Electrospray Deposition of Uniform Thickness Ge23Sb7S70 and As40S60 Chalcogenide Glass FilmsSpencer Novak 1, Pao-Tai Lin 2,3, Cheng Li 4, Nikolay Borodinov 1, Zhaohong Han 5, Corentin Monmeyran 5, Neil Patel 5, Qingyang Du 5, Marcin Malinowski 4, Sasan Fathpour 4, Chatdanai Lumdee 4, Chi Xu 4, Pieter G. Kik 4, Weiwei Deng 6, Juejun Hu 7, Anuradha Agarwal 7, Igor Luzinov 1, Kathleen Richardson 4
1Department of Materials Science and Engineering, Clemson University, 2Department of Materials Science and Engineering, Texas A&M University, 3Department of Electrical and Computer Engineering, Texas A&M University, 4College of Optics and Photonics, Center for Research and Education in Optics and Lasers (CREOL), University of Central Florida, 5Department of Materials Science and Engineering, Massachusetts Institute of Technology, 6Department of Mechanical Engineering, Virginia Polytechnic Institute, 7Microphotonics Center, Massachusetts Institute of Technology
A method of uniform thickness solution-derived chalcogenide glass film deposition is demonstrated using computer numerical controlled motion of a single-nozzle electrospray.
