Name: fabrication of silica ultra high quality factor microresonators
Uploaded: 2012-07-02T08:04:00
Description: Watch this Scientific Journal Video about Fabrication of Silica Ultra High Quality Factor Microresonators at JoVE.com

Creador de A. fue apoyado por una Fundación Annenberg de Postgrado de Becas de Investigación, y este trabajo fue apoyado por la National Science Foundation [085281 y 1028440].

1. Fabricación de microesferas <ol><li> Seleccionar una pequeña cantidad (aproximadamente 5 pulgadas) de fibra óptica, tira ~ 1,5 &quot;revestimiento de un extremo y limpiar con metanol o etanol (Figura 1a, b). </li><li> Si está disponible, se unirá al final con una cuchilla de fibra óptica. Si no está disponible, se cortó con tijeras o cortador de alambre tales que ~ 0,5 &quot;que queda. La ventaja de utilizar una cuchilla de fibra óptica es que produce una muy lisa, uniforme corte como en l...

<ol>
	<li>Armani, D. K., Kippenberg, T. J., Spillane, S. M., Vahala, K. J. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Ultra-high-Q+toroid+microcavity+on+a+chip.">Ultra-high-Q toroid microcavity on a chip.</a> Nature. 421, 925-928 (2003).</li><li>Gorodetsky, M. L., Savchenkov, A. A., Ilchenko, V. S. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Ultimate+Q+of+optical+microsphere+resonators.">Ultimate Q of optical microsphere resonators.</a> Optics Letters. 21, 453-455 (1996).</li><li>Armani, A. M., Kulkarni, R. P., Fraser, S. E., Flagan, R. C., Vahala, K. J. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Label-Free,+Single-Molecule+Detection+with+Optical+Microcavities.">Label-Free, Single-Molecule Detection with Optical Microcavities.</a> Science. 317, 783 (2007).</li><li>Choi, H. S., Ismail, S., Armani, A. M. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Studying+polymer+thin+films+with+hybrid+optical+microcavities.">Studying polymer thin films with hybrid optical microcavities.</a> Optics Letters. 36, 2152-2154 (2011).</li><li>Aoki, T. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Observation+of+strong+coupling+between+one+atom+and+a+monolithic+microresonator.">Observation of strong coupling between one atom and a monolithic microresonator.</a> Nature. 443, 671-674 (2006).</li><li>Hsu, H. -. S., Cai, C., Armani, A. M. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Ultra-low+threshold+Er:Yb+sol-gel+microlaser+on+silicon.">Ultra-low threshold Er:Yb sol-gel microlaser on silicon.</a> Optics Express. 17, 23265 (2009).</li><li>Zhu, J. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=On-chip+single+nanoparticle+detection+and+sizing+by+mode+splitting+in+an+ultrahigh-Q+microresonator.">On-chip single nanoparticle detection and sizing by mode splitting in an ultrahigh-Q microresonator.</a> Nature Photonics. 4, 46-49 (2009).</li><li>Zhang, X., Choi, H. -. S., Armani, A. M. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Ultimate+quality+factor+of+silica+microtoroid+resonant+cavities.">Ultimate quality factor of silica microtoroid resonant cavities.</a> Applied Physics Letters. 96, 153304 (2010).</li><li>Vernooy, D. W., Ilchenko, V. S., Mabuchi, H., Streed, E. W., Kimble, H. J. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=High-Q+measurements+of+fused-silica+microspheres+in+the+near+infrared.">High-Q measurements of fused-silica microspheres in the near infrared.</a> Optics Letters. 23, 247-249 (1998).</li><li>Saleh, B. E. A., Teich, M. C. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=.">.</a> Fundamentals of Photonics. , (2007).</li><li>Ilchenko, V. S. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Crystal+quartz+optical+whispering-gallery+resonators.">Crystal quartz optical whispering-gallery resonators.</a> Optics Letters. 33, 1569-1571 (2008).</li><li>Soteropulos, C., Hunt, H., Armani, A. M. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Determination+of+binding+kinetics+using+whispering+gallery+mode+microcavities.">Determination of binding kinetics using whispering gallery mode microcavities.</a> Applied Physics Letters. 99, 103703 (2011).</li><li>Barclay, P. E., Srinivasan, K., Painter, O., Lev, B., Mabuchi, H. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Integration+of+fiber-coupled+high-Q+SiNx+microdisks+with+atom+chips.">Integration of fiber-coupled high-Q SiNx microdisks with atom chips.</a> Applied Physics Letters. 89, (2006).</li><li>Srinivasan, K., Painter, O. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Mode+coupling+and+cavity-quantum-dot+interactions+in+a+fiber-coupled+microdisk+cavity.">Mode coupling and cavity-quantum-dot interactions in a fiber-coupled microdisk cavity.</a> Physical Review. A. 75, (2007).</li><li>Xu, Q. F., Lipson, M. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=All-optical+logic+based+on+silicon+micro-ring+resonators.">All-optical logic based on silicon micro-ring resonators.</a> Optics Express. 15, 924-929 (2007).</li><li>Martin, A. L., Armani, D. K., Yang, L., Vahala, K. J. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Replica-molded+high-Q+polymer+microresonators.">Replica-molded high-Q polymer microresonators.</a> Optics Letters. 29, 533-535 (2004).</li><li>Chao, C. Y., Guo, L. J. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Polymer+microring+resonators+fabricated+by+nanoimprint+technique.">Polymer microring resonators fabricated by nanoimprint technique.</a> Journal of Vacuum Science Technology B. 20, 2862-2866 (2002).</li><li>Armani, A. M., Armani, D. K., Min, B., Vahala, K. J., Spillane, S. M. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Ultra-high-Q+microcavity+operation+in+H2O+and+D2O.">Ultra-high-Q microcavity operation in H2O and D2O.</a> Applied Physics Letters. 87, 151118 (2005).</li><li>Kovacs, G. T. A. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=.">.</a> Micromachined Transducers Sourcebook. , (1998).</li><li>Kovacs, G. T. A., Maluf, N. I., Petersen, K. E. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Bulk+Micromaching+of+Silicon.">Bulk Micromaching of Silicon.</a> Proceedings of the IEEE. 86, 1536-1551 (1998).</li></ol>

Como con cualquier estructura óptica, mantener la limpieza en cada paso del proceso de fabricación es de importancia crítica. Como hay numerosos libros de texto escritos sobre el tema de la litografía y fabricación, las sugerencias a continuación no se pretende ser exhaustivo, sino destacar algunos de los problemas más comunes los investigadores se han enfrentado. 19-20 Debido a la uniformidad de la periferia de la microtoroid está determinada por la uniformidad del disco ...

<table border="1"><tbody><tr><td> Nombre de la parte </td><td> Empresa </td><td> Número de catálogo </td><td> Comentarios </td></tr><tr><td> Fibra escribano </td><td> Newport </td><td> F-RFS </td><td> Opcional </td></tr><tr><td> Fibra óptica </td><td> Newport </td><td> F-SMF-28 </td><td> Cualquier tipo de fibra óptica puede ser utilizado. </td></tr><tr><td> Fibra separador recubrimiento </td><td> Newport </td><td> F-STR-175 </td><td> Pelacables también se puede utilizar </td></tr><tr><td> Etanol </td><td> Cualquier proveedor </td><td> Disolventes nivel de pureza </td><td> Metanol o isopropanol son sustitutos </td></tr></tbody></table> Tabla 1. Materiales microesferas de fabricación. <table border="1"><tbody><tr><td> Nombre del reactivo </td><td> Empresa </td><td> &lt;strong&gt; Número de catálogo </td><td> Comentarios </td></tr><tr><td> Obleas de silicio con sílice 2μm crecido térmicamente </td><td> WRS Materiales </td><td> n / a </td><td> Usamos intrínseca 8, &lt;100&gt;, 4 &quot;de diámetro </td></tr><tr><td> HMDS (hexametildisilazano) </td><td> Aldrich </td><td> 440191 </td><td></td></tr><tr><td> CIs </td><td> Shipley </td><td> S1813 </td><td></td></tr><tr><td> Promotor </td><td> Shipley </td><td> MF-321 </td><td></td></tr><tr><td> Buffered HF - Mejora de la </td><td> Transene </td><td> n / a </td><td> La mejora de HF tampón da un suave y de mejor calidad de grabado que no sean papel BOE o HF </td></tr><tr><td> La acetona, metanol, isopropanol </td><td> Cualquier proveedor </td><td> 99,8% de pureza </td><td></td></tr></tbody></table> Tabla 2. MicrMateriales otoroid de fabricación. <table border="1"><tbody><tr><td> Nombre del equipo </td><td> Fabricante </td><td> Número de catálogo </td><td> Comentarios </td></tr><tr><td> Hilandero </td><td> Solitec </td><td> 5110-ND </td><td> Cualquier ruleta se puede utilizar. </td></tr><tr><td> Alineador </td><td> Suss Microtec </td><td> MJB 3 </td><td> Cualquier alineador se puede utilizar. </td></tr><tr><td> XeF 2 grabador </td><td> Advanced Communication Devices, Inc. </td><td> # ADCETCH2007 </td><td></td></tr></tbody></table> Tabla 3. Equipo Microtoroid fabricación. <table border="1"><tbody><tr><td> Nombre de la parte </td><td> Empresa </td><td> Número de catálogo </td><td> Comentarios </td></tr><tr><td> De CO 2 </sub&gt; láser </td><td> SYNRAD </td><td> Serie 48 </td><td></td></tr><tr><td> 3-Eje fase </td><td> OptoSigma </td><td> 120-0770 </td><td> Disponible a partir de otros fabricantes también. </td></tr><tr><td> Si el reflector 1 &quot;de diámetro) </td><td> II-VI </td><td> 308325 </td><td> Disponible a partir de otros fabricantes también. </td></tr><tr><td> Montaje cinemático cardán (para el Si reflector) </td><td> Thor Labs </td><td> KX1G </td><td> Disponible a partir de otros fabricantes también. </td></tr><tr><td> Combinador de haz (1 &quot;de diámetro) </td><td> Meller Óptica </td><td> L19100008-B0 </td><td> Disponible a partir de otros fabricantes también. </td></tr><tr><td> 4 &quot;Lente Longitud focal (1&quot; de diámetro) </td><td> Meller óptica o II-VI </td><td></td><td> Disponible a partir de otros proveedores, así </td></tr><tr><td> Surtido de mensajes, soportes de lentes </td><td> Thor Labs, Newport, Edmund Optics o OptoSigma </td><td></td><td></td></tr><tr><td> 6000 zoom de la máquina de sistema de visión </td><td> Navitar </td><td> n / a </td><td> Requiere genérica USB de la cámara y el ordenador de imágenes en tiempo real. Este se compra como un kit. </td></tr><tr><td> Focalizador para el sistema de zoom 6000 </td><td> Edmund Optics </td><td> 54-792 </td><td> Disponible a partir de otros fabricantes también. </td></tr><tr><td> XZ Posicionadores del Eje para 6000 Ampliar </td><td> Parker Daedal </td><td> CR4457, CR4452, 4499 </td><td> CR4457 es el eje X, CR4452 es el eje Z, 4499 es el soporte de montaje. </td></tr></tbody></table> Tabla 4. Láser de CO 2 de reflujo Set-up.

fabrication of silica ultra high quality factor microresonators

Whispering gallery resonant cavities confine light in circular orbits at their periphery.1-2 The photon storage lifetime in the cavity, quantified by the quality factor (Q) of the cavity, can be in excess of 500ns for cavities with Q factors above 100 million. As a result of their low material losses, silica microcavities have demonstrated some of the longest photon lifetimes to date1-2. Since a portion of the circulating light extends outside the resonator, these devices can also be used to probe the surroundings. This interaction has enabled numerous experiments in biology, such as single molecule biodetection and antibody-antigen kinetics, as well as discoveries in other fields, such as development of ultra-low-threshold microlasers, characterization of thin films, and cavity quantum electrodynamics studies.3-7
The two primary silica resonant cavity geometries are the microsphere and the microtoroid. Both devices rely on a carbon dioxide laser reflow step to achieve their ultra-high-Q factors (Q&gt;100 million).1-2,8-9 However, there are several notable differences between the two structures. Silica microspheres are free-standing, supported by a single optical fiber, whereas silica microtoroids can be fabricated on a silicon wafer in large arrays using a combination of lithography and etching steps. These differences influence which device is optimal for a given experiment.
Here, we present detailed fabrication protocols for both types of resonant cavities. While the fabrication of microsphere resonant cavities is fairly straightforward, the fabrication of microtoroid resonant cavities requires additional specialized equipment and facilities (cleanroom). Therefore, this additional requirement may also influence which device is selected for a given experiment.
Introduction
An optical resonator efficiently confines light at specific wavelengths, known as the resonant wavelengths of the device. 1-2 The common figure of merit for these optical resonators is the quality factor or Q. This term describes the photon lifetime (&tau;o) within the resonator, which is directly related to the resonator's optical losses. Therefore, an optical resonator with a high Q factor has low optical losses, long photon lifetimes, and very low photon decay rates (1/&tau;o). As a result of the long photon lifetimes, it is possible to build-up extremely large circulating optical field intensities in these devices. This very unique property has allowed these devices to be used as laser sources and integrated biosensors.10
A unique sub-class of resonators is the whispering gallery mode optical microcavity. In these devices, the light is confined in circular orbits at the periphery. Therefore, the field is not completely confined within the device, but evanesces into the environment. Whispering gallery mode optical cavities have demonstrated some of the highest quality factors of any optical resonant cavity to date.9,11 Therefore, these devices are used throughout science and engineering, including in fundamental physics studies and in telecommunications as well as in biodetection experiments. 3-7,12
Optical microcavities can be fabricated from a wide range of materials and in a wide variety of geometries. A few examples include silica and silicon microtoroids, silicon, silicon nitride, and silica microdisks, micropillars, and silica and polymer microrings.13-17 The range in quality factor (Q) varies as dramatically as the geometry. Although both geometry and high Q are important considerations in any field, in many applications, there is far greater leverage in boosting device performance through Q enhancement. Among the numerous options detailed previously, the silica microsphere and the silica microtoroid resonator have achieved some of the highest Q factors to date.1,9 Additionally, as a result of the extremely low optical loss of silica from the visible through the near-IR, both microspheres and microtoroids are able to maintain their Q factors over a wide range of testing wavelengths.18 Finally, because silica is inherently biocompatible, it is routinely used in biodetection experiments.
In addition to high material absorption, there are several other potential loss mechanisms, including surface roughness, radiation loss, and contamination loss.2 Through an optimization of the device size, it is possible to eliminate radiation losses, which arise from poor optical field confinement within the device. Similarly, by storing a device in an appropriately clean environment, contamination of the surface can be minimized. Therefore, in addition to material loss, surface scattering is the primary loss mechanism of concern.2,8
In silica devices, surface scattering is minimized by using a laser reflow technique, which melts the silica through surface tension induced reflow. While spherical optical resonators have been studied for many years, it is only with recent advances in fabrication technologies that researchers been able to fabricate high quality silica optical toroidal microresonators (Q&gt;100 million) on a silicon substrate, thus paving the way for integration with microfluidics.1
The present series of protocols details how to fabricate both silica microsphere and microtoroid resonant cavities. While silica microsphere resonant cavities are well-established, microtoroid resonant cavities were only recently invented.1 As many of the fundamental methods used to fabricate the microsphere are also used in the more complex microtoroid fabrication procedure, by including both in a single protocol it will enable researchers to more easily trouble-shoot their experiments.

Watch this Scientific Journal Video about Fabrication of Silica Ultra High Quality Factor Microresonators at JoVE.com

Fabrication of Silica Ultra High Quality Factor Microresonators

Se describe la utilización de una técnica de dióxido de carbono reflujo láser para fabricar cavidades resonantes de sílice, incluyendo independiente microesferas y microtoroids en el chip. El método de reflujo elimina imperfecciones de la superficie, permitiendo largos tiempos de vida de fotones dentro de ambos dispositivos. Los dispositivos resultantes tienen factores de ultra alta calidad, permitiendo a las aplicaciones que van desde las telecomunicaciones a biodetección.

La fabricación de sílice de alta calidad Ultra microresonators Factor

Whispering gallery resonant cavities confine light in circular orbits at their periphery.1-2 The photon storage lifetime in the cavity, quantified by the ...

Research

JoVE Journal

Engineering

Angle-resolved Photoemission Spectroscopy At Ultra-low Temperatures

De ángulo resuelto espectroscopia de fotoemisión a bajas temperaturas

The physical properties of a material are defined by its  electronic structure. Electrons in solids are characterized by energy (&omega;)  and momentum ...

Investigación

Ingeniería

Synthesis and Microdiffraction at Extreme Pressures and Temperatures

Síntesis y microdifracción a presiones y temperaturas extremas

High pressure compounds and polymorphs are investigated for a broad range of purposes such as determine structures and processes of deep planetary ...

Convergent Polishing: A Simple, Rapid, Full Aperture Polishing Process of High Quality Optical Flats &amp; Spheres

Convergent Polishing: A Simple, Rapid, Full Aperture Polishing Process of High Quality Optical Flats & Spheres

Convergentes Pulido: Una simple, rápida, completa Apertura Pulido Proceso de alta calidad óptica Pisos y Esferas

Convergent Polishing is a novel polishing system and method for finishing flat and spherical glass optics in which a workpiece, independent of its initial ...

Fabrication of High Contrast Gratings for the Spectrum Splitting Dispersive Element in a Concentrated Photovoltaic System

Fabricación de rejillas de alto contraste para la División del espectro de dispersión de elementos en un Sistema de Concentración Fotovoltaica

High contrast gratings are designed and fabricated and its application is proposed in a parallel spectrum splitting dispersive element that can improve ...

The Evolution of Silica Nanoparticle-polyester Coatings on Surfaces Exposed to Sunlight

La evolución de sílice recubrimientos de nanopartículas-poliéster sobre superficies expuestas al sol

Corrosion of metallic surfaces is prevalent in the environment and is of great concern in many areas, including the military, transport, aviation, ...

High Temperature Fabrication of Nanostructured Yttria-Stabilized-Zirconia (YSZ) Scaffolds by In Situ Carbon Templating Xerogels

High Temperature Fabrication of Nanostructured Yttria-Stabilized-Zirconia YSZ Scaffolds by In Situ Carbon Templating Xerogels

Alta Fabrication Temperatura de-estabilizada con itria-óxido de circonio andamios nanoestructurados (YSZ) por<em&gt; In Situ</em&gt; carbono Templating xerogeles

We demonstrate a method for the high temperature fabrication of porous, nanostructured yttria-stabilized-zirconia (YSZ, 8 mol% yttria - 92 mol% zirconia) ...

Scalable Solution-processed Fabrication Strategy for High-performance, Flexible, Transparent Electrodes with Embedded Metal Mesh

Estrategia escalable de fabricación procesada por soluciones para electrodos transparentes de alto rendimiento y flexibles con malla metálica integrada

Here, the authors report the embedded metal-mesh transparent electrode (EMTE), a new transparent electrode (TE) with a metal mesh completely embedded in a ...

Method for Recording Broadband High Resolution Emission Spectra of Laboratory Lightning Arcs

Método para la grabación de espectros de emisiones de alta resolución de banda ancha de arcos relámpagos de laboratorio

Lightning is one of the most common and destructive forces in nature and has long been studied using spectroscopic techniques, first with traditional ...

Fabrication of Ultra-thin Color Films with Highly Absorbing Media Using Oblique Angle Deposition

Fabricación de películas ultra delgadas Color con altamente absorbente de los medios de comunicación mediante deposición oblicua

Ultra-thin film structures have been studied extensively for use as optical coatings, but performance and fabrication challenges remain.&#160; We present ...

Flow-assisted Dielectrophoresis: A Low Cost Method for the Fabrication of High Performance Solution-processable Nanowire Devices

Asistida por flujo dielectroforesis: Un método de bajo costo para la fabricación de dispositivos de nanocable procesables en solución de alto rendimiento

Flow-assisted dielectrophoresis (DEP) is an efficient self-assembly method for the controllable and reproducible positioning, alignment, and selection of ...