National Chung-Shan Institute of Science and Technology

1 ARTICLES PUBLISHED IN JoVE

Engineering

Probing C₈₄-embedded Si Substrate Using Scanning Probe Microscopy and Molecular Dynamics

Mon-Shu Ho¹, Chih-Pong Huang², Jyun-Hwei Tsai³, Che-Fu Chou¹, Wen-Jay Lee³

¹Department of Physics and Institute of Nanoscience, National Chung Hsing University, ²Metallurgy Section, Materials & Electro-Optics Research Division, National Chung-Shan Institute of Science and Technology, ³National Center for High-Performance Computing

This paper reports the nanomaterial fabrication of a fullerene Si substrate inspected and verified by nanomeasurements and molecular dynamic simulation.