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Motoki Yako

Department of Materials Engineering

The University of Tokyo

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The University of Tokyo

the university of tokyo

JOVE ARTICLES

Theoretical Calculation and Experimental Verification for Dislocation Reduction in Germanium Epitaxial Layers with Semicylindrical Voids on Silicon

Motoki Yako¹,

Yasuhiko Ishikawa²,

Eiji Abe¹,

Kazumi Wada^1,3

¹Department of Materials Engineering, The University of Tokyo,

²Department of Electrical and Electronic Information Engineering, Toyohashi University of Technology,

³Department of Materials Science and Engineering, Massachusetts Institute of Technology

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