Our protocol provides a detailed fabrication method of nano-height channels incorporating surface acoustic wave actuation via lithium niobate for acoustic nanofluidics. This technique can be used to perform room temperature plasma surface activate
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We demonstrate fabrication of nanoheight channels with the integration of surface acoustic wave actuation devices upon lithium niobate for acoustic nanofluidics via liftoff photolithography, nano-depth reactive ion etching, and room-temperature plasma surface-activated multilayer bonding of single-crystal lithium niobate, a process similarly useful for bonding lithium niobate to oxides.