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Please note that all translations are automatically generated. Click here for the English version.
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03:40 min
October 13th, 2023
DOI :
10.3791/200771-v
Transcript
首先,将用于微流体通道设计的 SU8 主硅晶圆贴在 14 厘米塑料培养皿的内部,并用氮气清洁。在纸杯中称取适量的聚二甲基硅氧烷或PDMS碱和PDMS固化剂。用木铲将两者混合,直到混合物变成浑浊的白色。
将PDMS混合物倒入含有硅晶片的塑料培养皿中。然后,将培养皿放入配备有三通旋塞阀的真空干燥器中。转动旋塞阀的阀门,将真空连接到干燥室,以去除混合物中的气泡。
从通道特征中去除所有气泡后,将培养皿放入 70 摄氏度的烤箱中四个小时。培养皿冷却至室温后,将其放在切割垫上。
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