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Epitaxial Nanostructured α-Quartz Films on Silicon: From the Material to New Devices

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5.3K Views

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11:34 min

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October 6th, 2020

DOI :

10.3791/61766-v

October 6th, 2020

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Claire Jolly¹, David Sanchez-Fuentes¹, Ricardo Garcia-Bermejo¹, Dilek Cakiroglu¹, Adrian Carretero-Genevrier¹

¹Institut d'Electronique et des Systemes (IES), CNRS, Université de Montpellier

Capitoli

Trascrizione

Riepilogo

Esplora Altri Video

Quartz based Sensors

Miniaturization

Monolithic Integration

Chemical Integration

Epitaxial Requirements

Microcantilevers

Active Microelectromechanical System

Lead free Piezoelectric Oxide Materials

Mass Sensitivity

Micro nanostructure

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Epitaxial Nanostructured α-Quartz Films on Silicon: From the Material to New Devices

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