Name: micropunching lithography for generating micro- and submicron-patterns on polymer substrates
Uploaded: 2012-07-02T08:00:00
Description: Watch this Scientific Journal Video about Micropunching Lithography for Generating Micro- and Submicron-patterns on Polymer Substrates at JoVE.com

通过NSFDMI-0508454，国家科学基金会/ LEQSF（2006）镑-53，NSF的CMMI-0811888，和NSF的CMMI-0900595赠款，支持这项工作的一部分。

A. MPL的原理图 macropunching方法包括“节流”和“图纸”操作。 “切割”操作采用锋利的凸结构的模具，包括三个基本步骤（ 图1（A1-A3））。首先，放置在一个刚性基板金属板材（ 图1（A1））。第二，把由高力硅模具身体接触和基板。在这第二个步骤，直接下凸模结构的金属部分，首先从邻近的金属切断凸模结构，然后推下在基板上的凹图案的底部（ ...

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故障排除信息：临界点，就产生导电聚合物和金属使用“切割”操作单和多层微图案：（1）压印温度，确保产生最佳效果的聚甲基丙烯酸甲酯的中间层的流动性。明智的做法是在下限范围内开始，并逐渐增加温度，如果没有达到预期的效果。温度过高可能会导致导电聚合物层，以改变其化学和/或电气性能。 （2）如果压印力过高，可能会导致硅模具，以打击在压印;而低力量可能导?...

<table border="1"><tbody><tr><td> 试剂名称 </td><td> 公司 </td><td> 目录编号 </td><td> 评论 </td></tr><tr><td>聚甲基丙烯酸甲酯</td><td> Aldrich公司</td><td> 495C9 </td><td>溶剂是cholorobenzene。在通风良好的通风柜处理聚甲基丙烯酸甲酯的解决方案。不要吸入蒸气。参阅MSDS安全处理说明。 </td></tr><tr><td>聚吡咯</td><td> Aldrich公司</td><td> - </td><td>在水中重量的5％。作为接收。 </td></tr><tr><td> PEDOT-PSS </td><td> HC Starck公司有限公司</td><td>慧聪V4的baytron带够</td><td>专有的溶剂。作为接收。 </td></tr><tr><td> SPANI </td><td> Aldrich公司</td><td> - </td><td>溶于水的形式。作为接收。 </td></tr><tr><td>热压机</td><td> JenoptikMikrotechnik有限公司</td><td>十六进制01/LT </td><td></td></tr><tr><td>溅镀机</td><td> cressington有限公司</td><td> 208HR </td><td></td></tr><tr><td>沙冰机</td><td>蔡司公司</td><td>纤维蛋白原横梁1540预算外</td><td></td></tr><tr><td>旋转涂布机</td><td>海德威研制有限公司</td><td> PWM32 PS-R790微调系统</td><td></td></tr><tr><td>刻蚀机</td><td>工艺MicroRIE有限公司</td><td> - </td><td></td></tr><tr><td>光阻</td><td>希普利有限公司</td><td> S1813 </td><td></td></tr><tr><td>硅橡胶</td><td>道康宁</td><td> sylgard 184硅酮弹性体套件</td><td></td></tr><tr><td>高密度聚乙烯板材</td><td>美国塑料一体化</td><td> - </td><td></td></tr><tr><td> PMMA板材</td><td> cyro有限公司</td><td> - </td><td></td></tr><tr><td>双片面adhesiv的é磁带</td><td>苏格兰有限公司</td><td> - </td><td></td></tr><tr><td>单面胶带</td><td> delphon有限公司</td><td> Ultratape＃1310 </td><td></td></tr><tr><td>玻璃micropipettes </td><td>金控公司</td><td> 30-30-1 </td><td></td></tr><tr><td>夹</td><td>办公用品有限公司</td><td>斗牛剪辑</td><td></td></tr><tr><td>加湿器</td><td>维克斯有限公司</td><td>筛选免费加湿器“ </td><td></td></tr></tbody></table>

micropunching lithography for generating micro- and submicron-patterns on polymer substrates

导电聚合物已引起高度重视，因为高电导率掺杂聚乙炔的发现在1977年1。他们提供的优势，重量轻，易于剪裁的物业和广泛的应用2,3。由于导电聚合物对环境条件的敏感性（如空气，氧气，水分，高温和化学解决方案），平版印刷技术呈现显着的技术挑战，这些材料4时。例如，当前的光刻方法，如紫外线（紫外线），是不适合图案的导电聚合物，由于潮湿和/或干蚀刻方法在这些过程的参与。此外，目前微/纳米系统主要有平面形式5,6。是建立在另一层制作功能表面层结构。这些结构的多层次堆叠在一起，形成众多设备一个共同的基板。微观结构的侧壁表面没有被用于构建设备。另一方面，侧壁模式可以使用，例如，建立3-D电路，修改流体通道和纳米线和纳米管的水平直接增长。 一个macropunching方法已广泛应用于制造业，创造了一百多年的钣金macropatterns。这种方法的启发，我们已经开发了1 micropunching光刻法（MPL）的图案，以克服的障碍，导电聚合物和生成侧壁模式。对MPL像macropunching方法，还包括两个操作（ 图1）：（一）切割;及（ii）绘图。 “切割”操作模式3导电聚合物，聚吡咯，聚（3,4 - ethylenedioxythiophen） -聚（4 styrenesulphonate）（PEDOT薄膜）和聚苯胺（PANI）。也有人雇用创建阿尔微观7。湿度8，8，化学和葡萄糖传感器9已被用作制造导电聚合物的微观结构。已采用铝结合的微观结构和导电聚合物电容和各种异质9,10,11编造。 “切割”操作也适用于生成亚微米级模式，如100 - 500纳米宽的聚吡咯生产线以及100纳米范围内的金线。 “图纸”操作受聘为两个应用程序：（一）生产高密度聚乙烯（HDPE）可以用来建立三维微12,13,14渠道凹侧壁模式，及（ii）制备聚二甲基硅氧烷（PDMS）micropillars高密度聚乙烯基材上，以增加接触角的通道15。

Watch this Scientific Journal Video about Micropunching Lithography for Generating Micro- and Submicron-patterns on Polymer Substrates at JoVE.com

Micropunching Lithography for Generating Micro- and Submicron-patterns on Polymer Substrates

开发一个micropunching光刻方法产生微观和亚微米图案，顶部，侧壁和底部表面的聚合物基板。它克服了图案化导电聚合物和产生侧壁模式的障碍。这种方法允许多个功能快速制作和侵略性的化学自由。

Micropunching为微型和亚微米模式聚合物基板上生成的光刻

Conducting polymers have attracted great attention since the discovery of high conductivity in doped polyacetylene in 19771. They offer the advantages of ...

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