Name: nanomoulding of functional materials, a versatile complementary pattern replication method to nanoimprinting
Uploaded: 2013-01-23T12:00:00
Description: Watch this Scientific Journal Video about Nanomoulding of Functional Materials, a Versatile Complementary Pattern Replication Method to Nanoimprinting at JoVE.com

感谢M.勒伯夫为阳极质感的铝主站和瑞士联邦能源办公室和瑞士国家科学基金会提供资金援助的原子力显微镜（AFM），W.李。 FP7项目资助的“快速通道”，由欧盟委员会资助协议没有283501的框架中进行这项工作的一部分。

1。模具制造我们用我们自制的纳米印刷设置，用于制造模具的负面以下参考。6，但奈米压印任何其他设置将正常工作。另外一种官能化的聚二甲基硅氧烷（PDMS）模具也可能会工作。 <ol><li>制造或购买一个合适的主承载的纳米级图案被转移。原则上，任何掌握合适的纳米压印将做的工作。我们使用有纹理的ZnO层的玻璃板上（肖特，AF32生态41毫米×41毫米×0.5毫米），?...

<ol>
	<li>Geissler, M., Xia, Y. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Patterning:+Principles+and+Some+New+Developments.">Patterning: Principles and Some New Developments.</a> Advanced Materials. 16 (15), 1249-1269 (2004).</li><li>Guo, L. J. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Nanoimprint+Lithography:+Methods+and+Material+Requirements.">Nanoimprint Lithography: Methods and Material Requirements.</a> Advanced Materials. 19, 495-513 (2007).</li><li>Ahn, S. H., Guo, L. J. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Large-Area+Roll-to-Roll+and+Roll-to-Plate+Nanoimprint+Lithography:+A+Step+toward+High-Throughput.">Large-Area Roll-to-Roll and Roll-to-Plate Nanoimprint Lithography: A Step toward High-Throughput.</a> Application of Continuous Nanoimprinting. ACS Nano. 3 (8), 2304-2310 (2009).</li><li>Battaglia, C., Escarr&#233;, J., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Nanoimprint+Lithography+for+High-Efficiency+Thin-Film+Silicon+Solar+Cells.">Nanoimprint Lithography for High-Efficiency Thin-Film Silicon Solar Cells.</a> Nano Letters. 11, 661-665 (2011).</li><li>Battaglia, C., Escarr&#233;, J., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Nanomoulding+of+Transparent+Zinc+Oxide+Electrodes+for+Efficient+Light+Trapping+in+Solar+Cells.">Nanomoulding of Transparent Zinc Oxide Electrodes for Efficient Light Trapping in Solar Cells.</a> Nature Photonics. 5, 535-538 (2012).</li><li>Escarr&#233;, J., S&#246;derstr&#246;m, K., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=High+Fidelity+Transfer+of+Nanometric+Random+Textures+by+UV+Embossing+for+Thin+Film+Solar+Cells+Applications.">High Fidelity Transfer of Nanometric Random Textures by UV Embossing for Thin Film Solar Cells Applications.</a> Solar Energy Materials &amp; Solar Cells. 95, 881-886 (2011).</li><li>Fa&#255;, S., Feitknecht, L., Schl&#252;chter, R., Kroll, U., Vallat-Sauvain, E., Shah, A. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Rough+ZnO+layers+by+LP-CVD+process+and+their+effect+in+improving+performances+of+amorphous+and+microcrystalline+silicon+solar+cells.">Rough ZnO layers by LP-CVD process and their effect in improving performances of amorphous and microcrystalline silicon solar cells.</a> Solar Energy Materials and Solar Cells. 90, 2960-2967 (2006).</li><li>Zhao, X. -. M., Xia, Y., Whitesides, G. M. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Fabrication+of+Three-Dimensional+Micro-Structures:+Microtransfer+Molding.">Fabrication of Three-Dimensional Micro-Structures: Microtransfer Molding.</a> Advanced Materials. 8, 837-840 (1996).</li><li>Hampton, M. J., Williams, S. S., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=The+Patterning+of+Sub-500+nm+Inorganic+Oxide+Structures.">The Patterning of Sub-500 nm Inorganic Oxide Structures.</a> Advanced Materials. 20, 2667-2673 (2008).</li><li>Bass, J. D., Schaper, C. D., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Transfer+Molding+of+Nanoscale+Oxides+Using+Water-Soluble+Templates.">Transfer Molding of Nanoscale Oxides Using Water-Soluble Templates.</a> ACS Nano. 5 (5), 4065-4072 (2011).</li><li>Escarr&#233;, J., Nicolay, S., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Nanomoulded+front+ZnO+contacts+for+thin+film+silicon+solar+cell+applications.">Nanomoulded front ZnO contacts for thin film silicon solar cell applications.</a> , (2012).</li><li>Sontheimer, T., Rudigier-Voigt, E., Bockmeyer, M., Klimm, C., Schubert-Bischoff, P., Becker, C., Rech, B. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Large-area+fabrication+of+equidistant+free-standing+Si+crystals+on+nanoimprinted+glass.">Large-area fabrication of equidistant free-standing Si crystals on nanoimprinted glass.</a> Phys. Status Solidi. RRL. 5, 376-379 (2011).</li></ol>

Nanomoulding允许传输​​任意功能材料的奈米结构。在图1和图2中的各个处理步骤的比较揭示之间的密切关系nanomoulding和纳米压印。 nanomoulding和纳米压印之间的主要差别是额外的材料沉积在图2e中的步骤。其它的处理流程是一样的。因此，可以在任何可用的纳米压印设置执行nanomoulding。 但选择兼容的模具的材料和防粘连剂，可以进行材料?...

Nanopatterning在纳米技术和应用科学的许多领域获得了巨大的重要性。模式的产生是第一步，可以通过自顶向下的方法，如基于自组装纳米球光刻技术或嵌段共聚物光刻1的方法，如电子束光刻或自底向上的方法。同样重要的模式生成模式的复制。除了 ​​光刻技术，纳米压印（ 图1）已经成为一个有前途的替代，特别适合大面积高通量的纳米级图案以较低的成本2-4。光刻需要有图案的面具，的奈米压印依赖于一个预制的主结构。通常执行从主图案转印到热塑性或紫外线或热固化性聚合物。然而，有许多情况下，它是优选直接的功能性材料上的图案转移。 &lt;P类=“jove_content”&gt;在这里，我们描述了一种复制方法的基础上nanomoulding和传输层（ 图2），我们最近推出的楼盘。转移功能氧化锌电极上的纳米级图案。我们的方法可以很容易地实现nanomoulding，如果纳米压印设置是可用的。 nanomoulding提供了潜在的被推广到许多其他的功能性材料，材料堆和甚至完整的设备，提供模具材料是这样选择的，它是兼容的材料沉积过程（es）。作为一个例子我们在座的nanomoulding的透明导电氧化锌（ZnO）电极沉积化学气相沉积（CVD），找到自己的应用程序，以提高太阳能电池陷光在5。

<table border="1"><tbody><tr><td> 的试剂的名称 </td><td> 公司 </td><td> 目录编号 </td><td> 评论（可选） </td></tr><tr><td>奈米树脂</td><td> Microresist </td><td> Ormostamp </td><td></td></tr><tr><td> （1H，1H，2H，2H-Perfluoroctyl）-trichlorsilane的，防粘连剂</td><td> Sigma Aldrich公司</td><td> 448931-10G </td><td></td></tr><tr><td>载玻片</td><td>肖特</td><td> AF32生态</td><td> 0.5毫米</td></tr><tr><td>聚萘（PEN）表</td><td>古德费洛</td><td> ES361090 </td><td> 0.125毫米</td></tr><tr><td> （C 2 H 5）2 Zn的</td><td>阿克苏诺贝尔</td><td></td><td></td></tr><tr><td>银溅射靶4N </td><td>贺利氏</td><td> 81062165 </td><td></td></tr><tr><td> B 2 H 6，的SiH 4，H 2，B（CH 3）3，PH 3，CH 4，CO 2的 </td><td>梅塞尔</td><td></td><td></td></tr><tr><td></td><td></td><td></td><td> 设备 </td></tr><tr><td>奈米系统</td><td>首页 - 建</td><td></td><td></td></tr><tr><td> LP-CVD系统</td><td>首页 - 建</td><td></td><td></td></tr><tr><td> PVD系统</td><td>莱宝</td><td>非光滑450 B </td><td></td></tr><tr><td> PE-CVD反应器</td><td> Indeotec </td><td>八达通我</td><td></td></tr><tr><td> SEM </td><td> JEOL </td><td> JSM-7500 TFE </td><td></td></tr><tr><td> AFM </td><td>数显仪表</td><td>奈米级3100 </td><td></td></tr></tbody></table>

nanomoulding of functional materials, a versatile complementary pattern replication method to nanoimprinting

我们描述了nanomoulding的技术，它允许低成本的纳米级图案的功能材料，材料栈和完整的设备。 Nanomoulding层转移相结合，使任意曲面的复制模式，从主结构上的功能性材料。 nanomoulding上可以执行任何纳米压印设置，并可以适用于范围广泛的材料和沉积过程。特别是，我们表明的图案化的透明氧化锌电极的制造的光捕集在太阳能电池中的应用。

<html> 图3总结了一些nanomoulded结构的说明性实例。甲玻璃上通过CVD法生长的氧化锌主结构（a）中所示。 nanomoulded的ZnO副本的相应的（d）所示。比较高保真的nanomoulding过程中的局部高度（g）及的角度（J）直方图从AFM图像中提取透露。类似的结果显示为一个一维光栅干涉光刻（B，E，H，K）和阳极质感的铝（C，F，I，L）制成。 <img src="/file...

Watch this Scientific Journal Video about Nanomoulding of Functional Materials, a Versatile Complementary Pattern Replication Method to Nanoimprinting at JoVE.com

Nanomoulding of Functional Materials, a Versatile Complementary Pattern Replication Method to Nanoimprinting

我们描述了nanomoulding的技术，它允许低成本的纳米级图案的功能材料，材料栈和完整的设备。 nanomoulding上可以执行任何纳米压印设置，并可以适用于范围广泛的材料和沉积过程。

Nanomoulding功能材料，灵活的互补模式的复制方法，以奈米

We describe a nanomoulding technique which  allows low-cost nanoscale patterning of functional materials, materials stacks  and full devices. Nanomoulding ...

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