Name: fabrication of silica ultra high quality factor microresonators
Uploaded: 2012-07-02T08:04:00
Description: Watch this Scientific Journal Video about Fabrication of Silica Ultra High Quality Factor Microresonators at JoVE.com

A. 메이커는 Annenberg 재단 대학원 연구 원정대에 의해 지원되고,이 작품은 국립 과학 재단 [085281과 1028440]에 의해 지원되었다.

1. Microsphere의 제조 <ol><li> 한쪽에서 광섬유, 스트립 ~ 1.5 &quot;cladding 소량 (약 5 인치)를 선택하고 메탄올 또는 에탄올 (그림 1A, B) 중 하나와 함께 청소. </li><li> 광섬유 칼로 사용할 경우, 다니엘은 끝. 사용할 수없는 경우, 전선 절단기 또는 ~ 0.5 &quot;가 남아있다는 등 가위로 잘라. 광섬유 식칼을 사용하는 장점은 그림 1B와 같이 매우 부드럽고 균일한 커팅을 생산한다는 것...

<ol>
	<li>Armani, D. K., Kippenberg, T. J., Spillane, S. M., Vahala, K. J. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Ultra-high-Q+toroid+microcavity+on+a+chip.">Ultra-high-Q toroid microcavity on a chip.</a> Nature. 421, 925-928 (2003).</li><li>Gorodetsky, M. L., Savchenkov, A. A., Ilchenko, V. S. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Ultimate+Q+of+optical+microsphere+resonators.">Ultimate Q of optical microsphere resonators.</a> Optics Letters. 21, 453-455 (1996).</li><li>Armani, A. M., Kulkarni, R. P., Fraser, S. E., Flagan, R. C., Vahala, K. 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M. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Studying+polymer+thin+films+with+hybrid+optical+microcavities.">Studying polymer thin films with hybrid optical microcavities.</a> Optics Letters. 36, 2152-2154 (2011).</li><li>Aoki, T. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Observation+of+strong+coupling+between+one+atom+and+a+monolithic+microresonator.">Observation of strong coupling between one atom and a monolithic microresonator.</a> Nature. 443, 671-674 (2006).</li><li>Hsu, H. -. S., Cai, C., Armani, A. M. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Ultra-low+threshold+Er:Yb+sol-gel+microlaser+on+silicon.">Ultra-low threshold Er:Yb sol-gel microlaser on silicon.</a> Optics Express. 17, 23265 (2009).</li><li>Zhu, J. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=On-chip+single+nanoparticle+detection+and+sizing+by+mode+splitting+in+an+ultrahigh-Q+microresonator.">On-chip single nanoparticle detection and sizing by mode splitting in an ultrahigh-Q microresonator.</a> Nature Photonics. 4, 46-49 (2009).</li><li>Zhang, X., Choi, H. -. S., Armani, A. M. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Ultimate+quality+factor+of+silica+microtoroid+resonant+cavities.">Ultimate quality factor of silica microtoroid resonant cavities.</a> Applied Physics Letters. 96, 153304 (2010).</li><li>Vernooy, D. W., Ilchenko, V. S., Mabuchi, H., Streed, E. W., Kimble, H. J. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=High-Q+measurements+of+fused-silica+microspheres+in+the+near+infrared.">High-Q measurements of fused-silica microspheres in the near infrared.</a> Optics Letters. 23, 247-249 (1998).</li><li>Saleh, B. E. A., Teich, M. C. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=.">.</a> Fundamentals of Photonics. , (2007).</li><li>Ilchenko, V. S. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Crystal+quartz+optical+whispering-gallery+resonators.">Crystal quartz optical whispering-gallery resonators.</a> Optics Letters. 33, 1569-1571 (2008).</li><li>Soteropulos, C., Hunt, H., Armani, A. M. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Determination+of+binding+kinetics+using+whispering+gallery+mode+microcavities.">Determination of binding kinetics using whispering gallery mode microcavities.</a> Applied Physics Letters. 99, 103703 (2011).</li><li>Barclay, P. E., Srinivasan, K., Painter, O., Lev, B., Mabuchi, H. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Integration+of+fiber-coupled+high-Q+SiNx+microdisks+with+atom+chips.">Integration of fiber-coupled high-Q SiNx microdisks with atom chips.</a> Applied Physics Letters. 89, (2006).</li><li>Srinivasan, K., Painter, O. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Mode+coupling+and+cavity-quantum-dot+interactions+in+a+fiber-coupled+microdisk+cavity.">Mode coupling and cavity-quantum-dot interactions in a fiber-coupled microdisk cavity.</a> Physical Review. A. 75, (2007).</li><li>Xu, Q. F., Lipson, M. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=All-optical+logic+based+on+silicon+micro-ring+resonators.">All-optical logic based on silicon micro-ring resonators.</a> Optics Express. 15, 924-929 (2007).</li><li>Martin, A. L., Armani, D. K., Yang, L., Vahala, K. J. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Replica-molded+high-Q+polymer+microresonators.">Replica-molded high-Q polymer microresonators.</a> Optics Letters. 29, 533-535 (2004).</li><li>Chao, C. Y., Guo, L. J. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Polymer+microring+resonators+fabricated+by+nanoimprint+technique.">Polymer microring resonators fabricated by nanoimprint technique.</a> Journal of Vacuum Science Technology B. 20, 2862-2866 (2002).</li><li>Armani, A. M., Armani, D. K., Min, B., Vahala, K. J., Spillane, S. M. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Ultra-high-Q+microcavity+operation+in+H2O+and+D2O.">Ultra-high-Q microcavity operation in H2O and D2O.</a> Applied Physics Letters. 87, 151118 (2005).</li><li>Kovacs, G. T. A. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=.">.</a> Micromachined Transducers Sourcebook. , (1998).</li><li>Kovacs, G. T. A., Maluf, N. I., Petersen, K. E. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Bulk+Micromaching+of+Silicon.">Bulk Micromaching of Silicon.</a> Proceedings of the IEEE. 86, 1536-1551 (1998).</li></ol>

모든 광학 구조와 마찬가지로 제조 공정의 모든 단계에서 청결을 유지하는 것은 매우 중요합니다. 리소그래피와 제조의 주제에 쓰여진 수많은 교과서가있는 바와 같이, 아래 제안은 종합 있겠지만 연구자들이 직면보다 일반적인 문제 몇 가지를 강조하기위한 것이 아닙니다. 19-20 microtoroid의 주변의 균일도가 초기 디스크의 균일에 의해 결정되기 때문에 패턴이 매우 ...

<table border="1"><tbody><tr><td> 부분의 이름 </td><td> 회사 </td><td> 카탈로그 번호 </td><td> 댓글 </td></tr><tr><td> 섬유 학자 </td><td> 뉴 포트 </td><td> F-RFS </td><td> 선택 </td></tr><tr><td> 광학 섬유 </td><td> 뉴 포트 </td><td> F-SMF-28 </td><td> 광섬유의 유형은 사용할 수 있습니다. </td></tr><tr><td> 섬유 코팅 리퍼 </td><td> 뉴 포트 </td><td> F-STR-175 </td><td> 와이어 스트리퍼는 사용할 수 </td></tr><tr><td> 에탄올 </td><td> 모든 벤더 </td><td> 솔벤트 수준의 순도 </td><td> 메탄올이나 이소프로판올는 대체 위치 </td></tr></tbody></table> 표 1. Microsphere 제조 재료. <table border="1"><tbody><tr><td> 시약의 이름 </td><td> 회사 </td><td> &lt;강한&gt; 카탈로그 번호 </td><td> 댓글 </td></tr><tr><td> 2μm 열 성장 규소와 실리콘 웨이퍼 </td><td> WRS 자료 </td><td> N / A </td><td> 우리 고유 8 일 &lt;100&gt;, 4 &quot;직경을 사용 </td></tr><tr><td> HMDS (헥사메틸디실아젠) </td><td> 올드 리치 </td><td> 440,191 </td><td></td></tr><tr><td> 포토 레지스트 </td><td> 쉬플리 </td><td> S1813 </td><td></td></tr><tr><td> 개발자 </td><td> 쉬플리 </td><td> MF-321 </td><td></td></tr><tr><td> 개선 - HF 버퍼 </td><td> Transene </td><td> N / A </td><td> 향상된 버퍼 HF는 일반 비오이 또는 HF보다 에칭 부드럽고 더 나은 품질을 제공합니다 </td></tr><tr><td> 아세톤, 메탄올, 이소프로판올 </td><td> 모든 벤더 </td><td> 99.8 %의 순도 </td><td></td></tr></tbody></table> 표 2. Microtoroid 제작 재료. <table border="1"><tbody><tr><td> 장비 이름 </td><td> 제조 </td><td> 카탈로그 번호 </td><td> 댓글 </td></tr><tr><td> 스피너 </td><td> Solitec </td><td> 5110-ND </td><td> 모든 회전자 사용할 수 있습니다. </td></tr><tr><td> Aligner </td><td> 조사할 Microtec </td><td> MJB 3 </td><td> 모든 aligner 사용할 수 있습니다. </td></tr><tr><td> XeF이 에칭 </td><td> 고급 통신 기기 주식 회사 </td><td> # ADCETCH2007 </td><td></td></tr></tbody></table> 표 3. Microtoroid 제조 장비. <table border="1"><tbody><tr><td> 부분의 이름 </td><td> 회사 </td><td> 카탈로그 번호 </td><td> 댓글 </td></tr><tr><td> CO 2 </sub&gt;를 레이저 </td><td> Synrad </td><td> 시리즈 48 </td><td></td></tr><tr><td> 3 축 스테이지 </td><td> OptoSigma </td><td> 120-0770 </td><td> 뿐만 아니라 다른 업체에서 사용할 수 있습니다. </td></tr><tr><td> 시 리플렉터 1 &quot;직경) </td><td> II-VI </td><td> 308,325 </td><td> 뿐만 아니라 다른 업체에서 사용할 수 있습니다. </td></tr><tr><td> 운동학 짐벌 마운트 (SI 반사기의 경우) </td><td> 토르 실험실 </td><td> KX1G </td><td> 뿐만 아니라 다른 업체에서 사용할 수 있습니다. </td></tr><tr><td> 빔 조합기 (1 &quot;직경) </td><td> Meller 광학 </td><td> L19100008-B0 </td><td> 뿐만 아니라 다른 업체에서 사용할 수 있습니다. </td></tr><tr><td> 4 &quot;초점 거리 렌즈 (1&quot;직경) </td><td> Meller 광학 또는 II-VI </td><td></td><td> 다른 업체에서 제공뿐만 아니라 </td></tr><tr><td> 모듬 게시물, 렌즈 마운트 </td><td> 토르 연구소, 뉴 포트, 에드먼드 광학 또는 Optosigma </td><td></td><td></td></tr><tr><td> 줌 6000 머신 비전 시스템 </td><td> Navitar </td><td> N / A </td><td> 실시간 영상에 대한 일반적인 USB 카메라와 컴퓨터가 필요합니다. 이 키트로 구입하고 있습니다. </td></tr><tr><td> 줌 6000 시스템 Focuser </td><td> 에드먼드 광학 </td><td> 54-792 </td><td> 뿐만 아니라 다른 업체에서 사용할 수 있습니다. </td></tr><tr><td> 줌 6000에 대한 XZ의 축 Positioners </td><td> 파커 천변 만화의 </td><td> CR4457, CR4452, 4499 </td><td> CR4457은 X 축이며, CR4452은 Z 축이며, 4499은 브라켓을 장착하고 있습니다. </td></tr></tbody></table> 표 4. CO 2 레이저 Reflow 설정.

fabrication of silica ultra high quality factor microresonators

Whispering gallery resonant cavities confine light in circular orbits at their periphery.1-2 The photon storage lifetime in the cavity, quantified by the quality factor (Q) of the cavity, can be in excess of 500ns for cavities with Q factors above 100 million. As a result of their low material losses, silica microcavities have demonstrated some of the longest photon lifetimes to date1-2. Since a portion of the circulating light extends outside the resonator, these devices can also be used to probe the surroundings. This interaction has enabled numerous experiments in biology, such as single molecule biodetection and antibody-antigen kinetics, as well as discoveries in other fields, such as development of ultra-low-threshold microlasers, characterization of thin films, and cavity quantum electrodynamics studies.3-7
The two primary silica resonant cavity geometries are the microsphere and the microtoroid. Both devices rely on a carbon dioxide laser reflow step to achieve their ultra-high-Q factors (Q&gt;100 million).1-2,8-9 However, there are several notable differences between the two structures. Silica microspheres are free-standing, supported by a single optical fiber, whereas silica microtoroids can be fabricated on a silicon wafer in large arrays using a combination of lithography and etching steps. These differences influence which device is optimal for a given experiment.
Here, we present detailed fabrication protocols for both types of resonant cavities. While the fabrication of microsphere resonant cavities is fairly straightforward, the fabrication of microtoroid resonant cavities requires additional specialized equipment and facilities (cleanroom). Therefore, this additional requirement may also influence which device is selected for a given experiment.
Introduction
An optical resonator efficiently confines light at specific wavelengths, known as the resonant wavelengths of the device. 1-2 The common figure of merit for these optical resonators is the quality factor or Q. This term describes the photon lifetime (&tau;o) within the resonator, which is directly related to the resonator's optical losses. Therefore, an optical resonator with a high Q factor has low optical losses, long photon lifetimes, and very low photon decay rates (1/&tau;o). As a result of the long photon lifetimes, it is possible to build-up extremely large circulating optical field intensities in these devices. This very unique property has allowed these devices to be used as laser sources and integrated biosensors.10
A unique sub-class of resonators is the whispering gallery mode optical microcavity. In these devices, the light is confined in circular orbits at the periphery. Therefore, the field is not completely confined within the device, but evanesces into the environment. Whispering gallery mode optical cavities have demonstrated some of the highest quality factors of any optical resonant cavity to date.9,11 Therefore, these devices are used throughout science and engineering, including in fundamental physics studies and in telecommunications as well as in biodetection experiments. 3-7,12
Optical microcavities can be fabricated from a wide range of materials and in a wide variety of geometries. A few examples include silica and silicon microtoroids, silicon, silicon nitride, and silica microdisks, micropillars, and silica and polymer microrings.13-17 The range in quality factor (Q) varies as dramatically as the geometry. Although both geometry and high Q are important considerations in any field, in many applications, there is far greater leverage in boosting device performance through Q enhancement. Among the numerous options detailed previously, the silica microsphere and the silica microtoroid resonator have achieved some of the highest Q factors to date.1,9 Additionally, as a result of the extremely low optical loss of silica from the visible through the near-IR, both microspheres and microtoroids are able to maintain their Q factors over a wide range of testing wavelengths.18 Finally, because silica is inherently biocompatible, it is routinely used in biodetection experiments.
In addition to high material absorption, there are several other potential loss mechanisms, including surface roughness, radiation loss, and contamination loss.2 Through an optimization of the device size, it is possible to eliminate radiation losses, which arise from poor optical field confinement within the device. Similarly, by storing a device in an appropriately clean environment, contamination of the surface can be minimized. Therefore, in addition to material loss, surface scattering is the primary loss mechanism of concern.2,8
In silica devices, surface scattering is minimized by using a laser reflow technique, which melts the silica through surface tension induced reflow. While spherical optical resonators have been studied for many years, it is only with recent advances in fabrication technologies that researchers been able to fabricate high quality silica optical toroidal microresonators (Q&gt;100 million) on a silicon substrate, thus paving the way for integration with microfluidics.1
The present series of protocols details how to fabricate both silica microsphere and microtoroid resonant cavities. While silica microsphere resonant cavities are well-established, microtoroid resonant cavities were only recently invented.1 As many of the fundamental methods used to fabricate the microsphere are also used in the more complex microtoroid fabrication procedure, by including both in a single protocol it will enable researchers to more easily trouble-shoot their experiments.

Watch this Scientific Journal Video about Fabrication of Silica Ultra High Quality Factor Microresonators at JoVE.com

Fabrication of Silica Ultra High Quality Factor Microresonators

우리는 자유 서 microspheres 및 온칩 microtoroids 포함한 실리카 공진 충치를 조작하는 이산화탄소 레이저 reflow 기법의 사용을 설명합니다. reflow 메서드는 두 장치 사이 긴 광자 수명 있도록, 표면 결함을 제거합니다. 그 결과 디바이스는 통신에서 biodetection에 이르기까지 애플 리케이션을 가능하게, 초고 품질 요인이 있습니다.

실리카 초고 품질 팩터 Microresonators의 제작

Whispering gallery resonant cavities confine light in circular orbits at their periphery.1-2 The photon storage lifetime in the cavity, quantified by the ...

Research

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Fabrication of Ultra-thin Color Films with Highly Absorbing Media Using Oblique Angle Deposition

기울기 각도 증 착을 사용 하 여 미디어를 흡수 하는 높은 가진 매우 얇은 필름의 제조

Ultra-thin film structures have been studied extensively for use as optical coatings, but performance and fabrication challenges remain.&#160; We present ...

Flow-assisted Dielectrophoresis: A Low Cost Method for the Fabrication of High Performance Solution-processable Nanowire Devices

흐름 기반 Dielectrophoresis: 고성능 솔루션 처리 나노와이어 소자의 제조에 대 한 낮은 비용 방법

Flow-assisted dielectrophoresis (DEP) is an efficient self-assembly method for the controllable and reproducible positioning, alignment, and selection of ...