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Epitaxial Nanostructured α-Quartz Films on Silicon: From the Material to New Devices

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5.3K Views

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11:34 min

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October 6th, 2020

DOI :

10.3791/61766-v

October 6th, 2020

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Claire Jolly¹, David Sanchez-Fuentes¹, Ricardo Garcia-Bermejo¹, Dilek Cakiroglu¹, Adrian Carretero-Genevrier¹

¹Institut d'Electronique et des Systemes (IES), CNRS, Université de Montpellier

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Quartz based Sensors

Miniaturization

Monolithic Integration

Chemical Integration

Epitaxial Requirements

Microcantilevers

Active Microelectromechanical System

Lead free Piezoelectric Oxide Materials

Mass Sensitivity

Micro nanostructure

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Epitaxial Nanostructured α-Quartz Films on Silicon: From the Material to New Devices

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