Name: fabrication of nano-engineered transparent conducting oxides by pulsed laser deposition
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1。基材的准备<ol><li>切1厘米×1厘米的硅衬底，从一个Si晶片，硅是良好的用于SEM表征（平面视图和横截面）。 </li><li>切1厘米×1厘米的玻璃（钠钙，1mm厚），玻璃是最佳的光学和电气特性。 </li><li>互惠接触如果接触，需要在玻璃基板上，可以在真空中蒸发，通过使用掩模。存款10 nm的Cr为提高层间附着力金，存款50 nm的金。 </li><li>切1厘米×1厘米的聚合物样品（ 如四氟乙烯，ETFE）。 </li><li...

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Technol. 20, S35 (2005).</li><li>Fortunato, E., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Transparent+Conducting+Oxides+for+Photovoltaics.">Transparent Conducting Oxides for Photovoltaics.</a> MRS Bulletin. 32, 242 (2007).</li><li>Exarhos, G. J., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Discovery-based+design+of+transparent+conducting+oxide+films.">Discovery-based design of transparent conducting oxide films.</a> Thin Solid Films. 515, 7025 (2007).</li><li>Gondoni, P., Ghidelli, M., Fonzo, F. D. i., Russo, V., Bruno, P., Mart-Rujas, J., Bottani, C. E., Li Bassi, A., Casari, C. S. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Structural+and+functional+properties+of+Al:ZnO+thin+films+grown+by+Pulsed+Laser+Deposition+at+room+temperature.">Structural and functional properties of Al:ZnO thin films grown by Pulsed Laser Deposition at room temperature.</a> Thin Solid Films. 520, 4707-4711 (2012).</li><li>Gondoni, P., Ghidelli, M., Fonzo, F. D. i., Carminati, M., Russo, V., Li Bassi, A., Casari, C. S. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Structure-dependent+optical+and+electrical+transport+properties+of+nanostructured+Al-doped+ZnO.">Structure-dependent optical and electrical transport properties of nanostructured Al-doped ZnO.</a> Nanotechnology. 23, 365706 (2012).</li><li>Casari, C. S., Li Bassi, A., Arkin, W. 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的等离子羽状物的形状是消融过程密切相关，特别是在气体的存在下;监测等离子体羽流通过视觉检查是重要的控制沉积。当沉积金属氧化物，消融的氧化物靶，氧是必要的，以支持在消融过程中的氧损失。在较低的氧背景气体的压力，所沉积的材料可以具有氧空位。这种效果是通过增加的气体压力降低。为了分离从形态学的气体混合物（ 即氩：O 2或He：O 2）的化学计量比?...

脉冲激光沉积（PLD）采用这导致在可沉积在衬底上生长的膜（参见图1）1的等离子体烧蚀物种形成在固体靶的激光烧蚀。带有背景气氛（惰性或反应性）的相互作用，可以用于诱导在气相中（参见图2）2,3均相群集成核。我们的策略的材料合成PLD的基础上调整材料的性能在一个自底向上的方法，通过仔细控制的PLD过程中产生的等离子体动力学。簇的大小，动能和组合物可以是多种多样的沉积参数影响膜的成长，并导致在形态和结构的变化4,5由一个适当的设置。这里描述的方法通过利用我们表明，一些氧化物（ 例如，WO 3银4 O 4，Al 2 O 3届TiO 2的 ）的能力来调整形态，密度，孔隙率，通过修改的材料在纳米级的结构6-11度的结构顺序，化学计量和相位。这允许为特定应用程序12-16的材料的设计。随着光伏应用，我们合成了纳米二氧化钛分层组织通过组装纳米颗粒（&lt;10 nm）的纳米和介孔结构，类似于一个“森林树木13时在染料敏化太阳能电池的光阳极有趣的结果（DSSC ）17。这些先前的结果的基础上，我们描述用于沉积的掺Al的ZnO（AZO）膜，作为透明导电氧化物的协议。 透明导电氧化物（干事）是高的带隙（&gt; 3 eV）的转换成由重掺杂的导体材料，显示电阻率&lt;10 -3欧姆-厘米和80％以上的光学transmittance在可见光范围内。它们是许多应用中的一个关键因素，如触摸屏，太阳能电池18-21，它们通常是由不同的技术，例如溅射，脉冲激光沉积法，化学气相沉积，喷雾热解和解决方案为基础的化学方法生长。其中干事，铟 - 锡 - 氧化物（ITO）已被广泛的研究，它的低电阻率，但患有成本高的缺点和低可用性的铟。 F掺杂的SnO 2（FTO），掺Al的ZnO（AZO）和F-掺杂的氧化锌（FZO），例如铟-自由系统研究现在走向。 能够提供智能化管理的入射光（灯光诱捕）的电极是特别有趣的光伏发电应用。要利用散射调制的规模结构和形貌与光的波长（ 例如：300-1000 nm）的，很好的控制在可见光通过的可能性膜的形态和在群集组件架构是必要的。 特别是，我们将介绍如何调整的AZO膜的形貌和结构。紧凑型AZO沉积在低压力（2帕氧），并在室温下，而其特征在于低电阻率（4.5×10 -4欧姆-厘米）和可见光透明度（&gt; 90％），它是具有竞争力AZO沉积在高温下AZO层次结构是通过消融O 2大于100帕的压力，这些结构显示出强烈的光散射能力，雾度高达80％以上22,23。

<table border="1"><tbody><tr><td> 的试剂/材料名称 </td><td> 公司 </td><td> 目录编号 </td></tr><tr><td>脉冲激光</td><td>连续的Quantronix </td><td> POWERLITE 8010 </td></tr><tr><td>功率计</td><td>连贯</td><td> FieldMaxII-TO </td></tr><tr><td>离子枪</td><td>螳螂出发</td><td> RFMax60 </td></tr><tr><td>质量流量控制器</td><td> MKS </td><td> 2179° </td></tr><tr><td>石英晶体微天平</td><td> Infcon </td><td> XTC / 2 </td></tr><tr><td>背景气体</td><td> Rivoira - 普莱克斯</td><td> 5.0氧气</td></tr><tr><td>目标</td><td>库尔特Lesker </td><td> （要求） </td></tr><tr><td>异丙醇</td><td> Sigma Aldrich公司</td><td> 190764-2L </td></tr><tr><td>源表</td><td>吉时利</td><td> K2400 </td></tr><tr><td>磁铁套装</td><td> ECOPIA </td><td> 0.55T试剂盒</td></tr><tr><td>分光光度计</td><td>珀金埃尔默</td><td> LAMBDA 1050 </td></tr></tbody></table>

fabrication of nano-engineered transparent conducting oxides by pulsed laser deposition

纳秒的脉冲激光沉积（PLD）中的背景气体的存在下，使金属氧化物的沉积，与可调的形态，结构，密度和化学计量由一个适当的控制的等离子羽状物的膨胀动力学。这种通用性可以被利用来产生纳米薄膜从紧凑的和致密的纳米多孔其特征在于由一个分层组件的纳米尺寸的簇。特别是，我们描述了详细的方法，制备两种类型的掺Al的ZnO（AZO）膜，作为透明电极在光生伏打器件中：1）在低O 2压力，紧凑的薄膜的导电性和光学透明性本领域的状态接近透明导电氧化物（TCO），可以沉积在室温下，与热敏感材料，如用的聚合物在有机光伏（OPVs）; 2）高的光散射的层次结构类似于森林纳米树兼容产品在更高压力uced。这种结构显示出高的雾度因子（&gt; 80％），并且可能被利用，提高光俘获能力。 AZO薄膜为这里所描述的方法可以适用于其他金属氧化物有关的技术的应用，例如WO 3中的Al 2 O 3，TiO 2的 ，和Ag 4 O 4。

通过PLD在氧气氛中沉积的AZO产生紧凑的透明导电膜在低背景气体的压力（ 即 2帕）和介孔的森林状结构通过分层组装在高压力（ 即 160帕）的簇构成。该材料是由纳米晶域的大小是最大（30纳米）22 2帕。 由于烧蚀物种之间的碰撞和背景气体，等离子羽状物的形状和长度的变化与在腔室中的氧气压力显着。 （请参阅图2和图3中的照...

Watch this Scientific Journal Video about Fabrication of Nano-engineered Transparent Conducting Oxides by Pulsed Laser Deposition at JoVE.com

Fabrication of Nano-engineered Transparent Conducting Oxides by Pulsed Laser Deposition

我们描述了实验的背景气体的存在下，在纳秒的脉冲激光沉积（PLD）方法来沉积纳米结构的氧化物薄膜。通过使用此方法的掺Al的ZnO（AZO）膜，从紧凑型分层结构为纳米树森林，可以沉积。

制备纳米设计的脉冲激光沉积透明导电氧化物

Nanosecond Pulsed  Laser Deposition (PLD) in the presence of a background gas allows the deposition  of metal oxides with tunable morphology, structure, ...

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Investigation of Early Plasma Evolution Induced by Ultrashort Laser Pulses

超短激光脉冲诱导的等离子体演化早期的调查

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When a laser is mode-locked, it emits a train of ultra-short pulses at a repetition rate determined by the laser cavity length. This article outlines a ...

Fabrication of 1-D Photonic Crystal Cavity on a Nanofiber Using Femtosecond Laser-induced Ablation

1-D光子晶体空穴对纳米纤维使用飞秒激光诱导消融制造

We present a protocol for fabricating 1-D Photonic Crystal (PhC) cavities on subwavelength-diameter tapered optical fibers, optical nanofibers, using ...

Fabrication of Polymer Microspheres for Optical Resonator and Laser Applications

用于光学谐振器和激光应用的聚合物微球的制造

This paper describes three methods of preparing fluorescent microspheres comprising &#960;-conjugated or non-conjugated polymers: vapor diffusion, ...

Scalable Solution-processed Fabrication Strategy for High-performance, Flexible, Transparent Electrodes with Embedded Metal Mesh

具有嵌入式金属网的高性能，灵活，透明电极的可扩展解决方案处理制造策略

Here, the authors report the embedded metal-mesh transparent electrode (EMTE), a new transparent electrode (TE) with a metal mesh completely embedded in a ...

Fabrication of Ultra-thin Color Films with Highly Absorbing Media Using Oblique Angle Deposition

用斜角沉积法制备高吸收介质的超薄彩色薄膜

Ultra-thin film structures have been studied extensively for use as optical coatings, but performance and fabrication challenges remain.&#160; We present ...

Production of Single Tracks of Ti-6Al-4V by Directed Energy Deposition to Determine the Layer Thickness for Multilayer Deposition

用定向能沉积法生产 Ti-6Al-4V 层厚度的单车道多层沉积

Directed Energy Deposition (DED), which is an additive manufacturing technique, involves the creation of a molten pool with a laser beam where metal ...