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André Clausner

Fraunhofer Institute for Ceramic Technologies and Systems

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Fraunhofer Institute for Ceramic Technologies and Systems

JOVE ARTICLES

In Situ Time-dependent Dielectric Breakdown in the Transmission Electron Microscope: A Possibility to Understand the Failure Mechanism in Microelectronic Devices

Zhongquan Liao^1,2,

Martin Gall¹,

Kong Boon Yeap^1,3,

Christoph Sander¹,

André Clausner¹,

Uwe Mühle¹,

Jürgen Gluch¹,

Yvonne Standke¹,

Oliver Aubel⁴,

Armand Beyer⁴,

Meike Hauschildt⁴,

Ehrenfried Zschech^1,2

¹, Fraunhofer Institute for Ceramic Technologies and Systems,

²Dresden Center for Nanoanalysis, Technische Universität Dresden,

³, Globalfoundries Fab 8,

⁴, Globalfoundries Fab 1

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