Name: scalable solution-processed fabrication strategy for high-performance, flexible, transparent electrodes with embedded metal mesh
Uploaded: 2017-06-23T15:00:00
Description: Watch this Scientific Journal Video about Scalable Solution-processed Fabrication Strategy for High-performance, Flexible, Transparent Electrodes with Embedded Metal Mesh at JoVE.com

这项工作得到了香港特别行政区研究资助委员会（第17246116号）综合研究基金，中国国家自然科学基金（61306123）青年学者计划，基础研究计划 - 深圳市科技创新委员会通用计划（JCYJ20140903112959959），浙江省科技厅重点研究发展计划（2017C01058）。作者感谢Y.-T.黄和SP峰对光学测量的帮助。

注意：请注意电子束的安全。请戴上正确的防护眼镜和衣服。另外，请仔细处理所有易燃溶剂和溶液。 1.基于光刻的EMTE制造<ol><li> 光刻用于制造网格图案。 <ol><li>使用棉签将液体洗涤剂清洁FTO玻璃基板（3厘米×3厘米）。用干净的棉签将去离子水（DI）水彻底冲洗干净。使用超声波（频率= 40 kHz，温度= 25°C）在异丙醇（IPA）中进行30秒清洗，然后用压缩空气干燥?...

<ol>
	<li>Hecht, D. S., Hu, L., Irvin, G. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Emerging+Transparent+Electrodes+Based+on+Thin+Films+of+Carbon+Nanotubes,+Graphene,+and+Metallic+Nanostructures.">Emerging Transparent Electrodes Based on Thin Films of Carbon Nanotubes, Graphene, and Metallic Nanostructures.</a> Adv Mater. 23 (13), 1482-1513 (2011).</li><li>Bonaccorso, F., Sun, Z., Hasan, T., Ferrari, A. C. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Graphene+photonics+and+optoelectronics.">Graphene photonics and optoelectronics.</a> Nat Photonics. 4 (9), 611-622 (2010).</li><li>Kirchmeyer, S., Reuter, K. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Scientific+importance,+properties+and+growing+applications+of+poly(3,4-ethylenedioxythiophene).">Scientific importance, properties and growing applications of poly(3,4-ethylenedioxythiophene).</a> J Mater Chem. 15 (21), 2077-2088 (2005).</li><li>Vosgueritchian, M., Lipomi, D. J., Bao, Z. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Highly+Conductive+and+Transparent+PEDOT:PSS+Films+with+a+Fluorosurfactant+for+Stretchable+and+Flexible+Transparent+Electrodes.">Highly Conductive and Transparent PEDOT:PSS Films with a Fluorosurfactant for Stretchable and Flexible Transparent Electrodes.</a> Adv Funct Mater. 22 (2), 421-428 (2012).</li><li>Zhang, M., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Strong,+Transparent,+Multifunctional,+Carbon+Nanotube+Sheets.">Strong, Transparent, Multifunctional, Carbon Nanotube Sheets.</a> Science. 309 (5738), 1215-1219 (2005).</li><li>De, S., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Silver+Nanowire+Networks+as+Flexible,+Transparent,+Conducting+Films:+Extremely+High+DC+to+Optical+Conductivity+Ratios.">Silver Nanowire Networks as Flexible, Transparent, Conducting Films: Extremely High DC to Optical Conductivity Ratios.</a> ACS Nano. 3 (7), 1767-1774 (2009).</li><li>van de Groep, J., Spinelli, P., Polman, A. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Transparent+Conducting+Silver+Nanowire+Networks.">Transparent Conducting Silver Nanowire Networks.</a> Nano Lett. 12 (6), 3138-3144 (2012).</li><li>Hong, S., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Highly+Stretchable+and+Transparent+Metal+Nanowire+Heater+for+Wearable+Electronics+Applications.">Highly Stretchable and Transparent Metal Nanowire Heater for Wearable Electronics Applications.</a> Adv Mater. 27 (32), 4744-4751 (2015).</li><li>Bari, B., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Simple+hydrothermal+synthesis+of+very-long+and+thin+silver+nanowires+and+their+application+in+high+quality+transparent+electrodes.">Simple hydrothermal synthesis of very-long and thin silver nanowires and their application in high quality transparent electrodes.</a> J Mater Chem A. 4 (29), 11365-11371 (2016).</li><li>Hyunjin, M., Phillip, W., Jinhwan, L., Seung Hwan, K. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Low-haze,+annealing-free,+very+long+Ag+nanowire+synthesis+and+its+application+in+a+flexible+transparent+touch+panel.">Low-haze, annealing-free, very long Ag nanowire synthesis and its application in a flexible transparent touch panel.</a> Nanotechnol. 27 (29), 295201 (2016).</li><li>Lee, H., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Highly+Stretchable+and+Transparent+Supercapacitor+by+Ag-Au+Core-Shell+Nanowire+Network+with+High+Electrochemical+Stability.">Highly Stretchable and Transparent Supercapacitor by Ag-Au Core-Shell Nanowire Network with High Electrochemical Stability.</a> ACS Appl Mater Interfaces. 8 (24), 15449-15458 (2016).</li><li>Cairns, D. R., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Strain-dependent+electrical+resistance+of+tin-doped+indium+oxide+on+polymer+substrates.">Strain-dependent electrical resistance of tin-doped indium oxide on polymer substrates.</a> Appl Phys Lett. 76 (11), 1425-1427 (2000).</li><li>Bel Hadj Tahar, R., Ban, T., Ohya, Y., Takahashi, Y. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Tin+doped+indium+oxide+thin+films:+Electrical+properties.">Tin doped indium oxide thin films: Electrical properties.</a> J Appl Phys. 83 (5), 2631-2645 (1998).</li><li>Kumar, A., Zhou, C. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=The+Race+To+Replace+Tin-Doped+Indium+Oxide:+Which+Material+Will+Win?.">The Race To Replace Tin-Doped Indium Oxide: Which Material Will Win?.</a> ACS Nano. 4 (1), 11-14 (2010).</li><li>Hong, S., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Nonvacuum,+Maskless+Fabrication+of+a+Flexible+Metal+Grid+Transparent+Conductor+by+Low-Temperature+Selective+Laser+Sintering+of+Nanoparticle+Ink.">Nonvacuum, Maskless Fabrication of a Flexible Metal Grid Transparent Conductor by Low-Temperature Selective Laser Sintering of Nanoparticle Ink.</a> ACS Nano. 7 (6), 5024-5031 (2013).</li><li>Wu, H., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=A+Transparent+Electrode+Based+on+a+Metal+Nanotrough+Network.">A Transparent Electrode Based on a Metal Nanotrough Network.</a> Nat Nanotechnol. 8 (6), 421-425 (2013).</li><li>Han, B., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Uniform+Self-Forming+Metallic+Network+as+a+High-Performance+Transparent+Conductive+Electrode.">Uniform Self-Forming Metallic Network as a High-Performance Transparent Conductive Electrode.</a> Adv Mater. 26 (6), 873-877 (2014).</li><li>Kim, H. -. J., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=High-Durable+AgNi+Nanomesh+Film+for+a+Transparent+Conducting+Electrode.">High-Durable AgNi Nanomesh Film for a Transparent Conducting Electrode.</a> Small. 10 (18), 3767-3774 (2014).</li><li>Kwon, J., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Low-Temperature+Oxidation-Free+Selective+Laser+Sintering+of+Cu+Nanoparticle+Paste+on+a+Polymer+Substrate+for+the+Flexible+Touch+Panel+Applications.">Low-Temperature Oxidation-Free Selective Laser Sintering of Cu Nanoparticle Paste on a Polymer Substrate for the Flexible Touch Panel Applications.</a> ACS Appl Mater Interfaces. 8 (18), 11575-11582 (2016).</li><li>Suh, Y. D., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Nanowire+reinforced+nanoparticle+nanocomposite+for+highly+flexible+transparent+electrodes:+borrowing+ideas+from+macrocomposites+in+steel-wire+reinforced+concrete.">Nanowire reinforced nanoparticle nanocomposite for highly flexible transparent electrodes: borrowing ideas from macrocomposites in steel-wire reinforced concrete.</a> J Mater Chem C. 5 (4), 791-798 (2017).</li><li>Bao, C., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=In+Situ+Fabrication+of+Highly+Conductive+Metal+Nanowire+Networks+with+High+Transmittance+from+Deep-Ultraviolet+to+Near-Infrared.">In Situ Fabrication of Highly Conductive Metal Nanowire Networks with High Transmittance from Deep-Ultraviolet to Near-Infrared.</a> ACS Nano. 9 (3), 2502-2509 (2015).</li><li>van Osch, T. H. J., Perelaer, J., de Laat, A. W. M., Schubert, U. S. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Inkjet+Printing+of+Narrow+Conductive+Tracks+on+Untreated+Polymeric+Substrates.">Inkjet Printing of Narrow Conductive Tracks on Untreated Polymeric Substrates.</a> Adv Mater. 20 (2), 343-345 (2008).</li><li>Ahn, B. Y., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Omnidirectional+Printing+of+Flexible,+Stretchable,+and+Spanning+Silver+Microelectrodes.">Omnidirectional Printing of Flexible, Stretchable, and Spanning Silver Microelectrodes.</a> Science. 323 (5921), 1590-1593 (2009).</li><li>Khan, A., Rahman, K., Hyun, M. -. T., Kim, D. -. S., Choi, K. -. H. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Multi-nozzle+electrohydrodynamic+inkjet+printing+of+silver+colloidal+solution+for+the+fabrication+of+electrically+functional+microstructures.">Multi-nozzle electrohydrodynamic inkjet printing of silver colloidal solution for the fabrication of electrically functional microstructures.</a> Appl Phys A. 104 (4), 1113-1120 (2011).</li><li>Khan, A., Rahman, K., Kim, D. S., Choi, K. H. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Direct+printing+of+copper+conductive+micro-tracks+by+multi-nozzle+electrohydrodynamic+inkjet+printing+process.">Direct printing of copper conductive micro-tracks by multi-nozzle electrohydrodynamic inkjet printing process.</a> J Mater Process Technol. 212 (3), 700-706 (2012).</li><li>Ellmer, K. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Past+achievements+and+future+challenges+in+the+development+of+optically+transparent+electrodes.">Past achievements and future challenges in the development of optically transparent electrodes.</a> Nat Photonics. 6 (12), 809-817 (2012).</li><li>Choi, H. -. J., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Uniformly+embedded+silver+nanomesh+as+highly+bendable+transparent+conducting+electrode.">Uniformly embedded silver nanomesh as highly bendable transparent conducting electrode.</a> Nanotechnol. 26 (5), 055305 (2015).</li><li>Khan, A., Li, S., Tang, X., Li, W. -. D. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Nanostructure+Transfer+Using+Cyclic+Olefin+Copolymer+Templates+Fabricated+by+Thermal+Nanoimprint+Lithography.">Nanostructure Transfer Using Cyclic Olefin Copolymer Templates Fabricated by Thermal Nanoimprint Lithography.</a> J Vac Sci Technol B. 32 (6), (2014).</li><li>Khan, A., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=High-Performance+Flexible+Transparent+Electrode+with+an+Embedded+Metal+Mesh+Fabricated+by+Cost-Effective+Solution+Process.">High-Performance Flexible Transparent Electrode with an Embedded Metal Mesh Fabricated by Cost-Effective Solution Process.</a> Small. 12 (22), 3021-3030 (2016).</li><li>Moon Kyu, K., Jong, G. O., Jae Yong, L., Guo, L. J. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Continuous+phase-shift+lithography+with+a+roll-type+mask+and+application+to+transparent+conductor+fabrication.">Continuous phase-shift lithography with a roll-type mask and application to transparent conductor fabrication.</a> Nanotechnol. 23 (34), 344008 (2012).</li><li>Chou, S. Y., Krauss, P. R., Renstrom, P. J. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Imprint+of+sub-25+nm+vias+and+trenches+in+polymers.">Imprint of sub-25 nm vias and trenches in polymers.</a> Appl Phys Lett. 67 (21), 3114-3116 (1995).</li><li>Manfrinato, V. R., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Resolution+Limits+of+Electron-Beam+Lithography+toward+the+Atomic+Scale.">Resolution Limits of Electron-Beam Lithography toward the Atomic Scale.</a> Nano Lett. 13 (4), 1555-1558 (2013).</li><li>Khan, A., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Solution-processed+Transparent+Nickel-mesh+Counter+Electrode+with+In-situ+Electrodeposited+Platinum+Nanoparticles+for+Full-Plastic+Bifacial+Dye-sensitized+Solar+Cells.">Solution-processed Transparent Nickel-mesh Counter Electrode with In-situ Electrodeposited Platinum Nanoparticles for Full-Plastic Bifacial Dye-sensitized Solar Cells.</a> ACS Appl Mater Interfaces. 9 (9), 8083-8091 (2017).</li><li>Lee, J., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=A+dual-scale+metal+nanowire+network+transparent+conductor+for+highly+efficient+and+flexible+organic+light+emitting+diodes.">A dual-scale metal nanowire network transparent conductor for highly efficient and flexible organic light emitting diodes.</a> Nanoscale. 9 (5), 1978-1985 (2017).</li><li>Khan, S., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Direct+patterning+and+electrospray+deposition+through+EHD+for+fabrication+of+printed+thin+film+transistors.">Direct patterning and electrospray deposition through EHD for fabrication of printed thin film transistors.</a> Current Appl Phys. 11 (1), S271-S279 (2011).</li></ol>

我们的制造方法可以进一步修改，以允许样品的特征尺寸和面积的可扩展性以及各种材料的使用。使用EBL成功制造亚微米线宽（ 图3a-3c ）的铜质EMTE证明了LETE制造中的EMTE结构和关键步骤，包括电镀和压印传输，可以可靠地缩小到亚微米范围。类似地，也可以使用其他大面积光刻工艺，例如相移光刻30 ，纳米压印光刻31和带电粒子束光刻...

在全球范围内，正在进行研究以寻找刚性透明导电氧化物（TCO）的替代物，例如氧化铟锡和氟掺杂氧化锡（FTO）膜，以便制造柔性/可拉伸的TE用于将来的柔性/可伸缩光电器件1 。这需要新的材料与新的制造方法。 已经研究了诸如石墨烯2 ，导电聚合物3,4 ，碳纳米管5和随机金属纳米线网络6,7,8,9,10,11等纳米材料，并已经证明了它们在柔性TE中的能力，解决了现有的基于TCO的TE，包括薄弱12 ，低红外透射13 ，低丰度14 。即使有这种潜力，在连续弯曲下也不会发生恶化，仍然难以获得高的电和光电导率。 在这种框架下，正常金属网15,16,17,18,19,20正在发展成为有望的候选者，并且已经实现了非常高的光学透明度和低的薄层电阻，这是可以根据需要调整的。然而，由于众多挑战，广泛使用金属网状TE已经受到阻碍。首先，制造通常涉及昂贵的真空沉积金属16,17 ， </sup&gt; 18，21 。第二，薄膜有机光电器件的厚度可能容易导致电气短路22,23,24,25 。第三，与基材表面的弱粘合导致柔性差26,27 。上述限制已经引起了对基于金属网的新型结构和其制造的可扩展方法的需求。 在本研究中，我们报告了一种新颖的柔性TE结构，其中包含完全嵌入聚合物膜的金属网。我们还描述了一种创新的，基于解决方案的低成本制造方法，其结合光刻，电沉积和印迹转印。样品EMTE已经实现了高达15k的FoM值。由于嵌入式的性质观察到EMTE显着的化学，机械和环境稳定性。此外，在这项工作中建立的解决方案处理的制造技术可以潜在地用于所提出的EMTE的低成本和高产量生产。这种制造技术可扩展到更精细的金属网线宽度，更大面积和一系列金属。

<table border="0" cellpadding="0" cellspacing="0" width="1139">
	<tbody>
		<tr height="21">
			<td height="21" style="height:21px;width:241px;">Acetone</td>
			<td style="width:251px;">Sigma-Aldrich</td>
			<td style="width:119px;">W332615</td>
			<td style="width:528px;">Highly flammable</td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:241px;">Isopropanol</td>
			<td style="width:251px;">Sigma-Aldrich</td>
			<td style="width:119px;">190764</td>
			<td>Highly flammable</td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:241px;">FTO Glass Substrates</td>
			<td style="width:251px;">South China Xiang S&#38;T, China</td>
			<td style="width:119px;"></td>
			<td></td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:241px;">Photoresist&#160;</td>
			<td style="width:251px;">Clariant, Switzerland</td>
			<td style="width:119px;">54611L11</td>
			<td>AZ 1500 Positive tone resist (20cP)</td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:241px;">UV Mask Aligner&#160;</td>
			<td style="width:251px;">Chinese Academy of Sciences, China</td>
			<td>URE-2000/35</td>
			<td></td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:241px;">Photoresist Developer&#160;</td>
			<td style="width:251px;">Clariant, Switzerland</td>
			<td style="width:119px;">184411</td>
			<td>AZ 300 MIF Developer</td>
		</tr>
		<tr height="42">
			<td height="42" style="height:42px;width:241px;">Cu, Ag, Au, Ni, and Zn Electroplating solutions</td>
			<td style="width:251px;">Caswell, USA</td>
			<td style="width:119px;"></td>
			<td>Ready to use solutions (PLUG N&#39; PLATE)</td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:241px;">Keithley 2400 SourceMeter</td>
			<td style="width:251px;">Keithley, USA</td>
			<td style="width:119px;">41J2103</td>
			<td></td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:241px;">COC Plastic Films</td>
			<td style="width:251px;">TOPAS, Germany</td>
			<td style="width:119px;">F13-19-1</td>
			<td>Grade 8007 (Glass transition temperature: 78 &#176;C)</td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:241px;">Hydraulic Press&#160;</td>
			<td style="width:251px;">Specac Ltd., UK</td>
			<td style="width:119px;">GS15011</td>
			<td>With low tonnage kit ( 0-1 ton guage)</td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:241px;">Temperature Controller&#160;</td>
			<td style="width:251px;">Specac Ltd., UK</td>
			<td style="width:119px;">GS15515</td>
			<td>Water cooled heated platens and controller</td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:241px;">Chiller&#160;</td>
			<td style="width:251px;">Grant Instruments, UK</td>
			<td style="width:119px;">T100-ST5</td>
			<td></td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:241px;">Polymethyl Methacrylate (PMMA)</td>
			<td style="width:251px;">Sigma-Aldrich</td>
			<td style="width:119px;">200336</td>
			<td></td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:241px;">Anisole</td>
			<td style="width:251px;">Sigma-Aldrich</td>
			<td style="width:119px;">96109</td>
			<td>Highly flammable</td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:241px;">EBL Setup</td>
			<td style="width:251px;">Philips, Netherlands</td>
			<td style="width:119px;">FEI XL30</td>
			<td>Scanning electron microscope equipped with a JC Nabity pattern generator&#160;&#160;</td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:241px;">Isopropyl Ketone&#160;</td>
			<td style="width:251px;">Sigma-Aldrich</td>
			<td style="width:119px;">108-10-1</td>
			<td></td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:241px;">Silver Paste</td>
			<td style="width:251px;">Ted Pella, Inc, USA</td>
			<td style="width:119px;">16031</td>
			<td></td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:241px;">UV&#8211;Vis Spectrometer&#160;</td>
			<td style="width:251px;">Perkin Elmer, USA</td>
			<td style="width:119px;">L950</td>
			<td></td>
		</tr>
	</tbody>
</table>

scalable solution-processed fabrication strategy for high-performance, flexible, transparent electrodes with embedded metal mesh

在这里，作者报道了嵌入式金属网状透明电极（EMTE），一种新的透明电极（TE），其中金属网完全嵌入聚合物膜中。本文还为这种新型TE提出了一种低成本，无真空制造方法;该方法结合光刻，电镀和压印传输（LEIT）处理。 EMTE的嵌入性提供了许多优点，如高表面平滑度，这对于有机电子器件生产至关重要;弯曲时机械稳定性好;耐化学品和耐湿性良好;并与塑料薄膜粘附力强。 LEIT制造具有无电镀金属沉积的电镀工艺，有利于工业批量生产。此外，LEIT允许制造具有高纵横比（ 即，厚度至线宽）的金属网，显着增强其导电性而不会不利地丢失光学transmittance。我们展示了几种灵活的EMTE原型，薄片电阻低于1Ω/ sq，透光率大于90％，导致非常高的品质因数（FoM） - 高达1.5 x 10 4 - 这是最佳值出版文献

图1显示了EMTE样品的原理图和制造流程图。 如图1a所示 ，EMTE由完全嵌入聚合物膜中的金属网组成。网格的上表面与基底处于同一水平面上，显示出一般平滑的平台，用于随后的装置生产。制造技术在图1b - e中示意性地解释。在FTO玻璃基板上涂覆光致抗蚀剂膜之后，使用光刻技术通过UV曝光和?...

Watch this Scientific Journal Video about Scalable Solution-processed Fabrication Strategy for High-performance, Flexible, Transparent Electrodes with Embedded Metal Mesh at JoVE.com

Scalable Solution-processed Fabrication Strategy for High-performance, Flexible, Transparent Electrodes with Embedded Metal Mesh

该协议描述了一种基于解决方案的制造策略，用于高性能，灵活，透明的电极，具有完全嵌入的厚金属网。通过该方法制造的柔性透明电极表现出最高的报告性能，包括超低薄层电阻，高光透射率，弯曲下的机械稳定性，强的基板粘附性，表面光滑度和环境稳定性。

具有嵌入式金属网的高性能，灵活，透明电极的可扩展解决方案处理制造策略

Here, the authors report the embedded metal-mesh transparent electrode (EMTE), a new transparent electrode (TE) with a metal mesh completely embedded in a ...

The overall goal of this procedure is to use a solution-based fabrication process that combines lithography, electric deposition, and imprint transfer to produce a high performance, flexible, transparent conductive film with a self-anchored, fully embedded micro metal mesh. This mesh can help address key challenges facing future metal-mesh based flexible electronic devices, such as non-flat surface typography, low fabrication throughput, and high manufacturing cost. Embedded metal mesh provides several advantages, such as crucial self-smoothness, mechanical stability, and a high-burning stress, strong adhesion to the flexible substrate, and resistance against moisture, oxygen, and chemicals.Our process will place this by based the metal deposition with solution-based electric deposition, and is simple for pursuing high throughput, like volume and low cost production. My group helped Dr.Wendy Lee's group to test the dimensional stabilities of metal-mesh fabrication process by patterning 400 nanometer metal-mesh with our home built, electro beam lithography system. My assistant Xiong Ze is going to demonstrate the electro beam patterning process.To begin EMTE fabrication, clean a three centimeter by three centimeter piece of flooring-doped tin oxide coated glass with liquid detergent and a cotton swab. Thoroughly rinse the glass substrate with deionized water, and remove traces of detergent with another swab. Sonicate the FTO glass in isopropanol for 30 seconds at 40 kilohertz.Then dry the clean glass with compressed air. Next, place the clean, dry FTO glass in a spin-coater and apply 100 microliters of positive photo-resist. Spin-coat the glass at 4, 000 RPM for 60 seconds to produce a 1.8 micron-thick film.Bake the coated glass at 100 degrees Celsius for 50 seconds. Cover the coated glass with a mesh-pattern mask, and expose the photo-resist to sufficient UV light to achieve a radiant fluence of 20 millijoules per square centimeter. Then, immerse the coated glass in the appropriate developer for 50 seconds to remove the exposed photo-resist.Rinse the sample in deionized water and dry it under a stream of compressed air. Next, place 100 miloliters of acquiesce copper electro-plating solution in a 250 milliliter beaker. Immerse the sample in the plating solution.And connect it to the negative terminal of a two-electrode electro-deposition apparatus. Then, connect a copper metal bar to the positive terminal of the apparatus. Apply a constant five milliamp current to achieve a current density of three milliamps per square centimeter for 15 minutes, to deposit a 1.5 micron thick layer of copper on the sample.The croqueting is the critical step in the fabrication. Current density and electroplating time effect the morphology of the metal mesh and the final performance, and should be tested and optimized with your own samples. Thoroughly rinse the electroplated sample with deionized water, and dry it under a stream of compressed air.Immerse the sample in acetone for five minutes to dissolve the remaining photo resist to leave a bare metal mesh atop the FTO glass surface. Rinse and dry the sample with deionized water and compressed air. Next, place the sample on the platen of a hydraulic press with the metal mesh facing up.Cover the sample with a 100 micron thick cyclic olefin copolymer film with a glass transition temperature of 78 degrees Celsius. Heat the platens to 100 degrees Celsius, and then apply 15 millipascals of imprint pressure to the sample for five minutes. Pull the platens to 40 degrees Celsius before releasing the imprint pressure.Pressure and temperature are important prime interests in the imprint transfer step. Make sure your imprint and pressure is uniform and high enough for complete transfer. The temperature should be approximately 20 degrees higher than the substrate material glass transition temperature.Carefully peel the polymer film with the embedded mesh from the FTO glass surface to obtain the EMTE. To begin preparing a submicron EMTE, clean a three centimeter by three centimeter piece of FTO glass with liquid detergent and deionized water followed by sonication in isopropanol. Place the clean, dry FTO glass in a spin-coater, and apply 100 microliters of 4%by weight PMMA in anastole.Spin-coat the glass at 2500 RPM for 60 seconds to produce a 150 nanometer thick film. Bake the film at 170 degrees Celsius for 30 minutes, then start the electron beam lithography system and prepare a mesh pattern with a pattern generator. Place the sample in the electron beam lithography system and run the patterning process.Develop the PMMA by immersion in a one to three mixture of methyl-isopropyl-ketone and isopropanol for 60 seconds. Rinse the patterned sample with deionized water and dry it under a stream of compressed air. Next, place the patterned sample in copper-electroplating solution and connect the sample to the negative terminal of a two electrode electrodeposition apparatus.Connect the positive terminal to a copper, metal bar. Apply a constant current to achieve a current density of three milliamps per square centimeter for two minutes to plate 200 nanometers of copper on the sample. Rinse the sample with deionized water and immerse the sample in acetone for five minutes to dissolve the PMMA.Next, place the sample on the platen of a hydraulic press. Cover the sample with a 100 micron thick cyclic olefin co-polymer film with a glass transition temperature of 78 degrees Celsius. Heat the platens to 100 degrees Celsius and apply 15 millipascals of imprint pressure for five minutes.Cool the platens to 40 degrees Celsius before releasing the pressure. Carefully peel the film from the FTO glass to obtain the submicron EMTE. To begin sheet resistance measurements, first spread silver past on opposite edges of the EMTE and allow the paste to dry.Place the four probes of the sheet resistance measurement device on the lines of silver paste per the device manufacturer's instructions. Measure and record the sheet resistance. To perform optical transmission measurements, first place the EMTE on the sample holder of a calibrated UV vis spectrophotometer set to 100%transmittance.Align the sample perpendicular to the beam. Acquire a transmission spectrum of the EMTE to assess the electro-transparency. Copper EMTEs were fabricated with various grid patterns to evaluate the effect of the grid geometry on the electrode properties.The ratio of electrical conductance to optical conductance for copper EMTEs at 550 nanometers was over 1.5 times 10 to the fourth. Thicker meshes corresponded to lower optical transmittance and sheet resistance. Larger pitches corresponded to greater sheet resistance and transmittance.EMTEs were fabricated with various metals using a 50 micron pitch mesh, all of which showed flat, featureless transmittance spectra. With the same relationship between mesh thickness and transmittance, the transmittance and sheet resistance can first be tuned by adjusting the geometry and composition of the mesh. The sheet resistance of copper EMTEs was evaluated with respect to compressive and tensile bending tests.No significant change was observed for four millimeter and five millimeter compressive bending tests. Sheet resistance is gradually increased with tensile bending tests. No degradation and sheet resistance was observed over 24 hours of exposure to water isopropanol or a hot and humid atmosphere.New students can learn this technique within a few days. Once mastered, the whole fabrication process can be done in two to three hours and the equipment is ready. This technique paves the way for using scalable solution process fabrication methods to develop novel micro and nano structured devices, such as our self-anchored, high aspect ratio micro metal-mesh, embedded in flexible substrate.Many applications such as touch panels, displace sensors, and solar cells can benefit from our high performance, embedded metal mesh transparent electrodes. After watching this video, you should have a good understanding of how to use this solution-based fabrication process to produce metal-mesh transparent actuals. Thanks for watching, we're open to collaborations.

Research

Education

JoVE Core

JoVE Journal

Physics

Engineering

Unit 1

Gauss's Law

SCIENTISTS IN ACTION

Fabrication of Nano-engineered Transparent Conducting Oxides by Pulsed Laser Deposition

制备纳米设计的脉冲激光沉积透明导电氧化物

Nanosecond Pulsed  Laser Deposition (PLD) in the presence of a background gas allows the deposition  of metal oxides with tunable morphology, structure, ...

科研

工程学

Picoinjection of Microfluidic Drops Without Metal Electrodes

微流控的Picoinjection滴无金属电极

Existing methods for picoinjecting reagents into microfluidic drops require metal electrodes integrated into the microfluidic chip. The integration of ...

Research and Development of High-performance Explosives

高性能炸药的研究与发展

Developmental testing of high explosives for military applications involves small-scale formulation, safety testing, and finally detonation performance ...

Fabrication of Fully Solution Processed Inorganic Nanocrystal Photovoltaic Devices

全面解决方案处理的无机纳米晶体光伏器件的制造

We demonstrate a method for the preparation of fully solution processed inorganic solar cells from a spin and spray coating deposition of nanocrystal ...

Probing C84-embedded Si Substrate Using Scanning Probe Microscopy and Molecular Dynamics

Probing C84-embedded Si Substrate Using Scanning Probe Microscopy and Molecular Dynamics

探测ç<sub&gt; 84</sub&gt; - 嵌入式硅衬底利用扫描探针显微镜和分子动力学

This paper reports an array-designed C84-embedded Si substrate fabricated using a controlled self-assembly method in an ultra-high vacuum chamber. The ...

A High Performance Impedance-based Platform for Evaporation Rate Detection

蒸发速率检测一种基于阻抗高性能平台

This paper describes the method of a novel impedance-based platform for the detection of the evaporation rate. The model compound hyaluronic acid was ...

Detecting the Water-soluble Chloride Distribution of Cement Paste in a High-precision Way

高精度水泥浆水溶氯分布的检测

To improve the accuracy of the chloride distribution along the depth of cement paste under cyclic wet-dry conditions, a new method is proposed to obtain a ...

Flow-assisted Dielectrophoresis: A Low Cost Method for the Fabrication of High Performance Solution-processable Nanowire Devices

流动辅助介: 一种低成本的制备高性能溶液可纳米线器件的方法

Flow-assisted dielectrophoresis (DEP) is an efficient self-assembly method for the controllable and reproducible positioning, alignment, and selection of ...

Fabrication of Flexible Image Sensor Based on Lateral NIPIN Phototransistors

基于侧向 NIPIN Phototransistors 的柔性图像传感器的研制

Flexible photodetectors have been intensely studied for the use of curved image sensors, which are a crucial component in bio-inspired imaging systems, ...

Fabrication of Superhydrophobic Metal Surfaces for Anti-Icing Applications

防结冰用超疏水性金属表面的制备

Several ways to produce superhydrophobic metal surfaces are presented in this work. Aluminum was chosen as the metal substrate due to its wide use in ...