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DOI :
10.3791/50297-v
February 27th, 2013
Chapters
0:05
Title
1:30
Substrate Preparation
2:01
Laser Alignment and Selection of Laser Parameters
3:33
Target Alignment, Pre-ablation and Data Collection for Plasma Plume Length Determination
4:51
Calibration of the Film Thickness
5:58
Deposition of Compact AZO Films
7:25
Deposition of Hierarchically Structured AZO Films
8:08
Results: Compact and Forest-like AZO Films and Their Properties
9:39
Conclusion
我々は、バックグラウンドガスの存在下でナノ秒パルスレーザー堆積(PLD)法によるナノ構造酸化物薄膜を堆積させるための実験方法を説明します。この方法AlドープZnO(AZO)膜を用いて、ナノツリー林の階層構造にコンパクトから、堆積させることができる。
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