Name: growth and electrostatic/chemical properties of metal/laalo3/srtio3 heterostructures
Uploaded: 2018-02-08T14:00:00
Description: Watch this Scientific Journal Video about Growth and Electrostatic/chemical Properties of Metal/LaAlO3/SrTiO3 Heterostructures at JoVE.com

这项工作得到了来自紧急救济协调员赠款 #615759 "薄荷", 区域 le-de 法国昏暗的 "Oxymore" (项目 "NEIMO") 和美国抵抗组织项目 "NOMILOPS" 的支持。h.n 的部分支持 EPSRC--jsp 核心核心计划, 即 jsp 的科研资助 (B) (#15H03548)。问得到德意志 Forschungsgemeinschaft (HO 53461-1; 博士后奖学金, 问)。D.C.V. 感谢法国高等教育和研究部和 CNRS 为他的博士论文融资。感谢巴黎大学 Saclay (达朗伯计划) 和 CNRS 为他在 CNRS/泰雷兹的逗留提供资金。

注意:本协议中描述的所有5步骤都可以在任何时候暂停和重新启动, 唯一的条件是, 该示例在步骤3.4 到5的高真空下保持不中断。
1. 停止 (001) 基板的终止:
<ol><li>填充超声波清洗剂 (用40赫变换器) 与水和热它到60° c。用丙酮填充硼硅酸盐玻璃烧杯。独立的烧杯大小, 一定要填补至少20% 的最大体积, 以确保基板是很好地淹没。<ol>
<li>放置一个出箱混合终止单面抛光 (00...

<ol>
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在基板的终止, 你应该非常小心与淹没时间在 HF 解答。我们观察到, 在蚀刻的表面上, 只改变了5秒的原始配方。另外, 我们观察了基片步长和淹没时间的依赖性。对于较小的步长 (小于 100 nm) 淹没三十年代可能导致过度蚀刻, 即使事后退火程序可能足以适当地重建表面。由于使用 HF 基酸的风险, 我们还建议优化的 HCl-硝酸3酸性解决方案终止12或无酸终止技术13</...

准2D 电子系统 (q2DES) 被广泛用作研究大量的低维和量子现象的操场。从 LaAlO3/SrTiO3系统的开创性论文 (老挝语/停用)1开始, 创建了一个不同系统的新界面电子阶段的爆发。结合不同的材料导致发现的 q2DESs 与其他性质, 如电场可调谐自旋极化2, 极高的电子迁移3或铁耦合现象4。虽然大量的工作已经致力于解开这些系统的创造和操纵, 但一些实验和技术却显示出矛盾的结果, 即使是在相当相似的条件下。此外, 在静电和化学相互作用之间的平衡被发现是必不可少的正确理解的物理在玩5,6,7。
在本文中, 我们详细描述了不同的金属/老挝/异的增长, 使用脉冲激光沉积 (PLD) 和原位磁控溅射的组合。然后, 通过传输和电子光谱实验, 了解在老挝/q2DES 界面上不同表面条件对埋地的影响, 进行了电子和化学研究。
由于以前使用过多种方法来生长结晶型老挝, 因此选择合适的沉积技术是制备高质量氧化物异 (除了可能的成本和时间限制) 的关键步骤。在 PLD 中, 强烈的和短的激光脉冲命中所需材料的目标, 然后消融, 并获得沉积在基底上作为一个薄膜。这项技术的主要优点之一是能够可靠地将目标的化学计量性转移到胶片上, 这是一个关键因素, 以达到所需的相形成。此外, 通过大量复杂氧化物的反射高能电子衍射-高能进行层状生长 (实时监测) 的能力, 同时在腔室内有多个目标的可能性 (允许不同材料的生长, 而不打破真空) 和简单的设置使这项技术是最有效的和多才多艺的。
然而, 其他技术, 如分子束外延 (外延), 允许生长更高质量的外延生长。而不是有一个特定的材料的目标, 在外延, 每个特定的元素是升华对基板, 在那里他们相互反应, 形成良好的定义原子层。此外, 缺乏高能量的物种和更均匀的能量分布, 使得极尖锐的界面的制作成为8。然而, 在氧化物的生长过程中, 这一技术比 PLD 要复杂得多, 因为它必须在超高真空条件下执行 (这样, 长的平均自由路径就不会被破坏), 而且一般需要更大的投资、成本和时间。尽管在第一批老挝/其他出版物中使用的增长过程是 PLD, 但具有相似特性的样品却是由 "9" 的外延生长的。还值得注意的是, 老挝/异已经使用溅射10来增长。虽然在高温 (920 ° c) 和高氧压力 (0.8 毫巴) 上实现了原子性尖锐的界面, 但没有达到界面电导率。
对于金属盖层的生长, 我们使用磁控溅射, 因为它在质量和柔韧性之间提供了良好的平衡。然而, 其他化学气相沉积技术也可用于获得类似的结果。
最后, 运输和光谱学技术结合在这篇文章中展示了一个系统的方法来探测电子和化学的相互作用, 强调对照不同的方法的重要性, 以充分理解这些类型的系统的许多功能。

<table border="0" cellpadding="0" cellspacing="0" style="width:1433px;" width="1433">
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	<tbody>
		<tr height="21">
			<td height="21" style="height:21px;width:407px;">Pulsed Laser Deposition</td>
			<td style="width:200px;">SURFACE</td>
			<td style="width:305px;">PLD Workstation + UHV Cluster System</td>
			<td style="width:521px;"></td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:407px;">KrF Excimer Laser</td>
			<td style="width:200px;">Coherent</td>
			<td style="width:305px;">Compex Pro 201F</td>
			<td></td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:407px;">Reflection High-Energy Electron Diffraction (electron gun)</td>
			<td style="width:200px;">R-Dec Co., Ltd.</td>
			<td style="width:305px;">RDA-003G</td>
			<td>Distributed in Europe by SURFACE.</td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:407px;">Reflection High-Energy Electron Diffraction (CCD camera)</td>
			<td style="width:200px;">k-Space Associates, Inc.</td>
			<td style="width:305px;">kSA 400</td>
			<td></td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:407px;">Variable Laser Beam Attenuator</td>
			<td style="width:200px;">Metrolux</td>
			<td style="width:305px;">ML 2100</td>
			<td></td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:407px;">Excimer Laser Sensor</td>
			<td style="width:200px;">Coherent</td>
			<td style="width:305px;">J-50MUV-248</td>
			<td></td>
		</tr>
		<tr height="25">
			<td height="25" style="height:25px;width:407px;">LaAlO3 target</td>
			<td style="width:200px;">CrysTec</td>
			<td style="width:305px;"></td>
			<td>Single-crystal target</td>
		</tr>
		<tr height="25">
			<td height="25" style="height:25px;width:407px;">SrTiO3 subtrates</td>
			<td style="width:200px;">CrysTec</td>
			<td style="width:305px;"></td>
			<td>Several different sizes. Possibility to order TiO2 terminated.</td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:407px;">Buffered HF Acid</td>
			<td style="width:200px;">Technic</td>
			<td style="width:305px;">BOE 7:1</td>
			<td>buffered hydrofluoric acid = BOE 7:1 (HF : NH4F = 12.5 : 87.5%) in&#160;VLSI-quality.</td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:407px;">Silver Paste</td>
			<td style="width:200px;">DuPont</td>
			<td style="width:305px;">4929N</td>
			<td>Conductive Silver Composite.</td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:407px;">Ultrasonic Cleaner</td>
			<td style="width:200px;">Bransonic</td>
			<td style="width:305px;">12</td>
			<td>Ultrasonic Cleaning Bath</td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:407px;">Tube Furnace</td>
			<td style="width:200px;">AET Technologies</td>
			<td style="width:305px;">Heat Treatment Furnace</td>
			<td></td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:407px;">Borosilicate Glass Beaker</td>
			<td style="width:200px;">VWR</td>
			<td>213-1128</td>
			<td>Iow form</td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:407px;">PTFE Beaker</td>
			<td style="width:200px;">Dynalon</td>
			<td style="width:305px;">PTFE Beaker</td>
			<td></td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:407px;">Substrate holder &#34;dipper&#34;</td>
			<td style="width:200px;">Eberl&#233;</td>
			<td style="width:305px;"></td>
			<td>Custom made dipper</td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:407px;">Magnetron Sputtering</td>
			<td style="width:200px;">PLASSYS</td>
			<td style="width:305px;">Sputtering system</td>
			<td>5 chambers for targets.</td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:407px;">Metal targets</td>
			<td style="width:200px;">Neyco S.A.</td>
			<td style="width:305px;"></td>
			<td>Purity &#62; 99.9%</td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:407px;">X-Ray Photoelectron Spectroscopy System</td>
			<td style="width:200px;">Omicron</td>
			<td style="width:305px;">Custom XPS System</td>
			<td></td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:407px;">X-Ray Source</td>
			<td style="width:200px;">Omicron</td>
			<td style="width:305px;">DAR 400</td>
			<td>Twin Anode X-Ray Source.</td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:407px;">Energy Analyser</td>
			<td style="width:200px;">Omicron</td>
			<td style="width:305px;">EA 125</td>
			<td></td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:407px;">Atomic Force Microscopy</td>
			<td style="width:200px;">Bruker</td>
			<td style="width:305px;">Innova AFM</td>
			<td></td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:407px;">Atomic Force Microscopy Probes</td>
			<td style="width:200px;">Olympus</td>
			<td style="width:305px;">OMCL-AC160TS-R3</td>
			<td>Micro Cantilevers</td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:407px;">Wire bonding</td>
			<td style="width:200px;">Kulicke &#38; Soffa</td>
			<td style="width:305px;">4523AD</td>
			<td></td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:407px;">PPMS</td>
			<td style="width:200px;">Quantum Design</td>
			<td style="width:305px;">PPMS Dynacool</td>
			<td>9T magnet.</td>
		</tr>
	</tbody>
</table>

growth and electrostatic/chemical properties of metal/laalo3/srtio3 heterostructures

在 LaAlO3 (老挝) 和 SrTiO3 (q2DES) 之间的接口上形成的准2D 电子系统引起了氧化物电子学界的广泛关注。其特征之一是存在一个关键的老挝厚度4单元细胞 (uc) 的界面电导率出现。虽然过去已经提出了静电机制来描述这种临界厚度的存在, 但化学缺陷的重要性最近得到了加强。在这里, 我们描述了金属/老挝/异的增长, 在一个超高真空 (特高压) 集群系统结合脉冲激光沉积 (增长老挝), 磁控溅射 (增长金属) 和 X 射线光电子能谱 (XPS)。我们逐步研究了金属和 q2DES 之间的化学相互作用的形成和演化。此外, 磁实验阐明了 q2DES 的传输和电子性质。这一系统的工作不仅证明了一种研究 q2DES 及其环境之间的静电和化学相互作用的方法, 而且也解开了在二维电子系统, 允许制造新类型的设备。

用于增长和特性描述的完整实验系统显示在图 2中。强烈建议通过配电室在特高压中连接不同的设置, 以确保每个生长过程后样品的表面保持原始状态。还详细描述了 PLD 室 (图 3)、磁控溅射 (图 7) 和 XPS 室 (图 8)。有关 PLD 设置中的光学路径的其他信息, 将显示在图 4</st...

Watch this Scientific Journal Video about Growth and Electrostatic/chemical Properties of Metal/LaAlO3/SrTiO3 Heterostructures at JoVE.com

Growth and Electrostatic/chemical Properties of Metal/LaAlO3/SrTiO3 Heterostructures

我们制造金属/LaAlO3/SrTiO3异使用脉冲激光沉积和原位磁控溅射组合。通过磁和原位X 射线光电子能谱实验, 研究了该系统中所形成的准二维电子气体的静电与化学现象之间的相互作用。

金属/LaAlO 的生长和静电/化学性质3/SrTiO3异

The quasi 2D electron system (q2DES) that forms at the interface between LaAlO3 (LAO) and SrTiO3 (STO) has attracted much attention from the oxide ...

Research

JoVE Journal

Engineering

Growth and Electrostatic/chemical Properties of Metal/LaAlO3/SrTiO3 Heterostructures

Concurrent Quantitative Conductivity and Mechanical Properties Measurements of Organic Photovoltaic Materials using AFM

并行定量的导电性和力学性能测试的有机光伏材料利用原子力显微镜

Organic photovoltaic  (OPV) materials are inherently inhomogeneous at the nanometer scale. Nanoscale  inhomogeneity of OPV materials affects performance ...

科研

工程学

Dry Oxidation and Vacuum Annealing Treatments for Tuning the Wetting Properties of Carbon Nanotube Arrays

干式氧化及真空退火处理调整的润湿性能的碳纳米管阵列

In this article, we describe a simple method to reversibly  tune the wetting properties of vertically aligned carbon nanotube (CNT) arrays.  Here, CNT ...

Sputter Growth and Characterization of Metamagnetic B2-ordered FeRh Epilayers

变磁B2有序化的FeRh外延层溅射生​​长和表征

Chemically ordered alloys are useful in a variety of magnetic nanotechnologies. They are most conveniently prepared at an industrial scale using ...

Using Microwave and Macroscopic Samples of Dielectric Solids to Study the Photonic Properties of Disordered Photonic Bandgap Materials

利用微波和电介质固体的宏观样本，研究无序光子带隙材料的光子特性

Recently, disordered photonic materials have been suggested as an alternative to periodic crystals for the formation of a complete photonic bandgap (PBG). ...

Seedless Growth of Bismuth Nanowire Array via Vacuum Thermal Evaporation

铋纳米线阵列通过真空热蒸发无核增长

Here a seedless and template-free technique is demonstrated to scalably grow bismuth nanowires, through thermal evaporation in high vacuum at RT. ...

Electroactive Polymer Nanoparticles Exhibiting Photothermal Properties

电活性聚合物纳米粒子参展光热特性

A method for the synthesis of electroactive polymers is demonstrated, starting with the synthesis of extended conjugation monomers using a three-step ...

Combining Microfluidics and Microrheology to Determine Rheological Properties of Soft Matter during Repeated Phase Transitions

微流体和 Microrheology 相结合测定软物质在重复相变过程中的流变特性

The microstructure of soft matter directly impacts macroscopic rheological properties and can be changed by factors including colloidal rearrangement ...

Uncoupling Coriolis Force and Rotating Buoyancy Effects on Full-Field Heat Transfer Properties of a Rotating Channel

解耦科里奥利力和旋转浮力对旋转通道全场传热性能的影响

An experimental method for exploring the heat transfer characteristics of an axially rotating channel is proposed. The governing flow parameters that ...

Plasma-Assisted Molecular Beam Epitaxy Growth of Mg3N2 and Zn3N2 Thin Films

Plasma-Assisted Molecular Beam Epitaxy Growth of Mg3N2 and Zn3N2 Thin Films

Mg3N2和 Zn3N2薄膜的等离子辅助分子束外延生长

This article describes a procedure for growing Mg3N2 and Zn3N2 films by plasma-assisted molecular beam epitaxy (MBE). The films are grown on 100 oriented ...

Fabricating van der Waals Heterostructures with Precise Rotational Alignment

使用精确旋转对齐来制造范德瓦尔斯异构结构

In this work we describe a technique for creating new crystals (van der Waals heterostructures) by stacking distinct ultrathin layered 2D materials. We ...