Preparation of Macroporous Epitaxial Quartz Films on Silicon by Chemical Solution DepositionAdrián Carretero-Genevrier 1, Martí Gich 2
1Institut des Nanotechnologies de Lyon, CNRS-École Centrale de Lyon, 2Institut de Ciència de Materials de Barcelona, Consejo Superior de Investigaciones Científicas
A protocol is presented for the preparation of piezoelectric macroporous epitaxial films of quartz on silicon by solution chemistry using dip-coating and thermal treatments in air.
