Epitaxial Nanostructured α-Quartz-Folien auf Silizium: Vom Material zu neuen Geräten

0:54

Preparation of PDMS Templates and Gel Film Deposition on SOI Substrates by Dip-Coating

2:55

Surface Micro/Nanostructuration by Soft Imprint Lithography and Gel Film Crystallization by Thermal Treatment

4:00

Preparing and Patterning of the Quartz Samples for the Cantilever Microfabrication Process

8:49

Results: Qualitative Analysis of the Progressive Epitaxial Nanostructured α-Quartz Film Thickness Developed on Silicon

10:20

Conclusion