집중 태양 광 발전 시스템의 스펙트럼 분할 흩어 요소에 대한 고 대비 격자의 제작

The fabrication of high contrast gratings as the parallel spectrum splitting dispersive element in a concentrated photovoltaic system is demonstrated. Fabrication processes including nanoimprint lithography, TiO₂ sputtering and reactive ion etching are described. Reflectance measurement results are used to characterize the optical performance.