通过光刻的微细加工

The increased need for portable devices with extremely small sample volumes, has driven the miniaturization of devices called BioMEMs. BioMEMs are produced via microfabrication. A process of fabricating microscale structures using semiconductor technology. A microfabrication technique called photolithography, is often used to pattern complex patterns onto a substrate using light. This video will introduce the process of photolithography, demonstrate the technique in the laboratory, and provide insight into some applications where photolithog