Research
Education
Sign In
EN
EN - English
CN - 中文
DE - Deutsch
ES - Español
KR - 한국어
IT - Italiano
FR - Français
PT - Português
TR - Turkish
JA - Japanese
Please note that all translations are automatically generated. Click here for the English version.
10.2K Views
•
11:44 min
August 15th, 2014
DOI :
10.3791/51251-v
Chapters
0:05
Title
1:08
Fabrication of Electrostatic Fringing-field Actuated (EFFA) MEMS Fixed-fixed Beams
8:28
Experimental Validation of Dynamic Waveform Biasing
10:23
Results: Measured Pull-down and Released States of a MEMS Bridge
11:16
Conclusion
Summary
当执行使用传统的一步偏置开关操作的边缘电场静电MEMS驱动器会导致固有的低挤压膜阻尼条件和长期稳定时间坚固的设备设计。实时的切换时间的改善,提供直流动态波形降低了边缘场的建立时间之间的转换时,MEMS致动器向上到向下和向下到向上的状态。
Explore More Videos
Privacy
Terms of Use
Policies
Contact Us
Recommend to library
JoVE NEWSLETTERS
JoVE Journal
Methods Collections
JoVE Encyclopedia of Experiments
Archive
JoVE Core
JoVE Business
JoVE Science Education
JoVE Lab Manual
Faculty Resource Center
Authors
Librarians
Access
ABOUT JoVE
Copyright © 2024 MyJoVE Corporation. All rights reserved