Sample Preparation and Data Analysis for Dynamic Measurements
7:42
Results: CDHM Compared to Atomic Force Microscopy and Other Results
9:17
Conclusion
Trascrizione
The overall goal of this procedure is to test micro-electro-mechanical structures to be used in static and dynamic applications using optical full-field measurements with computational and experimental techniques. This method can help answer key q
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We present a compact reflection digital holographic system (CDHM) for inspection and characterization of MEMS devices. A lens-less design using a diverging input wave providing natural geometrical magnification is demonstrated. Both static and dynamic studies are presented.