Microfabrication via Photolithography

Overview

The fabrication of BioMEM devices is often done using a microfabrication technique called photolithography. This widely used method utilizes light to transfer a pattern onto a silicon wafer, and provides the basis for the fabrication of many types of BioMEM devices.

This video presents the photolithography technique, shows how the process is performed in the cleanroom, and introduces some applications of the process.

Procedure

The increased need for portable devices with extremely small sample volumes, has driven the miniaturization of devices called BioMEMs. BioMEMs are produced via microfabrication. A process of fabricating microscale structures using semiconductor technology. A microfabrication technique called photolithography, is often used to pattern complex patterns onto a substrate using light. This video will introduce the process of photolithography, demonstrate the technique in the laboratory, and provide in

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