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DOI :
10.3791/50177-v
January 23rd, 2013
Chapters
0:05
Title
1:40
Master Preparation
3:29
Mould Fabrication
6:24
Zinc Oxide Deposition
7:28
Layer Transfer
8:25
Results: Nanomoulding of Zinc Oxide through Chemical Vapor Deposition
9:59
Conclusion
우리는 기능 재료, 재료 스택 및 전체 장치의 저가 nanoscale 패턴을 허용 nanomoulding 기술을 설명합니다. Nanomoulding는 모든 nanoimprinting 설정에서 수행 할 수 있으며, 자료 및 증착 공정의 다양한 범위에 적용 할 수 있습니다.
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