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Focused Ion Beam Fabrication of LiPON-based Solid-state Lithium-ion Nanobatteries for In Situ Testing

9.8K Views

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10:58 min

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March 7th, 2018

DOI :

10.3791/56259-v

March 7th, 2018

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9,766 Views

1Department of NanoEngineering, University of California San Diego, 2Materials Science and Engineering Program, University of California San Diego, 3Amrita Centre for Nanosciences and Molecular Medicine, Amrita Vishwa Vidyapeetham University

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Keywords Focused Ion Beam
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