CNRS-École Centrale de Lyon

1 ARTICLES PUBLISHED IN JoVE

Chemistry

Preparation of Macroporous Epitaxial Quartz Films on Silicon by Chemical Solution Deposition

Adrián Carretero-Genevrier¹, Martí Gich²

¹Institut des Nanotechnologies de Lyon, CNRS-École Centrale de Lyon, ²Institut de Ciència de Materials de Barcelona, Consejo Superior de Investigaciones Científicas

A protocol is presented for the preparation of piezoelectric macroporous epitaxial films of quartz on silicon by solution chemistry using dip-coating and thermal treatments in air.