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DOI :
10.3791/55289-v
March 23rd, 2017
Chapters
0:00
Title
3:36
Au Electroplating and ALD Al2O3
6:27
Pattern C-shape SRRs
7:51
Results: Au Nanopillar-based SRRs with 10 nm Al2O3 Gaps
9:40
Conclusion
一个设计和一个新的基于纳米柱,开口环谐振器(SRR)的制造协议提出。
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