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Fabrication of 3D Carbon Microelectromechanical Systems (C-MEMS)

12.0K Views

08:01 min

June 17th, 2017

DOI :

10.3791/55649-v

June 17th, 2017

11,954 Views

1School of Engineering and Sciences, Tecnologico de Monterrey, 2Department of Mechanical and Aerospace Engineering, University of California, 3BBB Inc

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Keywords 3D Carbon Microelectromechanical Systems C MEMS
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