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Electron Channeling Contrast Imaging for Rapid III-V Heteroepitaxial Characterization

10.8K Views

07:50 min

July 17th, 2015

DOI :

10.3791/52745-v

July 17th, 2015

10,797 Views

1Department of Materials Science and Engineering, The Ohio State University, 2Department of Electrical and Computer Engineering, The Ohio State University, 3Institute of Materials Research, The Ohio State University

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Keywords Electron Channeling Contrast Imaging
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