JoVE Logo

Sign In

Harran University

1 ARTICLES PUBLISHED IN JoVE

image

Engineering

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
Hasan Goktas 1
1Department of Electrical and Electronic Engineering, Harran University

A protocol for a fixed-fixed beam design using a laser Doppler vibrometer (LDV), including the measurement of frequency tuning, modification of tuning capability, and avoidance of device failure and stiction, is presented. The superiority of the LDV method over the network analyzer is demonstrated due to its higher mode capability.

JoVE Logo

Privacy

Terms of Use

Policies

Research

Education

ABOUT JoVE

Copyright © 2024 MyJoVE Corporation. All rights reserved