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Atomically Spornanostrukturen Fabrication

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12:35 min

July 17th, 2015

July 17th, 2015

8,605 Views

0:05

Title

2:15

Scanning Tunneling Microscopy and Lithography

5:42

Atomic Layer Deposition

6:37

Atomic Force Microscopy and Reactive Ion Etching

8:47

Scanning Electron Microscopy

9:58

Results: Surface Patterning with Selective Atomic Layer Deposition and Reactive Ion Etching

11:39

Conclusion

We report a protocol for combining the atomic metrology of the Scanning Tunneling Microscope for surface patterning with selective Atomic Layer Deposition and Reactive Ion Etching. Using a robust process involving numerous atmospheric exposures and transport, 3D nanostructures with atomic metrology are fabricated.

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