Name: real-time dc-dynamic biasing method for switching time improvement in severely underdamped fringing-field electrostatic mems actuators
Uploaded: 2014-08-15T17:00:00
Description: Watch this Scientific Journal Video about Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators at JoVE.com

Forfatterne ønsker at takke Ryan Tung for hans hjælp og nyttige tekniske drøftelser. Forfatterne ønsker også at anerkende den hjælp og støtte af det tekniske personale Birck Nanotechnology Center. Dette arbejde blev støttet af Defense Advanced Research Projects Agency under Purdue Mikroovn Omkonfigurable Evanescent-Mode hulrum filtre Study. Og også ved NNSA Center Forudsigelse af troværdighed, integritet og overlevelsesevne Microsystems og Department of Energy i henhold Award nummer DE-FC5208NA28617. De synspunkter, meninger og / eller fund, der er indeholdt i dette dokument / præsentation er forfatternes / oplægsholdere og bør ikke fortolkes som repræsenterende de officielle synspunkter eller politik, hverken udtrykt eller underforstået, af Defense Advanced Research Projects Agency eller Institut forsvarsministerium.

1. Fremstilling af EFFA MEMS fastforrentede fast Bjælker (Se figur 3 for Opsummeret Process) <ol><li> UV-litografi og kemisk våd ætsning af siliciumdioxid med bufferet flussyre (ADVARSEL 27). <ol><li> Brug en oxideret, lav resistivitet silicium substrat. </li><li> Fyld et glas bægerglas med acetone 28 (nok til at oversvømme prøven), som anbringes prøven i acetone fyldt bæger, og soniker i 5 min i et vandbad sonikator. </li><li> Uden tørring direkte overføre prøven fra acetone bægeret ...

<ol>
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Lav restspændinger Au film deposition og en tør udgivelse med XeF 2 er kritisk komponenter i en vellykket fremstilling af enheden. Elektrostatiske sløring-field aktuatorer giver relativt lave styrker, i forhold til parallel-plade felt aktuatorer. Typiske MEMS tyndfilm stress&gt; 60 MPa vil resultere i alt for høje drivspændinger som potentielt kan kompromittere pålideligheden af ​​EFFA MEMS. Af denne grund galvanisering opskrift er nøje karakteriseret til opnåelse af en tynd film med lav toakset g...

Mikroelektromekaniske systemer (MEMS) udnytte flere aktiveringsmekanismer at opnå mekanisk forskydning. De mest populære er termisk, piezoelektriske, magnetostatiske, og elektrostatisk. For kort skiftetid, elektrostatiske aktivering er den mest populære teknik 1, 2. I praksis kritisk dæmpet mekaniske design giver det bedste kompromis mellem første stigning tid og afvikling tid. Ved at anvende DC bias og aktivering membranen ned mod pull-down elektrode, en bilæggelse tid ikke er et vigtigt spørgsmål som membranen vil snap ned og holde sig til den dielektriske coatede aktivering elektrode. Flere ansøgninger har nydt godt af ovennævnte elektrostatiske aktivering design 3-8. Tilstedeværelsen af ​​det dielektriske belagte pull-down elektrode gør aktuatoren modtagelige for dielektrisk opladning og stiction. MEMS membraner kan udnytte en underdamped mekanisk design for at opnå en hurtig første stigning tid. Et eksempel på en underdamped mekanisk design er den elektrostatiske sløring felt aktiveres (EFFA) MEMS. Denne topologi har udstillet langt mindre sårbarhed over for typiske brudmekanismer der plager elektrostatiske baseret design 9-20. Fraværet af den parallelle modelektrode og dermed parallelle elektriske felt er hvorfor disse MEMS er passende kaldes &quot;sløring-feltet&quot; aktiveres (figur 1). For EFFA design, er pull-down elektrode opdelt i to separate elektroder, der er placeret sideværts offset til bevægelige membran og fuldstændig fjerne overlapningen mellem de bevægelige og stationære dele af indretningen. Men fjernelse af substratet fra under den bevægelige membran reducerer squeeze filmen dæmpning komponent derved øge indsvingningstid. 2B er et eksempel på indsvingningstid reaktion på standard trin påvirke. Forbigående, eller DC-dynamisk anvendt forspænding i realtid kan anvendes til at forbedre indstillingstid 20-26. Figurerne 2C og 2D kvalitativt illustrere, hvordan en tidsvarierende bølgeform effektivt kan annullere ringer. Tidligere forskningsindsats udnytte numeriske metoder til at beregne den nøjagtige spænding og tider af input bias at forbedre skiftetid. Metoden i dette arbejde anvender kompakte lukkede form udtryk til at beregne indgangsforspændingsdioder bølgeform parametre. Derudover tidligere arbejde fokuseret på parallel plade aktivering. Mens strukturer er designet til at blive underdamped, squeeze-film dæmpning er stadig tilgængelig i denne konfiguration. Aktiveringen metode præsenteres i dette arbejde er sløring-felt aktivering. I denne konfiguration squeeze-film dæmpning effektivt elimineret. Dette udgør et ekstremt tilfælde, hvor den mekaniske dæmpning af MEMS strålen er meget lav. Dette papir beskriver, hvordan man fremstille EFFA MEMS devICES og udføre målingen til eksperimentelt validere bølgeform koncept.

<table border="0" cellpadding="0" cellspacing="0" width="746">
	<tbody>
		<tr height="21">
			<td height="21" style="height:21px;width:251px;">Chemical</td>
			<td style="width:163px;">Company</td>
			<td style="width:137px;">Catalogue number</td>
			<td style="width:195px;">Comments (optional)</td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;">Buffered oxide etchant</td>
			<td>Mallinckrodt Baker</td>
			<td>1178</td>
			<td>Silicon dioxide etch, Ti etch</td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;">Acetone</td>
			<td>Mallinckrodt Baker</td>
			<td>5356</td>
			<td>wafer clean</td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;">Isopropyl alcohol</td>
			<td>Honeywell</td>
			<td>BDH-140</td>
			<td>wafer clean</td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;">Hexamethyldisilizane</td>
			<td>Mallinckrodt Baker</td>
			<td>5797</td>
			<td>adhesion promoter</td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;">Microposit SC 1827 Positive Photoresist</td>
			<td>Shipley Europe Ltd</td>
			<td>44090</td>
			<td>Pattern, electroplating</td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;">Microposit MF-26A developer</td>
			<td>Shipley Europe Ltd</td>
			<td>31200</td>
			<td>Develop SC 1827</td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;">Tetramethylammonium hydroxide</td>
			<td>Sigma-Aldrich</td>
			<td>334901</td>
			<td>Bulk Si etch</td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;">Hydrofluroic acid</td>
			<td>Sciencelab.com</td>
			<td>SLH2227</td>
			<td>Silicon dioxide etch</td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;">Sulfuric acid</td>
			<td>Sciencelab.com</td>
			<td>SLS2539</td>
			<td>wafer clean</td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;">Hydrogen peroxide</td>
			<td>Sciencelab.com</td>
			<td>SLH1552</td>
			<td>Wafer clean</td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;">Transene Sulfite Gold TSG-250</td>
			<td>Transense</td>
			<td>110-TSG-250</td>
			<td>Au electroplating solution</td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;">Baker PRS-3000 Positive Resist Stripper</td>
			<td>Mallinckrodt Baker</td>
			<td>6403</td>
			<td>Photoresist stripper</td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;">Gold etchant type TFA</td>
			<td>Transense</td>
			<td>060-0015000</td>
			<td>Au etch</td>
		</tr>
	</tbody>
</table>

real-time dc-dynamic biasing method for switching time improvement in severely underdamped fringing-field electrostatic mems actuators

Mekanisk underdamped elektrostatisk sløring-field MEMS aktuatorer er kendt for deres hurtige omskiftning som reaktion på en enhed skridt input bias spænding. Men den tradeoff for forbedrede skifte ydeevne er en relativt lang afvikling tid at nå hver spaltehøjden som reaktion på forskellige anvendte spændinger. Forbigående anvendt bias-kurver er ansat til at lette reducerede aktiveringstiderne for elektrostatiske sløring-field MEMS aktuatorer med høj mekanisk kvalitet faktorer. Fjernelse af underliggende substrat aktuatorens sløring-felt opretter den lave mekaniske dæmpning miljø nødvendige for effektivt at teste konceptet. Fjernelsen af ​​det underliggende substrat også en har væsentlig forbedring i forhold til pålideligheden af ​​apparatets ydeevne i forhold til fejl på grund af stiction. Selvom DC-dynamisk påvirke er nyttig til at forbedre afregning tid, kan de krævede dræbte satser for typiske MEMS enheder placere aggressive krav til opladning pumps for fuldt integreret on-chip design. Derudover kan der være udfordringer, der integrerer substrat fjernelse skridt ind i back-end-of-line kommercielle CMOS procestrin den. Eksperimentel validering af fabrikerede aktuatorer viser en forbedring på 50x i skiftetid sammenlignet med konventionelle trin forspænding resultater. Sammenlignet med teoretiske beregninger, de eksperimentelle resultater er i god overensstemmelse.

Opsætningen i figur 4 anvendes til at fange afbøjning versus tidskarakteristika af MEMS broer. Ved hjælp af laser-doppler-vibrometer i kontinuerlig måling tilstand, kan de præcise spænding og tidsparametre findes at resultere i minimum stråle svingning for den ønskede spaltehøjden. Figur 5 illustrerer et eksempel stråle deformation svarende til 60 V spaltehøjden. Det ses, at næsten alle af svingningerne er fjernet. Ikke alene er den dynamiske bølgeform nyttigt for et hul h?...

Watch this Scientific Journal Video about Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators at JoVE.com

Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators

Den robuste enhed design sløring-field elektrostatiske MEMS aktuatorer resultater i sagens natur lavt squeeze-film dæmpning forhold og lange bosætter tidspunkter, hvor du udfører rangering ved hjælp af konventionelle trin påvirke. Real-time skifte tid forbedring med DC-dynamiske kurver reducerer afvikling tid af sløring felt MEMS aktuatorer, hvor der skiftes mellem op-til-ned og nede-på-up stater.

Real-Time DC-dynamisk Prioritering Metode til Switching Time Forbedring Alvorligt Underdamped Fringing-felt Elektrostatiske MEMS aktuatorer

Mechanically underdamped electrostatic fringing-field MEMS actuators are well known for their fast switching operation in response to a unit step input ...

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Here, we demonstrate the advantages of the laser Doppler vibrometer (LDV) over conventional techniques (the network analyzer), as well as the techniques ...

Growth and Electrostatic/chemical Properties of Metal/LaAlO3/SrTiO3 Heterostructures

Growth and Electrostatic/chemical Properties of Metal/LaAlO3/SrTiO3 Heterostructures

Vækst og elektrostatisk/kemiske egenskaber af Metal/LaAlO3/SrTiO3 Heterostructures

The quasi 2D electron system (q2DES) that forms at the interface between LaAlO3 (LAO) and SrTiO3 (STO) has attracted much attention from the oxide ...

Fabrication of Soft Pneumatic Network Actuators with Oblique Chambers

Fabrikation af bløde pneumatisk netværk aktuatorer med skrå kamre

Soft pneumatic network actuators have become one of the most promising actuation devices in soft robotics which benefits from their large bending ...

Optimized Sealing Process and Real-Time Monitoring of Glass-to-Metal Seal Structures

Optimeret tætnings proces og realtidsovervågning af glas-til-metal-tætnings strukturer

Residual stress is an essential factor to keeping the hermeticity and robustness of a glass-to-metal seal structure. The purpose of this report is to ...

Rapid Manufacturing of Thin Soft Pneumatic Actuators and Robots

Hurtig fremstilling af tynde, bløde pneumatiske aktuatorer og robotter

This protocol describes a method for rapid manufacturing of soft pneumatic actuators and robots with an ultrathin form factor using a heat press and a ...

In Situ Transmission Electron Microscopy with Biasing and Fabrication of Asymmetric Crossbars Based on Mixed-Phased a-VOx

In Situ Transmission Electron Microscopy with Biasing and Fabrication of Asymmetric Crossbars Based on Mixed-Phased a-VOx

In Situ Transmission Electron Mikroskopi med biasing og fremstilling af asymmetriske overliggere baseret på blandet faset en-VOx