implementation, since the procedure can be accomplished with standard laboratory equipment without the need for a clean room or any special fabrication or experimental techniques. It can also be easily expanded to multichannel operation by the incorporation of multiple grooves 10. In this video we will describe our complete experimental procedure, from the design of the sensor to the data analysis and determination of the sample refractive index.

The procedure for implementing a refractive index sensor for terahertz frequencies based on a grooved parallel-plate waveguide geometry is described here. The method yields a measurement of the refractive index of a small volume of liquid through monitoring of the shift in the resonant frequency of the waveguide structure

تيراهيرتز الاستشعار ميكروفلويديك باستخدام الاستشعار الدليل الموجي الموازي لوحة

Refractive index (RI) sensing is a powerful noninvasive and label-free sensing technique for the identification, detection and monitoring of microfluidic ...

Simulation, Fabrication and Characterization of THz Metamaterial Absorbers

Metamaterials (MM), artificial materials engineered to have properties that may not be found in nature, have been widely explored since the first theoretical1 and experimental demonstration2 of their unique properties. MMs can provide a highly controllable electromagnetic response, and to date have been demonstrated in every technologically relevant spectral range including the optical3, near IR4, mid IR5 , THz6 , mm-wave7 , microwave8 and radio9 bands. Applications include perfect lenses10, sensors11, telecommunications12, invisibility cloaks13 and filters14,15. We have recently developed single band16, dual band17 and broadband18 THz metamaterial absorber devices capable of greater than 80% absorption at the resonance peak. The concept of a MM absorber is especially important at THz frequencies where it is difficult to find strong frequency selective THz absorbers19. In our MM absorber the THz radiation is absorbed in a thickness of ~ &lambda;/20, overcoming the thickness limitation of traditional quarter wavelength absorbers. MM absorbers naturally lend themselves to THz detection applications, such as thermal sensors, and if integrated with suitable THz sources (e.g. QCLs), could lead to compact, highly sensitive, low cost, real time THz imaging systems.

This protocol outlines the simulation, fabrication and characterization of THz metamaterial absorbers. Such absorbers, when coupled with an appropriate sensor, have applications in THz imaging and spectroscopy.

المحاكاة، تصنيع وتوصيف امتصاص Metamaterial THz

Metamaterials (MM),  artificial materials engineered to have properties that may not be found in  nature, have been widely explored since the first ...

Implementation of a Reference Interferometer for Nanodetection

A thermally and mechanically stabilized fiber interferometer suited for examining ultra-high quality factor microcavities is fashioned. After assessing its free spectral range (FSR), the module is put in parallel with a fiber taper-microcavity system and then calibrated through isolating and eliminating random shifts in the laser frequency (i.e. laser jitter noise). To realize the taper-microcavity junction and to maximize the optical power that is transferred to the resonator, a single-mode optical fiber waveguide is pulled. Solutions containing polystyrene nanobeads are then prepared and flown to the microcavity in order to demonstrate the system&#8217;s ability to sense binding to the surface of the microcavity. Data is post-processed via adaptive curve fitting, which allows for high-resolution measurements of the quality factor as well as the plotting of time-dependent parameters, such as resonant wavelength and split frequency shifts. By carefully inspecting steps in the time-domain response and shifting in the frequency-domain response, this instrument can quantify discrete binding events.

A reference interferometer technique, which is designed to remove undesirable laser jitter noise for nanodetection, is utilized for probing an ultra-high quality factor microcavity. Instructions for assembly, setup, and data acquisition are provided, alongside the measurement process for specifying the cavity quality factor.

تنفيذ التداخل المرجعي لNanodetection

A thermally and mechanically stabilized fiber interferometer suited for examining ultra-high quality factor microcavities is fashioned. After assessing ...

Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators

Mechanically underdamped electrostatic fringing-field MEMS actuators are well known for their fast switching operation in response to a unit step input bias voltage. However, the tradeoff for the improved switching performance is a relatively long settling time to reach each gap height in response to various applied voltages. Transient applied bias waveforms are employed to facilitate reduced switching times for electrostatic fringing-field MEMS actuators with high mechanical quality factors. Removing the underlying substrate of the fringing-field actuator creates the low mechanical damping environment necessary to effectively test the concept. The removal of the underlying substrate also a has substantial improvement on the reliability performance of the device in regards to failure due to stiction. Although DC-dynamic biasing is useful in improving settling time, the required slew rates for typical MEMS devices may place aggressive requirements on the charge pumps for fully-integrated on-chip designs. Additionally, there may be challenges integrating the substrate removal step into the back-end-of-line commercial CMOS processing steps. Experimental validation of fabricated actuators demonstrates an improvement of 50x in switching time when compared to conventional step biasing results. Compared to theoretical calculations, the experimental results are in good agreement.

The robust device design of fringing-field electrostatic MEMS actuators results in inherently low squeeze-film damping conditions and long settling times when performing switching operations using conventional step biasing. Real-time switching time improvement with DC-dynamic waveforms reduces the settling time of fringing-field MEMS actuators when transitioning between up-to-down and down-to-up states.

في الوقت الحقيقي DC-ديناميكية لتبديل طريقة يتحامل تحسين الوقت في Underdamped بشدة التهديب الميدان كهرباء MEMS المحركات

Mechanically underdamped electrostatic fringing-field MEMS actuators are well known for their fast switching operation in response to a unit step input ...

Fabrication and Testing of Microfluidic Optomechanical Oscillators

Cavity optomechanics experiments that parametrically couple the phonon modes and photon modes have been investigated in various optical systems including microresonators. However, because of the increased acoustic radiative losses during direct liquid immersion of optomechanical devices, almost all published optomechanical experiments have been performed in solid phase. This paper discusses a recently introduced hollow microfluidic optomechanical resonator. Detailed methodology is provided to fabricate these ultra-high-Q microfluidic resonators, perform optomechanical testing, and measure radiation pressure-driven breathing mode and SBS-driven whispering gallery mode parametric vibrations. By confining liquids inside the capillary resonator, high mechanical- and optical- quality factors are simultaneously maintained.

Parametric optomechanical excitations have recently been experimentally demonstrated in microfluidic optomechanical resonators by means of optical radiation pressure and stimulated Brillouin scattering. This paper describes the fabrication of these microfluidic resonators along with methodologies for generating and verifying optomechanical oscillations.

تصنيع واختبار ميكروفلويديك الميكانيكية المذبذبات

Cavity optomechanics experiments that parametrically couple the phonon modes and photon modes have been investigated in various optical systems including ...

Using Micro-Electro-Mechanical Systems (MEMS) to Develop Diagnostic Tools

Using Micro-Electro-Mechanical Systems MEMS to Develop Diagnostic Tools

I'm U De Mercy, I'm the principal investigator of Bio Stick MAMs in Medicine Labs. I did my PhD at Stanford University in electrical engineering. I did a postdoc at Harvard Medical School at MGH working on bio acoustic MAMs or mostly bio MAs.And now I'm continuing as a faculty at Harvard Medical School at Harvard MIT Health Sciences and Technology. And continuing with my research that I enjoy very much. The work that I did during my PhD was very much related to droplets and using acoustics to generate precise size droplets and control their location and position to deposit very sensitive polymers.Now we apply similar technologies to encapsulate cells in droplets and then position them on the surfaces for various applications in tissue engineering to print cells on the surfaces to pattern cells. Also, there are applications where you want to see that you can encapsulate few cells or a single cell or from the same population and to see the differences between the same population from one cell to another there being able to encapsulate cells in droplets at high throughput rates like 10, 000 cells per second kind of rates becomes very important and very useful to understand biological problems. So my research currently has two legs, I would say.One is this cell encapsulation work that I just talked about. How do we pack a cell in a droplet that's, and how can we do this repeatedly and reliably and without harming the cells? So after the cell is ejected or encapsulated in the droplet, we should be able to precisely located on a surface the cell should be functional and alive and viable.It shouldn't be harmed by the effects of ejection and so forth. So currently we have a system where we use acoustic drop focused waves to generate these droplets from open pools where we can encapsulate down to single cells in these really small droplets that are comparable to the cell size. That's very exciting in terms of applying this to cell printing and tissue engineering.The other side of my research is again using these MAMs micro electromechanical system technologies to develop low cost diagnostic tools. Mostly this research uses microfluidic approaches where we can introduce whole blood, very small volumes such as blood from a prick finger prick, less than 10 microliters that you can introduce to a chip. And from that blood we can encapsulate or you can capture certain sub-cellular populations from whole blood.Why is this important? Why should this be cheap for global health applications On top of the mountain in Africa, you want to be able to tell for a HIV patient, for instance, how many CD four T lymphocytes this patient has. Because World Health Organization says that below 200 CD four cells per microliter, you have to start treating the patients In the developed world, you use hundreds of thousands dollars of vert flow cytometers to be able to get this data.And it takes of course time to use and skill of course to be able to use these like huge table size machines. Our small chip can be introduced this small finger brick 10 microliters of whole blood and it'll capture the CD four cells using the surface protein affinities. And then you can rapidly count these cells that are captured because you know that there are CD four cells which are attached to CD four proteins antibodies on the surface of the chip.By controlling the flow rates and shear, you can make sure that the specificity and efficiency for these cell types are optimized. And there's of course always non specific binding, but by our sheer approaches we minimize these effects and make sure that between plus minus 10%errors, which is sufficient to make a diagnostic or prognostic decision on top mountain in Africa. So this has interesting applications for global health as well as these low cost techniques that are disposable can impact the developed world because now these fast blood tests which are really low cost can impact the tests that we use in the developed world.If they're optimized to higher levels of efficiency and specificity, which our initial data shows that they can be, then it'll definitely impact our lives. When I first finished my PhD, I knew more about microfluidics and that in MAMs more than anything else I could see, especially with the droplet application, I could see that if I could print cells and encapsulate cells or manipulate the few cells, single cells, that it'll have great applications in biotechnology area. And I was very interested in working on things that will actually impact people's lives.I used to apply these technologies to semiconductor industry, but then I wanted to to be useful directly to people. So I, that's what directed me towards problems in healthcare. And then that's why I made a big shift and came to a hospital, mass general hospital to the postdoc.And there, you know, I got exposed more and more to problems and it seems, and it's all clear that one of the biggest problems of the world today is global health and there comes illnesses like tuberculosis, HIV that kills thousands of people per day. And these people die not because the drugs are not there, but because there aren't enough diagnostic tools which is much more expensive than the existing drugs. So I know the technology side of the things very well.I get, I got exposed to the biological problems and the more I learned about them, the more I could see that I could make an impact. And that's how it all grew from there. And it's still continuing now.Like I seen biotechnology and in medicine there are like so many problems that actually directly cause our result into loss of people's lives and the technologies, the technology aspect of it and being able to apply it to real world medical problems is a great, I think path to follow. This is like how this whole biotechnology area I think is kind of growing and it's becoming very impactful. If you think about it, HIV cancer, those are big killers in the world.And current micro technologies, current approaches could maybe benefit from early detection of cancer by capturing these cells from blood or making it really cheap, which will make it available to masses. So all these things coming together, I think this whole microtechnology applications in healthcare in medicine could impact the future of human beings. So that's how all these things kind of come together I guess.And being in the Harvard MIT health sciences and technology where on one end you have the technology and on the other end you direct aspect, direct access to patients, direct access to doctors in Brigham and Women's Hospital where I work is a great environment. cause every person that you talk to have their problems and you could maybe it's coming from a different background, provide interesting solutions to those existing real world problems. So this is, I think how I see the whole perspective of how these medical problems meet the technology side.And we try to impact people's lives in a positive way. In single cell cap encapsulation or in cell encapsulation, the major challenge is to be able to encapsulate reliably and repeatably single cells. So you're ejecting 10, 000 hundred thousand cells per second.And how do you make sure that each droplet that you eject has a single cell? This statistics where you are changing the droplet size and minimizing the, optimizing the cell size over the droplet size, which goes into the old problem of packing spheres in a volume and what is the most efficient way to do it. So that's the biggest challenge in the cell printing area for from the technological side.The other aspect of it is now you can say print and precisely locate these cells. How can you generate these three dimensional tissues and how can you keep them alive and how can you transplant them? There comes in the biological end of the problems where you want to now exactly mimic the tissue.We have current approaches to be able to print an eyelet, a pancreas eyelet, and to be able to print using smooth muscle cells, a bladder tissue, directly mimicking what is in human or red bladder so that then we can make this tissue and test how well it performs compared to the real world existing native tissues. So that's the major challenge I guess by taking these novel technologies, how can you make this the ideal tissue that can be replaced, that can be transplanted, that's the, you know, biggest problem from the beginning because the control on single cell gives you the capability to precisely locate them. And then how do you kind of grow it from there?So it's something transplantable there where the impact of human life comes. So that's on that end, what the challenges are in the tissue engineering side of the things in southern encapsulation and in diagnostics using microfluidics, the challenge is to be able to capture a cell out of billions of cells. It's like you have a sugar particle in a salt can and you're trying to pull out that sugar particle and that's like one in a billion.So you, you're processing microliters to milliliters of whole blood and you want to be able to specifically and efficiently without any technological problems like clogging or any biological problems like non-specific binding, you want to be able to isolate at one cell out of billion cells in one microliter of whole blood, you have a few millions of cells. And for the CD four T lymphocyte case in that one microliter, we are after about thousand cells per microliter. So it's like one cell in a thousand kind of a problem where we have shown that it's doable.But when you want to go after circulating tumor cells for cancer, then the challenge becomes one in a billion. So to some summarize it, the challenge is how do we capture this one cell out of billions of other cells around it? And what is the technological aspects?What are the flow rates? What is the device design? What, what are the flow rates?What, what are the volumes of blood that has to be processed and how do you make sure that the cells you capture are the ones that you actually wanted to capture? All these aspects kind formed the whole challenge that can be summarized in one sentence, which is how do you capture this one rare cell out of billion others? So it's really a needle in a haystack kind of problem, which is exciting.And I think this is moving the technologies forward to address these problems is the current technological challenge. Being able to bring them to a level where they do the job that they're supposed to do is one thing. And then taking it to the clinic and making it a product has all different expertise such as being able to start a company, being able to patent these things and all those other aspects come into the picture.And I think we as scientists primarily don't have all of those skills that takes the products from desktop to products. So there comes in again, the importance of collaborations with people who have different backgrounds. And there are many technologies out there that I think could be very impactful and useful.They sometimes don't make it to the clinic or to the use of humankind either because it just didn't happen, wasn't the right time or other effects came into the picture that I just talked about. Or sometimes there isn't a direct link that you couldn't see that the technology could actually solve that problem. And the person who deals with the problem, or let's say the biologists or people in medicine are used to doing it one way for many years.And the people on the technology side mostly if you're not having a biotechnology focus, are not aware of the problems in medicine. So bringing these two sides together is a serious interdisciplinary research. And I think in the past years, the whole emphasis both at NIH level and that we see in research labs and universities is to generate interdisciplinary research.So people end up getting PhDs where they have to know multiple fields. For instance, for my PhD, I had to know acoustics, I had to know mems, I had to know microfluidics and I had to apply this for polymers. So now you see kinda very depth of knowledge in one field where you had to know actually three other fields quite well to be able to solve that problem.So I think the answer is in interdisciplinary research combined with people with business skills to make it available to use of the people, it's a whole big process and some inefficiencies that come in at certain locations. Cause that low percent of tech transfer.

باستخدام مايكرو سيستمز الكهربائية والميكانيكية (ممس) لتطوير أدوات التشخيص

Biology

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization

A micro-electro-mechanical-system (MEMS) is a widely used component in many industries, including energy, biotechnology, medical, communications, and automotive. However, effective inspection and characterization metrology systems are needed to ensure the functional reliability of MEMS. This study presents a system based on digital holography as a tool for MEMS metrology. Digital holography has gained increasing attention in the past 20 years. With the fast development and decreasing cost of sensor arrays, resolution of such systems has increased broadening potential applications. Thus, it has attracted attention from both research and industry sides as a potential reliable tool for industrial metrology. Indeed, by recording the interference pattern between an object beam (which contains sample height information) and a reference beam on a CCD camera, one can retrieve the quantitative phase information of an object. However, most of digital holographic systems are bulky and thus not easy to implement on industry production lines. The novelty of the system presented is that it is lens-less and thus very compact. In this study, it is shown that the Compact Digital Holographic Microscope (CDHM) can be used to evaluate several characteristics typically consider as criteria in MEMS inspections. The surface profiles of MEMS in both static and dynamic conditions are presented. Comparison with AFM is investigated to validate the accuracy of the CDHM.

We present a compact reflection digital holographic system (CDHM) for inspection and characterization of MEMS devices. A lens-less design using a diverging input wave providing natural geometrical magnification is demonstrated. Both static and dynamic studies are presented.

المدمجة عدسة أقل الرقمي المجسم مجهر لفحص ممس وتوصيف

A micro-electro-mechanical-system (MEMS) is a widely used component in many industries, including energy, biotechnology, medical, communications, and ...

Fabrication and Characterization of Superconducting Resonators

Superconducting microwave resonators are of interest for a wide range of applications, including for their use as microwave kinetic inductance detectors (MKIDs) for the detection of faint astrophysical signatures, as well as for quantum computing applications and materials characterization. In this paper, procedures are presented for the fabrication and characterization of thin-film superconducting microwave resonators. The fabrication methodology allows for the realization of superconducting transmission-line resonators with features on both sides of an atomically smooth single-crystal silicon dielectric. This work describes the procedure for the installation of resonator devices into a cryogenic microwave testbed and for cool-down below the superconducting transition temperature. The set-up of the cryogenic microwave testbed allows one to do careful measurements of the complex microwave transmission of these resonator devices, enabling the extraction of the properties of the superconducting lines and dielectric substrate (e.g., internal quality factors, loss and kinetic inductance fractions), which are important for device design and performance.

Superconducting microwave resonators are of interest for detection of light, quantum computing applications and materials characterization. This work presents a detailed procedure for fabrication and characterization of superconducting microwave resonator scattering parameters.

تصنيع وتوصيف الموصلية الرنين

Superconducting microwave resonators are of interest for a wide range of applications, including for their use as microwave kinetic inductance detectors ...

Microparticle Manipulation by Standing Surface Acoustic Waves with Dual-frequency Excitations

We demonstrate a method for increasing the tuning ability of a standing surface acoustic wave (SSAW) for microparticles manipulation in a lab-on-a-chip (LOC) system. The simultaneous excitation of the fundamental frequency and its third harmonic, which is termed as dual-frequency excitation, to a pair of interdigital transducers (IDTs) could generate a new type of standing acoustic waves in a microfluidic channel. Varying the power and the phase in the dual-frequency excitation signals results in a reconfigurable field of the acoustic radiation force applied to the microparticles across the microchannel (e.g., the number and location of the pressure nodes and the microparticle concentrations at the corresponding pressure nodes). This article demonstrates that the motion time of the microparticle to only one pressure node can be reduced ~2-fold at the power ratio of the fundamental frequency greater than ~90%. In contrast, there are three pressure nodes in the microchannel if less than this threshold. Furthermore, adjusting the initial phase between the fundamental frequency and the third harmonic results in different motion rates of the three SSAW pressure nodes, as well as in the percentage of microparticles at each pressure node in the microchannel. There is a good agreement between the experimental observation and the numerical predictions. This novel excitation method can easily and non-invasively integrate into the LOC system, with a wide tenability and only a few changes to the experimental set-up.

A protocol for manipulating the microparticles in a microfluidic channel with a dual-frequency excitation is presented.

يمثل التلاعب بالموجات الصوتية السطحية مع الجسيمات التردد المزدوج الدائمة

We demonstrate a method for increasing the tuning ability of a standing surface acoustic wave (SSAW) for microparticles manipulation in a lab-on-a-chip ...