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Fabrication of Nanoheight Channels Incorporating Surface Acoustic Wave Actuation via Lithium Niobate for Acoustic Nanofluidics

5.7K Views

07:23 min

February 5th, 2020

DOI :

10.3791/60648-v

February 5th, 2020


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Nanoheight Channels

Rozdziały w tym wideo

0:05

Introduction

0:54

Nano-height Channel Mask Preparation

1:53

Nano-height Channel Fabrication

2:49

Room Temperature Plasma-activated Bonding

4:56

Experimental Setup and Testing

5:54

Results: Representative Fluid Capillary Filling and Surface Acoustic Wave (Saw)-Induced Fluid Draining

6:45

Conclusion

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