Compact Lens-less Digital Holographic Microscope for MEMS Inspection and CharacterizationThomas Bourgade 1, Sun Jianfei 1, Zhaomin Wang 1, Rosmin Elsa 2, Anand Asundi 1,2
1School of Mechanical and Aerospace Engineering, Center of Laser and Optical Engineering, Nanyang Technological University, 2d'Optron Pte Ltd
We present a compact reflection digital holographic system (CDHM) for inspection and characterization of MEMS devices. A lens-less design using a diverging input wave providing natural geometrical magnification is demonstrated. Both static and dynamic studies are presented.
