Name: fabrication of silica ultra high quality factor microresonators
Uploaded: 2012-07-02T08:04:00
Description: Watch this Scientific Journal Video about Fabrication of Silica Ultra High Quality Factor Microresonators at JoVE.com

ए निर्माता एक Annenberg फाउंडेशन ग्रेजुएट रिसर्च फैलोशिप द्वारा समर्थित किया गया था, और यह काम राष्ट्रीय विज्ञान [085,281 और +१०,२८,४४०] फाउंडेशन द्वारा समर्थित किया गया.

1. Microsphere निर्माण <ol><li> एक छोर से ऑप्टिकल फाइबर, पट्टी ~ 1.5 &quot;cladding की एक छोटी राशि (लगभग 5 इंच) का चयन करें और या तो मेथनॉल या इथेनॉल (चित्रा 1 क, ख) के साथ साफ. </li><li> यदि उपलब्ध है, फोड़ना एक ऑप्टिकल फाइबर क्लीवर के ...

<ol>
	<li>Armani, D. K., Kippenberg, T. J., Spillane, S. M., Vahala, K. J. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Ultra-high-Q+toroid+microcavity+on+a+chip.">Ultra-high-Q toroid microcavity on a chip.</a> Nature. 421, 925-928 (2003).</li><li>Gorodetsky, M. L., Savchenkov, A. A., Ilchenko, V. S. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Ultimate+Q+of+optical+microsphere+resonators.">Ultimate Q of optical microsphere resonators.</a> Optics Letters. 21, 453-455 (1996).</li><li>Armani, A. M., Kulkarni, R. P., Fraser, S. E., Flagan, R. C., Vahala, K. J. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Label-Free,+Single-Molecule+Detection+with+Optical+Microcavities.">Label-Free, Single-Molecule Detection with Optical Microcavities.</a> Science. 317, 783 (2007).</li><li>Choi, H. S., Ismail, S., Armani, A. M. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Studying+polymer+thin+films+with+hybrid+optical+microcavities.">Studying polymer thin films with hybrid optical microcavities.</a> Optics Letters. 36, 2152-2154 (2011).</li><li>Aoki, T. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Observation+of+strong+coupling+between+one+atom+and+a+monolithic+microresonator.">Observation of strong coupling between one atom and a monolithic microresonator.</a> Nature. 443, 671-674 (2006).</li><li>Hsu, H. -. S., Cai, C., Armani, A. M. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Ultra-low+threshold+Er:Yb+sol-gel+microlaser+on+silicon.">Ultra-low threshold Er:Yb sol-gel microlaser on silicon.</a> Optics Express. 17, 23265 (2009).</li><li>Zhu, J. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=On-chip+single+nanoparticle+detection+and+sizing+by+mode+splitting+in+an+ultrahigh-Q+microresonator.">On-chip single nanoparticle detection and sizing by mode splitting in an ultrahigh-Q microresonator.</a> Nature Photonics. 4, 46-49 (2009).</li><li>Zhang, X., Choi, H. -. S., Armani, A. M. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Ultimate+quality+factor+of+silica+microtoroid+resonant+cavities.">Ultimate quality factor of silica microtoroid resonant cavities.</a> Applied Physics Letters. 96, 153304 (2010).</li><li>Vernooy, D. W., Ilchenko, V. S., Mabuchi, H., Streed, E. W., Kimble, H. J. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=High-Q+measurements+of+fused-silica+microspheres+in+the+near+infrared.">High-Q measurements of fused-silica microspheres in the near infrared.</a> Optics Letters. 23, 247-249 (1998).</li><li>Saleh, B. E. A., Teich, M. C. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=.">.</a> Fundamentals of Photonics. , (2007).</li><li>Ilchenko, V. S. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Crystal+quartz+optical+whispering-gallery+resonators.">Crystal quartz optical whispering-gallery resonators.</a> Optics Letters. 33, 1569-1571 (2008).</li><li>Soteropulos, C., Hunt, H., Armani, A. M. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Determination+of+binding+kinetics+using+whispering+gallery+mode+microcavities.">Determination of binding kinetics using whispering gallery mode microcavities.</a> Applied Physics Letters. 99, 103703 (2011).</li><li>Barclay, P. E., Srinivasan, K., Painter, O., Lev, B., Mabuchi, H. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Integration+of+fiber-coupled+high-Q+SiNx+microdisks+with+atom+chips.">Integration of fiber-coupled high-Q SiNx microdisks with atom chips.</a> Applied Physics Letters. 89, (2006).</li><li>Srinivasan, K., Painter, O. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Mode+coupling+and+cavity-quantum-dot+interactions+in+a+fiber-coupled+microdisk+cavity.">Mode coupling and cavity-quantum-dot interactions in a fiber-coupled microdisk cavity.</a> Physical Review. A. 75, (2007).</li><li>Xu, Q. F., Lipson, M. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=All-optical+logic+based+on+silicon+micro-ring+resonators.">All-optical logic based on silicon micro-ring resonators.</a> Optics Express. 15, 924-929 (2007).</li><li>Martin, A. L., Armani, D. K., Yang, L., Vahala, K. J. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Replica-molded+high-Q+polymer+microresonators.">Replica-molded high-Q polymer microresonators.</a> Optics Letters. 29, 533-535 (2004).</li><li>Chao, C. Y., Guo, L. J. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Polymer+microring+resonators+fabricated+by+nanoimprint+technique.">Polymer microring resonators fabricated by nanoimprint technique.</a> Journal of Vacuum Science Technology B. 20, 2862-2866 (2002).</li><li>Armani, A. M., Armani, D. K., Min, B., Vahala, K. J., Spillane, S. M. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Ultra-high-Q+microcavity+operation+in+H2O+and+D2O.">Ultra-high-Q microcavity operation in H2O and D2O.</a> Applied Physics Letters. 87, 151118 (2005).</li><li>Kovacs, G. T. A. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=.">.</a> Micromachined Transducers Sourcebook. , (1998).</li><li>Kovacs, G. T. A., Maluf, N. I., Petersen, K. E. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Bulk+Micromaching+of+Silicon.">Bulk Micromaching of Silicon.</a> Proceedings of the IEEE. 86, 1536-1551 (1998).</li></ol>

किसी भी ऑप्टिकल संरचना के साथ के रूप में, निर्माण की प्रक्रिया के हर कदम पर सफाई बनाए रखने के महत्व का है. के रूप में वहाँ कई लिथोग्राफी और निर्माण के विषय पर लिखा पाठ्यपुस्तकों हैं, नीचे दिए गए सुझावों क?...

<table border="1"><tbody><tr><td> भाग के नाम </td><td> कंपनी </td><td> सूचीपत्र संख्या </td><td> टिप्पणियाँ </td></tr><tr><td> फाइबर मुंशी </td><td> न्यूपोर्ट </td><td> F-RFS </td><td> वैकल्पिक </td></tr><tr><td> ऑप्टिकल फाइबर </td><td> न्यूपोर्ट </td><td> एफ SMF-28 </td><td> ऑप्टिकल फाइबर के किसी भी प्रकार का इस्तेमाल किया जा सकता है. </td></tr><tr><td> फाइबर कोटिंग खाल उधेड़नेवाला </td><td> न्यूपोर्ट </td><td> एफ STR-175 </td><td> तार स्ट्रिपर्स भी इस्तेमाल किया जा सकता है </td></tr><tr><td> इथेनॉल </td><td> कोई भी विक्रेता </td><td> विलायक के स्तर शुद्धता </td><td> मेथनॉल या Isopropanol विकल्प हैं </td></tr></tbody></table> तालिका 1 Microsphere निर्माण सामग्री. <table border="1"><tbody><tr><td> अभिकर्मक का नाम </td><td> कंपनी </td><td> &lt;मजबूत&gt; सूचीपत्र संख्या </td><td> टिप्पणियाँ </td></tr><tr><td> 2μm thermally बढ़ी सिलिका के साथ सिलिकॉन wafers </td><td> WRS के माल </td><td> n / a </td><td> हम आंतरिक 8, 100, 4 &quot;व्यास का उपयोग करें </td></tr><tr><td> HMDS (Hexamethyldisilazane) </td><td> Aldrich </td><td> 440,191 </td><td></td></tr><tr><td> Photoresist </td><td> Shipley </td><td> S1813 </td><td></td></tr><tr><td> विकासक </td><td> Shipley </td><td> MF-321 </td><td></td></tr><tr><td> बेहतर - HF के बफर </td><td> Transene </td><td> n / a </td><td> सुधार बफर HF एक चिकनी, सादे BOE या HF से बेहतर खोदना गुणवत्ता देता है </td></tr><tr><td> एसीटोन, मेथनॉल, Isopropanol </td><td> कोई भी विक्रेता </td><td> शुद्धता 99.8% </td><td></td></tr></tbody></table> तालिका 2 माइकर.otoroid निर्माण सामग्री. <table border="1"><tbody><tr><td> उपकरण का नाम </td><td> निर्माता </td><td> सूचीपत्र संख्या </td><td> टिप्पणियाँ </td></tr><tr><td> स्पिनर </td><td> Solitec </td><td> 5110-ND </td><td> किसी भी स्पिनर का इस्तेमाल किया जा सकता है. </td></tr><tr><td> एलाइनर </td><td> SUSS MicroTec </td><td> 3 MJB </td><td> कोई एलाइनर इस्तेमाल किया जा सकता है. </td></tr><tr><td> XEF 2 नक़्क़ाश </td><td> उन्नत संचार उपकरण इंक, </td><td> ADCETCH2007 # </td><td></td></tr></tbody></table> तालिका 3 Microtoroid निर्माण उपकरण. <table border="1"><tbody><tr><td> भाग के नाम </td><td> कंपनी </td><td> सूचीपत्र संख्या </td><td> टिप्पणियाँ </td></tr><tr><td> सीओ 2 </sub&gt; पर लेजर </td><td> Synrad </td><td> श्रृंखला 48 </td><td></td></tr><tr><td> 3 - अक्ष मंच </td><td> OptoSigma </td><td> 120-0770 </td><td> अन्य विक्रेताओं से उपलब्ध के रूप में अच्छी तरह से. </td></tr><tr><td> सी परावर्तक 1 ​​&quot;व्यास) </td><td> द्वितीय छठी </td><td> 308,325 </td><td> अन्य विक्रेताओं से उपलब्ध के रूप में अच्छी तरह से. </td></tr><tr><td> विज्ञान सम्बन्धी जिम्बल माउंट (सी प्रतिक्षेपक के लिए) </td><td> थोर लैब्स </td><td> KX1G </td><td> अन्य विक्रेताओं से उपलब्ध के रूप में अच्छी तरह से. </td></tr><tr><td> बीम combiner (1 &quot;व्यास) </td><td> Meller प्रकाशिकी </td><td> L19100008 - B0 </td><td> अन्य विक्रेताओं से उपलब्ध के रूप में अच्छी तरह से. </td></tr><tr><td> 4 &quot;फोकल लम्बाई लेंस (1&quot; व्यास) </td><td> Meller प्रकाशिकी या द्वितीय छठी </td><td></td><td> अन्य विक्रेताओं से उपलब्ध है के रूप में अच्छी तरह से </td></tr><tr><td> मिश्रित पोस्ट, लेंस mounts </td><td> थोर लैब्स, न्यूपोर्ट, एडमंड प्रकाशिकी या Optosigma </td><td></td><td></td></tr><tr><td> ज़ूम 6000 मशीन दृष्टि प्रणाली </td><td> Navitar </td><td> n / a </td><td> सामान्य यूएसबी कैमरा और वास्तविक समय इमेजिंग के लिए कंप्यूटर की आवश्यकता है. यह एक किट के रूप में खरीदा है. </td></tr><tr><td> ज़ूम 6000 प्रणाली के लिए focuser </td><td> एडमंड प्रकाशिकी </td><td> 54-792 </td><td> अन्य विक्रेताओं से उपलब्ध के रूप में अच्छी तरह से. </td></tr><tr><td> XZ ज़ूम 6000 के लिए ऐक्सिस Positioners </td><td> पार्कर लच्छेदार </td><td> CR4457, CR4452, 4499, </td><td> एक्स अक्ष CR4457, CR4452 Z-अक्ष, 4499 कोष्ठक बढ़ते है. </td></tr></tbody></table> तालिका 4 सीओ 2 लेजर reflow सेट अप.

fabrication of silica ultra high quality factor microresonators

Whispering gallery resonant cavities confine light in circular orbits at their periphery.1-2 The photon storage lifetime in the cavity, quantified by the quality factor (Q) of the cavity, can be in excess of 500ns for cavities with Q factors above 100 million. As a result of their low material losses, silica microcavities have demonstrated some of the longest photon lifetimes to date1-2. Since a portion of the circulating light extends outside the resonator, these devices can also be used to probe the surroundings. This interaction has enabled numerous experiments in biology, such as single molecule biodetection and antibody-antigen kinetics, as well as discoveries in other fields, such as development of ultra-low-threshold microlasers, characterization of thin films, and cavity quantum electrodynamics studies.3-7
The two primary silica resonant cavity geometries are the microsphere and the microtoroid. Both devices rely on a carbon dioxide laser reflow step to achieve their ultra-high-Q factors (Q&gt;100 million).1-2,8-9 However, there are several notable differences between the two structures. Silica microspheres are free-standing, supported by a single optical fiber, whereas silica microtoroids can be fabricated on a silicon wafer in large arrays using a combination of lithography and etching steps. These differences influence which device is optimal for a given experiment.
Here, we present detailed fabrication protocols for both types of resonant cavities. While the fabrication of microsphere resonant cavities is fairly straightforward, the fabrication of microtoroid resonant cavities requires additional specialized equipment and facilities (cleanroom). Therefore, this additional requirement may also influence which device is selected for a given experiment.
Introduction
An optical resonator efficiently confines light at specific wavelengths, known as the resonant wavelengths of the device. 1-2 The common figure of merit for these optical resonators is the quality factor or Q. This term describes the photon lifetime (&tau;o) within the resonator, which is directly related to the resonator's optical losses. Therefore, an optical resonator with a high Q factor has low optical losses, long photon lifetimes, and very low photon decay rates (1/&tau;o). As a result of the long photon lifetimes, it is possible to build-up extremely large circulating optical field intensities in these devices. This very unique property has allowed these devices to be used as laser sources and integrated biosensors.10
A unique sub-class of resonators is the whispering gallery mode optical microcavity. In these devices, the light is confined in circular orbits at the periphery. Therefore, the field is not completely confined within the device, but evanesces into the environment. Whispering gallery mode optical cavities have demonstrated some of the highest quality factors of any optical resonant cavity to date.9,11 Therefore, these devices are used throughout science and engineering, including in fundamental physics studies and in telecommunications as well as in biodetection experiments. 3-7,12
Optical microcavities can be fabricated from a wide range of materials and in a wide variety of geometries. A few examples include silica and silicon microtoroids, silicon, silicon nitride, and silica microdisks, micropillars, and silica and polymer microrings.13-17 The range in quality factor (Q) varies as dramatically as the geometry. Although both geometry and high Q are important considerations in any field, in many applications, there is far greater leverage in boosting device performance through Q enhancement. Among the numerous options detailed previously, the silica microsphere and the silica microtoroid resonator have achieved some of the highest Q factors to date.1,9 Additionally, as a result of the extremely low optical loss of silica from the visible through the near-IR, both microspheres and microtoroids are able to maintain their Q factors over a wide range of testing wavelengths.18 Finally, because silica is inherently biocompatible, it is routinely used in biodetection experiments.
In addition to high material absorption, there are several other potential loss mechanisms, including surface roughness, radiation loss, and contamination loss.2 Through an optimization of the device size, it is possible to eliminate radiation losses, which arise from poor optical field confinement within the device. Similarly, by storing a device in an appropriately clean environment, contamination of the surface can be minimized. Therefore, in addition to material loss, surface scattering is the primary loss mechanism of concern.2,8
In silica devices, surface scattering is minimized by using a laser reflow technique, which melts the silica through surface tension induced reflow. While spherical optical resonators have been studied for many years, it is only with recent advances in fabrication technologies that researchers been able to fabricate high quality silica optical toroidal microresonators (Q&gt;100 million) on a silicon substrate, thus paving the way for integration with microfluidics.1
The present series of protocols details how to fabricate both silica microsphere and microtoroid resonant cavities. While silica microsphere resonant cavities are well-established, microtoroid resonant cavities were only recently invented.1 As many of the fundamental methods used to fabricate the microsphere are also used in the more complex microtoroid fabrication procedure, by including both in a single protocol it will enable researchers to more easily trouble-shoot their experiments.

Watch this Scientific Journal Video about Fabrication of Silica Ultra High Quality Factor Microresonators at JoVE.com

Fabrication of Silica Ultra High Quality Factor Microresonators

हम एक कार्बन डाइऑक्साइड लेजर reflow सिलिका सहित मुक्त खड़े microspheres और के पर चिप microtoroids को गुंजयमान cavities, बनाना तकनीक के उपयोग का वर्णन करता है. reflow विधि सतह खामियों हटा, दोनों उपकरणों के भीतर लंबे समय तक फोटॉन जन्मों की अनुमति है. परिणामस्वरूप उपकरणों अति उच्च गुणवत्ता कारकों है, दूरसंचार से biodetection को लेकर अनुप्रयोगों को सक्षम.

सिलिका अल्ट्रा उच्च गुणवत्ता फैक्टर Microresonators के निर्माण की

Whispering gallery resonant cavities confine light in circular orbits at their periphery.1-2 The photon storage lifetime in the cavity, quantified by the ...

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Angle-resolved Photoemission Spectroscopy At Ultra-low Temperatures

कोण - हल photoemission स्पेक्ट्रोस्कोपी अल्ट्रा कम तापमान पर

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Convergent Polishing is a novel polishing system and method for finishing flat and spherical glass optics in which a workpiece, independent of its initial ...

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एक केंद्रित फोटोवोल्टिक प्रणाली में स्पेक्ट्रम बंटवारे फैलानेवाला तत्व के लिए उच्च कंट्रास्ट gratings के निर्माण

High contrast gratings are designed and fabricated and its application is proposed in a parallel spectrum splitting dispersive element that can improve ...

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पर सतहों सिलिका Nanoparticle पॉलिएस्टर कोटिंग्स के विकास धूप के संपर्क में

Corrosion of metallic surfaces is prevalent in the environment and is of great concern in many areas, including the military, transport, aviation, ...

High Temperature Fabrication of Nanostructured Yttria-Stabilized-Zirconia (YSZ) Scaffolds by In Situ Carbon Templating Xerogels

High Temperature Fabrication of Nanostructured Yttria-Stabilized-Zirconia YSZ Scaffolds by In Situ Carbon Templating Xerogels

द्वारा Nanostructured yttria स्थिर-YSZ (zirconia) scaffolds के उच्च तापमान निर्माण<em&gt; सीटू</em&gt; कार्बन Templating xerogels

We demonstrate a method for the high temperature fabrication of porous, nanostructured yttria-stabilized-zirconia (YSZ, 8 mol% yttria - 92 mol% zirconia) ...

Scalable Solution-processed Fabrication Strategy for High-performance, Flexible, Transparent Electrodes with Embedded Metal Mesh

उच्च प्रदर्शन, लचीले, एंबेडेड मेटल मेश के साथ पारदर्शी इलेक्ट्रोड के लिए स्केलेबल सॉल्यूशन-प्रोसेसेड फ़ैब्रिकेशन स्ट्रेटजी

Here, the authors report the embedded metal-mesh transparent electrode (EMTE), a new transparent electrode (TE) with a metal mesh completely embedded in a ...

Method for Recording Broadband High Resolution Emission Spectra of Laboratory Lightning Arcs

प्रयोगशाला बिजली आर्क्स के ब्रॉडबैंड उच्च संकल्प उत्सर्जन स्पेक्ट्रा रिकॉर्डिंग के लिए विधि

Lightning is one of the most common and destructive forces in nature and has long been studied using spectroscopic techniques, first with traditional ...

Fabrication of Ultra-thin Color Films with Highly Absorbing Media Using Oblique Angle Deposition

अत्यंत अवशोषित मीडिया परोक्ष कोण जमाव का उपयोग कर के साथ अल्ट्रा-पतली रंग फिल्मों का निर्माण

Ultra-thin film structures have been studied extensively for use as optical coatings, but performance and fabrication challenges remain.&#160; We present ...

Flow-assisted Dielectrophoresis: A Low Cost Method for the Fabrication of High Performance Solution-processable Nanowire Devices

प्रवाह असिस्टेड Dielectrophoresis: उच्च प्रदर्शन समाधान के निर्माण के लिए एक कम लागत विधि-प्रक्रिया Nanowire उपकरणों

Flow-assisted dielectrophoresis (DEP) is an efficient self-assembly method for the controllable and reproducible positioning, alignment, and selection of ...