Focused Ion Beam Fabrication of LiPON-based Solid-state Lithium-ion Nanobatteries for In Situ TestingJungwoo Z. Lee *1, Thomas A. Wynn *2, Ying Shirley Meng 1,2, Dhamodaran Santhanagopalan 3
1Department of NanoEngineering, University of California San Diego, 2Materials Science and Engineering Program, University of California San Diego, 3Amrita Centre for Nanosciences and Molecular Medicine, Amrita Vishwa Vidyapeetham University
A protocol for the fabrication of electrochemically active LiPON-based solid-state lithium-ion nanobatteries using a focused ion beam is presented.
