Name: fabrication, densification, and replica molding of 3d carbon nanotube microstructures
Uploaded: 2012-07-02T08:01:00
Description: Watch this Scientific Journal Video about Fabrication, Densification, and Replica Molding of 3D Carbon Nanotube Microstructures at JoVE.com

这项研究是由国家科学基金会（CMMI模型-0927634）纳米制造程序支持。达沃尔Copic拉克姆优异，在密歇根大学的奖学金计划中的一部分支持。萨迈赫T​​awfick承认拉克姆博士前奖学金的部分支持。迈克尔·的德Volder支持比利时科学研究基金 - 富兰德（FWO）。 Lurie加工设施的（LNF），这是一个国家纳米技术基础设施网络的成员进行微细加工和电子显微镜在密歇根州的电子束分析实验室（EMAL）的执行。

1。催化剂图案<ol><li>获得一个3000A厚的二氧化硅层（100）硅片，抛光边至少有一个。另外，你可能获得一个裸硅片和晶圆上成长3000A二氧化硅。下面描述所有加工完成的晶圆抛光。 </li><li>对于4S 500RPM Spincoat一层HMDS的，然后在30秒3000RPM。 HMDS的提升晶圆与光阻之间的粘连。 </li><li>对于4S 500RPM Spincoat SPR-220-3层，然后在30秒3000RPM。 </li><li> 115°C时为90烤盘上烤的晶圆。 </li><li>所需的口罩，使用催化剂?...

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	<li>Xia, Y. N., Whitesides, G. M. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Soft+lithography.">Soft lithography.</a> Annual Review of Materials Science. 28, 153-184 (1998).</li><li>Xia, Y. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Replica+molding+using+polymeric+materials:+A+practical+step+toward+nanomanufacturing.">Replica molding using polymeric materials: A practical step toward nanomanufacturing.</a> Advanced Materials. 9, 147-149 (1997).</li><li>Tasis, D., Tagmatarchis, N., Bianco, A., Prato, M. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Chemistry+of+Carbon+Nanotubes.">Chemistry of Carbon Nanotubes.</a> Chemical Reviews. 106, 1105-1136 (2006).</li><li>De Volder, M. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Diverse+3D+Microarchitectures+Made+by+Capillary+Forming+of+Carbon+Nanotubes.">Diverse 3D Microarchitectures Made by Capillary Forming of Carbon Nanotubes.</a> Advanced Materials. 22, 4384-4389 (2010).</li><li>Copic, D., Park, S. J., Tawfick, S., De Volder, M. F. L., Hart, A. J. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Fabrication+of+high-aspect-ratio+polymer+microstructures+and+hierarchical+textures+using+carbon+nanotube+composite+master+molds.">Fabrication of high-aspect-ratio polymer microstructures and hierarchical textures using carbon nanotube composite master molds.</a> Lab on a Chip. 11, 1831-1837 (2011).</li><li>De Volder, M. F. L., Park, S. J., Tawfick, S. H., Vidaud, D. O., Hart, A. J. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Fabrication+and+electrical+integration+of+robust+carbon+nanotube+micropillars+by+self-directed+elastocapillary+densification.">Fabrication and electrical integration of robust carbon nanotube micropillars by self-directed elastocapillary densification.</a> Journal of Micromechanics and Microengineering. 21, 045033-04 (2011).</li><li>Zhao, Z. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Bending+of+nanoscale+filament+assemblies+by+elastocapillary+densification.">Bending of nanoscale filament assemblies by elastocapillary densification.</a> Physical Review E. 82, 041605 (2010).</li><li>De Volder, M. F. L., Vidaud, D. O., Meshot, E. R., Tawfick, S., Hart, A. J. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Self-similar+organization+of+arrays+of+individual+carbon+nanotubes+and+carbon+nanotube+micropillars.">Self-similar organization of arrays of individual carbon nanotubes and carbon nanotube micropillars.</a> Microelectronic Engineering. 87, 1233-1238 (2010).</li><li>Nessim, G. D. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Tuning+of+Vertically-Aligned+Carbon+Nanotube+Diameter+and+Areal+Density+through+Catalyst+Pre-Treatment.">Tuning of Vertically-Aligned Carbon Nanotube Diameter and Areal Density through Catalyst Pre-Treatment.</a> Nano Letters. 8, 3587-3593 (2008).</li><li>Pokroy, B., Epstein, A. K., Persson-Gulda, M. C. M., Aizenberg, J. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Fabrication+of+Bioinspired+Actuated+Nanostructures+with+Arbitrary+Geometry+and+Stiffness.">Fabrication of Bioinspired Actuated Nanostructures with Arbitrary Geometry and Stiffness.</a> Advanced Materials. 21, 463-469 (2009).</li></ol>

平版印刷图案和CNT催化剂基板的准备很简单，重复性好;然而，实现一致的碳纳米管增长需要认真注意的高度和密度的碳纳米管森林环境湿度和增长管条件的影响。在我们的经验，比1000微米模式较大的2不敏感，在加工条件下的小波动。此外，密度的模式了，影响生长密度和高度8。增长的密度和高度较大的填充分数（总面积除以基板面积总量的催化剂）大于约20％的模式。此外，重...

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fabrication, densification, and replica molding of 3d carbon nanotube microstructures

微细新材料和新工艺的引进，很大一部分在微系统，实验室的单芯片器件及其应用，使许多重要的进展。软光刻技术和其他技术micromolding 1，2的到来，特别是聚合物微观结构具有成本效益的制造能力转化，这导致在微细生物医学工程和生物应用的革命。尽管如此，它仍然是挑战，以编造的微观结构，具有定义良好的纳米级表面纹理和制作，在微观尺度的任意三维形状。主模具和形状的完整性维护的鲁棒性，尤其重要的是实现复杂结构的高保真复制和维护他们的纳米表面纹理。现有的微细加工方法结合分层纹理，异构的形状，是一场深刻的挑战，LARgely依靠自上而下使用固定不变的面具模板蚀刻后。另一方面，自下而上的纳米管和纳米线等纳米结构的合成，可以提供新的功能，微细加工，尤其是通过利用纳米结构的自组织的集体，局部控制其生长行为的微模式。 我们的目标是引入垂直排列的碳纳米管（CNTs），我们是指作为一种新的微细加工材料，碳纳米管的“森林”。我们提出了一套最近由本集团开发的相关方法的详细资料：热化学气相沉积法制备碳纳米管森林显微光刻图案催化剂薄膜;自我导向的碳纳米管微结构的elastocapillary致密;和副本成型聚合物的微观结构，使用碳纳米管复合主模具。特别是，我们的工作表明，自我导向的毛细血管致密化（“毛细形成”），这是射孔碳纳米管微结构的衬底上rmed溶剂冷凝，显着提高了碳纳米管的堆积密度。此过程可分为直，斜，扭曲的形状，有强大的超过典型微细聚合物的机械属性的垂直碳纳米管微结构的转型。这反过来又使毛细血管渗透驱动的聚合物形成碳纳米管纳米复合材料主模具。副本结构表现出的奈米碳管的各向异性纳米质地，并能与亚微米厚的墙和纵横比超过50:1。在制造碳纳米管微结构的整合提供了更多的机会，利用碳纳米管的导电性和导热性能，多样的功能，化学和生化官能3。

Watch this Scientific Journal Video about Fabrication, Densification, and Replica Molding of 3D Carbon Nanotube Microstructures at JoVE.com

Fabrication, Densification, and Replica Molding of 3D Carbon Nanotube Microstructures

我们提出的垂直排列的碳纳米管（CNTs），并利用其作为主模具生产聚合物微观结构与有组织的纳米表面纹理图案的微观结构的制造方法。基板上凝结的溶剂，这大大增加了他们的堆积密度，使自我导向形成三维形状的碳纳米管森林致密。

制备，致密，副本三维碳纳米管微结构成型

The introduction of new materials and processes to microfabrication has, in large part, enabled many important advances in microsystems, lab-on-a-chip ...

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Dry Oxidation and Vacuum Annealing Treatments for Tuning the Wetting Properties of Carbon Nanotube Arrays

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In this article, we describe a simple method to reversibly  tune the wetting properties of vertically aligned carbon nanotube (CNT) arrays.  Here, CNT ...

科研

工程学

Synthesis and Functionalization of Nitrogen-doped Carbon Nanotube Cups with Gold Nanoparticles as Cork Stoppers

黄金纳米粒子作为软木塞氮掺杂碳纳米管杯的合成与功能构造

Nitrogen-doped carbon  nanotubes consist of many cup-shaped graphitic compartments termed as  nitrogen-doped carbon nanotube cups (NCNCs).  These ...

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Digital fringe projection (DFP) techniques provide dense 3D measurements of dynamically changing surfaces.&#160;Like the human eyes and brain, DFP uses ...

Process of Making Three-dimensional Microstructures using Vaporization of a Sacrificial Component

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Vascular structures in natural systems are able to provide high mass transport through high surface areas and optimized structure. Few synthetic material ...

Ambient Method for the Production of an Ionically Gated Carbon Nanotube Common Cathode in Tandem Organic Solar Cells

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A method of fabricating organic photovoltaic (OPV) tandems that requires no vacuum processing is presented. These devices are comprised of two ...

Fabrication of Low Temperature Carbon Nanotube Vertical Interconnects Compatible with Semiconductor Technology

低温碳纳米管垂直互连的制作兼容半导体技术

We demonstrate a method for the low temperature growth (350 &#176;C) of vertically-aligned carbon nanotubes (CNT) bundles on electrically conductive ...

Fabrication and Characterization of Superconducting Resonators

制备与表征超导谐振器的

Superconducting microwave resonators are of interest for a wide range of applications, including for their use as microwave kinetic inductance detectors ...

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The aim of this work is to present a zero-waste process for storing CO2 in a stable and benign mineral form while producing zeolitic minerals with ...

Precision Milling of Carbon Nanotube Forests Using Low Pressure Scanning Electron Microscopy

碳纳米管森林精密铣床使用低压扫描电子显微镜

A nanoscale fabrication technique appropriate for milling carbon nanotube (CNT) forests is described. The technique utilizes an environmental scanning ...

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High Temperature Fabrication of Nanostructured Yttria-Stabilized-Zirconia YSZ Scaffolds by In Situ Carbon Templating Xerogels

通过纳米氧化钇稳定的二氧化锆（YSZ）的支架的高温加工<em&gt;原位</em&gt;碳模板干凝胶

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