Fabrication of Bi2Te3 and Sb2Te3 Thermoelectric Thin Films using Radio Frequency Magnetron Sputtering TechniqueNurfarhana Ahmad Musri 1, Yoganash Putthisigamany 1, Puvaneswaran Chelvanathan 1, Norasikin Ahmad Ludin 1, Nadhrah Md Yatim 2, Ubaidah Syafiq 1
1Solar Energy Research Institute (SERI), Universiti Kebangsaan Malaysia, 2Faculty of Science and Technology, Universiti Sains Islam Malaysia
The manuscript describes a protocol for radio frequency magnetron sputtering of Bi2Te3 and Sb2Te3 thermoelectric thin films on glass substrates, which represents a reliable deposition method that provides a wide range of applications with the potential for further development.
