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JoVE Journal

Engineering

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Fabrication of Nano-engineered Transparent Conducting Oxides by Pulsed Laser Deposition

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10:27 min

February 27th, 2013

February 27th, 2013

15,386 Views

0:05

Title

1:30

Substrate Preparation

2:01

Laser Alignment and Selection of Laser Parameters

3:33

Target Alignment, Pre-ablation and Data Collection for Plasma Plume Length Determination

4:51

Calibration of the Film Thickness

5:58

Deposition of Compact AZO Films

7:25

Deposition of Hierarchically Structured AZO Films

8:08

Results: Compact and Forest-like AZO Films and Their Properties

9:39

Conclusion

We describe the experimental method to deposit nanostructured oxide thin films by nanosecond Pulsed Laser Deposition (PLD) in the presence of a background gas. By using this method Al-doped ZnO (AZO) films, from compact to hierarchically structured as nano-tree forests, can be deposited.

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