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Demonstration of Equal-Intensity Beam Generation by Dielectric Metasurfaces

6.1K Views

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09:33 min

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June 7th, 2019

DOI :

10.3791/59066-v

June 7th, 2019

•
6,065 Views
1Department of Mechanical Engineering, Pohang University of Science and Technology (POSTECH), 2Department of Chemical Engineering, Pohang University of Science and Technology (POSTECH), 3National Institute of Nanomaterials Technology (NINT)

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Keywords Metasurface Fabrication
Dielectric Metasurface
Equal intensity Beam Generation
PECVD
PMMA
Electron Beam Lithography
Silicon Photonics
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