Mechatronics Group,
Department of Mechanical Engineering,
Mechatronics Group, Department of Mechanical Engineering
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Ilmenau University of Technology
Fangzhou Xia1,
Kamal Youcef-Toumi1,
Thomas Sattel2,
Eberhard Manske3,
Ivo W. Rangelow4,5
1Mechatronics Research Lab, Department of Mechanical Engineering, Massachusetts Institute of Technology,
2Mechatronics Group, Department of Mechanical Engineering, Ilmenau University of Technology,
3Production and Precision Measurement Technology Group, Institute of Process Measurement and Sensor Technology, Ilmenau University of Technology,
4Nanoscale Systems Group, Institute of Process Measurement and Sensor Technology, Ilmenau University of Technology,
5, nano analytik GmbH
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