Instituto de Microelectrónica de Barcelona (IMB-CNM, CSIC)

1 ARTICLES PUBLISHED IN JoVE

Chemistry

Aerosol-assisted Chemical Vapor Deposition of Metal Oxide Structures: Zinc Oxide Rods

Stella Vallejos^1,2, Naděžda Pizúrová³, Jan Čechal⁴, Isabel Gràcia¹, Carles Cané¹

¹Instituto de Microelectrónica de Barcelona (IMB-CNM, CSIC), ²SIX Research Centre, Brno University of Technology, ³Institute of Physics of Material, Academy of Science of Czech Republic, ⁴Institute of Physical Engineering and Central European Institute of Technology, Brno University of Technology

Columnar zinc oxide structures in the form of rods are synthesized via aerosol-assisted chemical vapor deposition without the use of pre-deposited catalyst-seed particles. This method is scalable and compatible with various substrates based on either silicon, quartz or polymers.