Name: fabrication and characterization of photonic crystal slow light waveguides and cavities
Uploaded: 2012-11-30T13:00:00
Description: Watch this Scientific Journal Video about Fabrication And Characterization Of Photonic Crystal Slow Light Waveguides And Cavities at JoVE.com

Die Autoren danken Dr. Matteo Galli, Dr. Simone L. Portalupi und Prof. Lucio C. Andreani von der Universität von Pavia für hilfreiche Diskussionen im Zusammenhang mit der RS ​​Technik und die Durchführung von Messungen.

Disclaimer: Das folgende Protokoll gibt einen allgemeinen Prozessablauf Abdecken der Herstellung und Charakterisierung Techniken zur photonischen Kristall-Wellenleiter und Hohlräume. Der Prozessablauf ist für die spezifische Ausrüstung in unserem Labor optimiert und Parameter können abweichen, wenn andere Reagenzien oder Geräten verwendet wird. Ein. Probenvorbereitung <ol><li> Probe Spalten, - auf die Silizium-auf-Isolator (SOI)-Wafer und Verwendung eines Diamant Schr...

<ol>
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F. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Ultracompact+and+low-power+optical+switch+based+on+silicon+photonic+crystals.">Ultracompact and low-power optical switch based on silicon photonic crystals.</a> Opt. Lett. 33 (2), 147-149 (2008).</li><li>Nguyen, H. C., Sakai, Y., Shinkawa, M., Ishikura, N., Baba, T. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=10+Gb/s+operation+of+photonic+crystal+silicon+optical+modulators.">10 Gb/s operation of photonic crystal silicon optical modulators.</a> Opt. Express. 19 (14), 13000-13007 (1364).</li><li>Kampfrath, T., Beggs, D. M., White, T. P., Melloni, A., Krauss, T. F., Kuipers, L. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Ultrafast+adiabatic+manipulation+of+slow+light+in+a+photonic+crystal.">Ultrafast adiabatic manipulation of slow light in a photonic crystal.</a> Phys. Rev. A. 81 (4), 043837 (2010).</li><li>Monat, C., Corcoran, B., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Slow+light+enhancement+of+nonlinear+effects+in+silicon+engineered+photonic+crystal+waveguides.">Slow light enhancement of nonlinear effects in silicon engineered photonic crystal waveguides.</a> Opt. Express. 17 (4), 2944-2953 (2009).</li><li>Corcoran, B., Monat, C., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=light+emission+in+silicon+through+slow-light+enhanced+third-harmonic+generation+in+photonic-crystal+waveguides.">light emission in silicon through slow-light enhanced third-harmonic generation in photonic-crystal waveguides.</a> Nature Photon. 3, 206-210 (2009).</li><li>Li, J., O'Faolain, L., Rey, I. H., Krauss, T. F. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Four-wave+mixing+in+photonic+crystal+waveguides:+slow+light+enhancement+and+limitations.">Four-wave mixing in photonic crystal waveguides: slow light enhancement and limitations.</a> Opt. Express. 19 (5), 4458-4463 (2010).</li><li>Checoury, X., Han, Z., Boucaud, P. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Stimulated+Raman+scattering+in+silicon+photonic+crystal+waveguides+under+continuous+excitation.">Stimulated Raman scattering in silicon photonic crystal waveguides under continuous excitation.</a> Phys. Rev. B. 82 (4), 041308 (2010).</li><li>Y, <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Photonic+crystal+nanocavity+laser+with+a+single+quantum+dot+gain.">Photonic crystal nanocavity laser with a single quantum dot gain.</a> Opt. Express. 17 (18), 15975-15982 (2009).</li><li>Ellis, B., Mayer, M. A., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Ultralow-threshold+electrically+pumped+quantum-dot+photonic-crystal+nanocavity+laser.">Ultralow-threshold electrically pumped quantum-dot photonic-crystal nanocavity laser.</a> Nature Photon. 24, 297-300 (2011).</li><li>Galli, M., Gerace, D., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Low-power+continuous-wave+generation+of+visible+harmonics+in+silicon+photonic+crystal+nanocavities.">Low-power continuous-wave generation of visible harmonics in silicon photonic crystal nanocavities.</a> Opt. Express. 18 (25), 26613-26624 (2010).</li><li>Notomi, M., Shinya, A., Mitsugi, S., Kira, G., Kuramochi, E., Tanabe, T. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Optical+bistable+switching+action+of+Si+high-Q+photonic-crystal+nanocavities.">Optical bistable switching action of Si high-Q photonic-crystal nanocavities.</a> Opt. Express. 13 (7), 2678-2687 (2005).</li><li>Shambat, G., Rivoire, K., Lu, J., Hatami, F., Vu&#269;kovi&#269;, J. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Tunable-wavelength+second+harmonic+generation+from+GaP+photonic+crystal+cavities+coupled+to+fiber+tapers.">Tunable-wavelength second harmonic generation from GaP photonic crystal cavities coupled to fiber tapers.</a> Opt. Express. 18 (12), 12176-12184 (2010).</li><li>Fan, S., Villeneuve, P. R., Joannopoulos, J. D., Haus, H. A. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Channel+drop+filters+in+photonic+crystals.">Channel drop filters in photonic crystals.</a> Opt. Express. 3 (1), 4-11 (1998).</li><li>Tanabe, T., Nishiguchi, K., Kuramochi, E., Notomi, M. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Low+power+and+fast+electro-optic+silicon+modulator+with+lateral+p-i-n+embedded+photonic+crystal+nanocavity.">Low power and fast electro-optic silicon modulator with lateral p-i-n embedded photonic crystal nanocavity.</a> Opt. Express. 17 (25), 22505-22513 (2009).</li><li>Nozaki, K., Tanabe, T., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Sub-femtojoule+all-optical+switching+using+a+photonic-crystal+nanocavity.">Sub-femtojoule all-optical switching using a photonic-crystal nanocavity.</a> Nature Photon. 4, 477-483 (2010).</li><li>Notomi, M., Yamada, K., Shinya, A., Takahashi, J., Takahashi, C., Yokohama, I. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Extremely+large+group-velocity+dispersion+of+line-defect+waveguides+in+photonic+crystal+slabs.">Extremely large group-velocity dispersion of line-defect waveguides in photonic crystal slabs.</a> Phys. Rev. Lett. 87 (25), 253902 (2001).</li><li>Labilloy, D., Benisty, H., Weisbuch, C., Smith, C. J. M., Krauss, T. F., Houdr&#233;, R., Oesterle, U. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Finely+resolved+transmission+spectra+and+band+structure+of+two-dimensional+photonic+crystals+using+emission+from+InAs+quantum+dots.">Finely resolved transmission spectra and band structure of two-dimensional photonic crystals using emission from InAs quantum dots.</a> Phys. Rev. B. 59 (3), 1649-1652 (1999).</li><li>Inan&#231; Tarhan, I., Zinkin, M. P., Watson, G. H. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Interferometric+technique+for+the+measurement+of+photonic+band+structure+in+colloidal+crystals.">Interferometric technique for the measurement of photonic band structure in colloidal crystals.</a> Opt. Lett. 20 (14), 1571-1573 (1995).</li><li>Galli, M., Marabelli, F., Guizzetti, G. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Direct+measurement+of+refractive-index+dispersion+of+transparent+media+by+white-light+interferometry.">Direct measurement of refractive-index dispersion of transparent media by white-light interferometry.</a> Appl. Opt. 42 (19), 3910-3914 (1364).</li><li>Galli, M., Bajoni, D., Marabelli, F., Andreani, L. C., Pavesi, L., Pucker, G. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Photonic+bands+and+group-velocity+dispersion+in+Si/SiO2+photonic+crystals+from+white-light+interferometry.">Photonic bands and group-velocity dispersion in Si/SiO2 photonic crystals from white-light interferometry.</a> Phys. Rev. B. 69 (11), 115107 (2004).</li><li>Vlasov, Y. A., O'Boyle, M., Hamann, H. F., McNab, S. J. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Active+control+of+slow+light+on+a+chip+with+photonic+crystal+waveguides.">Active control of slow light on a chip with photonic crystal waveguides.</a> Nature. 438, 65-69 (2005).</li><li>Gomez-Iglesias, A., O'Brien, D., O'Faolain, L., Miller, A., Krauss, T. F. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Direct+measurement+of+the+group+index+of+photonic+crystal+waveguide+via+Fourier+transform+spectral+interferometry.">Direct measurement of the group index of photonic crystal waveguide via Fourier transform spectral interferometry.</a> Appl. Phys. Lett. 90 (26), 261107 (2007).</li><li>Akahane, Y., Asano, T., Song, B. -. S., Noda, S. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=High-Q+photonic+nanocavity+in+a+two-dimensional+photonic+crystal.">High-Q photonic nanocavity in a two-dimensional photonic crystal.</a> Nature. 425, 944-947 (2003).</li><li>McCutcheon, M. W., Rieger, G. W., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Resonant+scattering+and+second-harmonic+spectroscopy+of+planar+photonic+crystal+microcavities.">Resonant scattering and second-harmonic spectroscopy of planar photonic crystal microcavities.</a> Appl. Phys. Lett. 87 (22), 221110 (2005).</li><li>Galli, M., Portalupi, S. L., Belotti, M., Andreani, L. C., O'Faolain, L., Krauss, T. F. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Light+scattering+and+Fano+resonances+in+high-Q+photonic+crystal+nanocavities.">Light scattering and Fano resonances in high-Q photonic crystal nanocavities.</a> Appl. Phys. Lett. 94 (7), 71101 (2009).</li><li>W&#195;est, R., Strasser, P., Jungo, M., Robin, F., Erni, D., J&#252;ckel, H. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=An+efficient+proximity-effect+correction+method+for+electron-beam+patterning+of+photonic-crystal+devices.">An efficient proximity-effect correction method for electron-beam patterning of photonic-crystal devices.</a> Microelectron Eng. 67-68, 182-188 (2003).</li><li>Tanaka, Y., Asano, T., Akahane, Y., Song, B. -. S., Noda, S. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Theoretical+investigation+of+a+two-dimensional+photonic+crystal+slab+with+truncated+cone+air+holes.">Theoretical investigation of a two-dimensional photonic crystal slab with truncated cone air holes.</a> Appl. Phys. Lett. 82 (11), 1661 (2003).</li><li>Asano, T., Song, B. -. S., Noda, S. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Analysis+of+the+experimental+Q+factors+(~+1+million)+of+photonic+crystal+nanocavities.">Analysis of the experimental Q factors (~ 1 million) of photonic crystal nanocavities.</a> Opt. Express. 14 (5), 1996-2002 (2006).</li><li>O'Faolain, L., Schulz, S. A., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Loss+engineered+slow+light+waveguides.">Loss engineered slow light waveguides.</a> Opt. Express. 18 (26), 27627-27638 (2010).</li><li>Joannopoulos, J. D., Johnson, S. G., Winn, J. N., Meade, R. D. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=.">.</a> Photonic crystals, molding the flow of light. , (2008).</li><li>Li, J., White, T. P., O'Faolain, L., Gomez-Iglesias, A., Krauss, T. F. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Systematic+design+of+flat+band+slow+light+in+photonic+crystal+waveguides.">Systematic design of flat band slow light in photonic crystal waveguides.</a> Opt. 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Beispiel Herstellung Unsere Wahl der Elektronenstrahl-Resist (dh ZEP 520A) ist aufgrund seiner gleichzeitig hoher Auflösung und Ätzresistenz. Wir glauben, dass ZEP 520A durch die UV-Licht von oben Labor Lichter emittiert beeinträchtigt sein kann; als solches empfehlen wir Platzierung Spin-beschichteten Proben in UV undurchsichtigen Behältern beim Verschieben von einem Labor zum anderen. Bewegen auf Definieren des photonischen Kristalls Muster, vor Ausse...

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		<tr>
			<td>Name </td>
			<td>Company </td>
			<td>Catalogue number </td>
			<td>Comments (optional) </td>
		</tr>
		<tr>
			<td>Acetone</td>
			<td>Fisher Scientific</td>
			<td>A/0520/17</td>
			<td>CAUTION: flammable, use good ventilation and avoid all ignition sources.</td>
		</tr>
		<tr>
			<td>Isopropanol</td>
			<td>Fisher Scientific</td>
			<td>P/7500/15</td>
			<td>CAUTION: flammable, use good ventilation and avoid all ignition sources.</td>
		</tr>
		<tr>
			<td>Electron Beam resist</td>
			<td>Marubeni Europe plc.</td>
			<td>ZEP520A</td>
			<td>CAUTION: flammable, harmful by inhalation, avoid contact with skin and eyes.</td>
		</tr>
		<tr>
			<td>Xylene</td>
			<td>Fisher Scientific</td>
			<td>X/0100/17</td>
			<td>CAUTION: flammable and highly toxic, use good ventilation, avoid all ignition sources, avoid contact with skin and eyes.</td>
		</tr>
		<tr>
			<td>Microposit S1818 G2</td>
			<td>Chestech Ltd.</td>
			<td>10277866</td>
			<td>CAUTION: flammable and causes irritation to eyes, nose and respiratory tract.</td>
		</tr>
		<tr>
			<td>Microposit Developer MF-319</td>
			<td>Chestech Ltd.</td>
			<td>10058721</td>
			<td>CAUTION: alkaline liquid and can cause irritation to eyes, nose and respiratory tract.</td>
		</tr>
		<tr>
			<td>Hydrofluoric Acid</td>
			<td>Fisher Scientific</td>
			<td>22333-5000</td>
			<td>CAUTION: extremely corrosive, readily destroys tissue; handle with full personal protective equipment rated for HF.</td>
		</tr>
		<tr>
			<td>Microposit 1165 Remover</td>
			<td>Chestech Ltd.</td>
			<td>10058734</td>
			<td>CAUTION: flammable and causes irritation to eyes, nose and respiratory tract.</td>
		</tr>
		<tr>
			<td>Sulphuric Acid</td>
			<td>Fisher Scientific</td>
			<td>S/9120/PB17</td>
			<td>CAUTION: corrosive and very toxic; handle with personal protective equipment and avoid inhalation of vapours or mists.</td>
		</tr>
		<tr>
			<td>Hydrogen Peroxide</td>
			<td>Fisher Scientific</td>
			<td>BPE2633-500</td>
			<td>CAUTION: very hazardous in case of skin and eye contact; handle with personal protective equipment.</td>
		</tr>
		<tr>
			<td>&nbsp;</td>
			<td>&nbsp;</td>
			<td>&nbsp;</td>
			<td>Equipment</td>
		</tr>
		<tr>
			<td>Silicon-on-Insulator wafer</td>
			<td>Soitec</td>
			<td>G8P-110-01</td>
			<td>&nbsp;</td>
		</tr>
		<tr>
			<td>Diamond Scribe</td>
			<td>J &amp; M Diamond Tool Inc.</td>
			<td>HS-415</td>
			<td>&nbsp;</td>
		</tr>
		<tr>
			<td>Microscope slides</td>
			<td>Fisher Scientific</td>
			<td>FB58622</td>
			<td>&nbsp;</td>
		</tr>
		<tr>
			<td>Beakers</td>
			<td>Fisher Scientific</td>
			<td>FB33109</td>
			<td>&nbsp;</td>
		</tr>
		<tr>
			<td>Tweezers</td>
			<td>SPI Supplies</td>
			<td>PT006-AB</td>
			<td>&nbsp;</td>
		</tr>
		<tr>
			<td>Ultrasonic Bath</td>
			<td>Camlab</td>
			<td>1161436</td>
			<td>&nbsp;</td>
		</tr>
		<tr>
			<td>Spin-Coater</td>
			<td>Electronic Micro Systems Ltd.</td>
			<td>EMS 4000</td>
			<td>&nbsp;</td>
		</tr>
		<tr>
			<td>Pipette</td>
			<td>Fisher Scientific</td>
			<td>FB55343</td>
			<td>&nbsp;</td>
		</tr>
		<tr>
			<td>E-beam Lithography System</td>
			<td>Raith Gmbh</td>
			<td>Raith 150</td>
			<td>&nbsp;</td>
		</tr>
		<tr>
			<td>Reactive Ion Etching System</td>
			<td>Proprietary In-house Designed</td>
			<td>--</td>
			<td>&nbsp;</td>
		</tr>
		<tr>
			<td>UV Mask Aligner</td>
			<td>Karl Suss</td>
			<td>MJB-3</td>
			<td>&nbsp;</td>
		</tr>
		<tr>
			<td>ASE source</td>
			<td>Amonics</td>
			<td>ALS-CL-15-B-FA</td>
			<td>CAUTION: invisible IR radiation.</td>
		</tr>
		<tr>
			<td>Single mode fibers</td>
			<td>Thorlabs</td>
			<td>P1-SMF28E-FC-2</td>
			<td>&nbsp;</td>
		</tr>
		<tr>
			<td>3 dB fiber splitters</td>
			<td>Thorlabs</td>
			<td>C-WD-AL-50-H-2210-35-FC/FC</td>
			<td>&nbsp;</td>
		</tr>
		<tr>
			<td>Aspheric lenses</td>
			<td>New Focus</td>
			<td>5720-C</td>
			<td>&nbsp;</td>
		</tr>
		<tr>
			<td>XYZ stages</td>
			<td>Melles Griot</td>
			<td>17AMB003/MD</td>
			<td>&nbsp;</td>
		</tr>
		<tr>
			<td>Polarizing beamsplitter cube</td>
			<td>Thorlabs</td>
			<td>PBS104</td>
			<td>&nbsp;</td>
		</tr>
		<tr>
			<td>IR detector</td>
			<td>New Focus</td>
			<td>2033</td>
			<td>&nbsp;</td>
		</tr>
		<tr>
			<td>100&times; Objective</td>
			<td>Nikon</td>
			<td>BD Plan 100x</td>
			<td>&nbsp;</td>
		</tr>
		<tr>
			<td>Oscilloscope</td>
			<td>Tektronix</td>
			<td>TDS1001B</td>
			<td>&nbsp;</td>
		</tr>
		<tr>
			<td>Optical Spectrum Analyzer</td>
			<td>Advantest</td>
			<td>Q8384</td>
			<td>&nbsp;</td>
		</tr>
		<tr>
			<td>IR sensor card</td>
			<td>Newport</td>
			<td>F-IRC2</td>
			<td>&nbsp;</td>
		</tr>
		<tr>
			<td>TLS source</td>
			<td>Agilent</td>
			<td>81940A</td>
			<td>CAUTION: invisible IR radiation.</td>
		</tr>
		<tr>
			<td>IR Camera</td>
			<td>Electrophysics</td>
			<td>7290A</td>
			<td>&nbsp;</td>
		</tr>
		<tr>
			<td>IR Detector</td>
			<td>New Focus</td>
			<td>2153</td>
			<td>&nbsp;</td>
		</tr>
		<tr>
			<td>Digital Multimeter</td>
			<td>Agilent</td>
			<td>34401A</td>
			<td>&nbsp;</td>
		</tr>
		<tr>
			<td>Illumination</td>
			<td>Stocker Yale</td>
			<td>Lite Mite</td>
			<td>&nbsp;</td>
		</tr>
		<tr>
			<td>Monochromator</td>
			<td>Spectral Products</td>
			<td>DK480</td>
			<td>&nbsp;</td>
		</tr>
		<tr>
			<td>Array Detector</td>
			<td>Andor</td>
			<td>DU490A-1.7</td>
			<td>&nbsp;</td>
		</tr>
		<tr>
			<td>GIF Fiber</td>
			<td>Thorlabs</td>
			<td>31L02</td>
			<td>&nbsp;</td>
		</tr>
	</tbody>
</table>

fabrication and characterization of photonic crystal slow light waveguides and cavities

Langsames Licht ist eines der heißen Themen in der Photonik-Gemeinde in den vergangenen zehn Jahren erzeugt großes Interesse sowohl aus fundamentaler Sicht und für sein hohes Potenzial für praktische Anwendungen. Langsames Licht photonischen Kristall-Wellenleiter, insbesondere, haben eine große Rolle gespielt und wurden erfolgreich für die Verzögerung optische Signale 1-4 beschäftigt und die Verbesserung der beiden linearen 5-7 und nichtlineare Geräte. 8-11 Photonischen Kristall Hohlräume zu erreichen ähnliche Effekte, dass von langsamen Lichtwellenleiter, sondern über einen reduzierten Bandbreite. Diese Hohlräume bieten hohe Q-factor/volume Verhältnis zur Realisierung optisch und elektrisch 12 13 gepumpt ultraniedrigem Schwellenwert Laser und die Verbesserung der nichtlineare Effekte. 14-16 Weiteren passive Filter 17 und Modulatoren 18 bis 19 Es wurde gezeigt, ausstellenden ultra-schmale Linienbreite, hohe freie spektrale rOrange und Rekordwerte des geringen Energieverbrauch. Um diese spannende Ergebnisse zu erreichen, muss ein robustes wiederholbare Herstellung Protokoll entwickelt werden. In diesem Papier nehmen wir eine gründliche Blick auf unsere Fertigung Protokoll, das Elektronenstrahl-Lithographie verwendet für die Definition von photonischen Kristall Muster und nutzt nassen und trockenen Ätzverfahren. Unsere optimierte Fertigung Rezept Ergebnisse in photonischen Kristallen, die nicht von der Vertikalen leiden Asymmetrie und weisen eine sehr gute Kanten-Wandrauhigkeit. Wir diskutieren die Ergebnisse der Variation der Ätzparameter und die schädlichen Wirkungen, die sie auf einer Vorrichtung haben kann, was zu einem diagnostischen Route, die ergriffen werden, um zu identifizieren und zu eliminieren ähnliche Probleme werden kann. Der Schlüssel zur Auswertung langsam Lichtwellenleiter ist die passive Charakterisierung der Übertragung und Warengruppenverzeichnisses Spektren. Verschiedene Verfahren sind berichtet worden, vor allem die Lösung der Fabry-Perot-Fransen des Transmissionsspektrums eine 20-21d interferometrischen Techniken. 22-25 Hier beschreiben wir einen direkten, Breitband-Messtechnik kombiniert spektrale Interferometrie mit Fourier-Transform-Analyse. 26 Unsere Methode zeichnet sich durch seine Einfachheit und Leistungsfähigkeit, wie wir einen nackten photonischen Kristalls mit Zugang Wellenleiter zu charakterisieren, ohne Notwendigkeit für On-Chip Interferenzkomponenten und des Setup nur aus einem Mach-Zehnder-Interferometer, ohne dass bewegliche Teile und Verzögerung Scans. Wenn kennzeichnenden Photonenkristall Hohlräumen, Verfahren, bei denen 21 oder internen Quellen externen Wellenleiter direkt an den Hohlraum 27 Einfluss auf die Leistungsfähigkeit des Hohlraums selbst gekoppelt ist, wodurch die Messung verfälschen. Hier beschreiben wir eine neue und nicht-intrusive Technik, die Verwendung einer kreuzpolarisierten Sondenstrahls macht und als Resonanzstreuung (RS), wobei die Sonde aus der Ebene heraus in den Hohlraum durch ein Objektiv gekoppelt ist bekannt. Die Technik wurde erstmals Demonstrationted durch McCutcheon et al. 28 und weiter durch Galli et al. 29

Fabricated samples
Figure 1 shows a scanning electron microscope (SEM) image of an exposed and developed pattern in electron beam resist - it is evident from the "clean" edge between the resist and the silicon substrate that complete exposure/development has been accomplished. Exposure of dose test patterns, consisting of simple repeated shapes (in our case 50 &times; 50 &mu;m squares), each with a differing base dose, are used to determine the correct dose factor and developmen...

Watch this Scientific Journal Video about Fabrication And Characterization Of Photonic Crystal Slow Light Waveguides And Cavities at JoVE.com

Fabrication And Characterization Of Photonic Crystal Slow Light Waveguides And Cavities

Verwendung von photonischen Kristall langsam Lichtwellenleiter und Hohlräume wurde weithin von der Photonik-Community in vielen unterschiedlichen Anwendungen eingesetzt. Deshalb Herstellung und Charakterisierung dieser Geräte sind von großem Interesse. Dieses Papier umreißt unsere Herstellungstechnik und zwei optische Charakterisierungsmethoden, nämlich: interferometrischen (Wellenleiter) und Resonanzstreuung (Hohlräume).

Herstellung und Charakterisierung von Photonic Crystal Langsam Lichtwellenleitern und Hohlräume

Slow light has been one of the hot topics in the photonics community in the past decade, generating great interest both from a fundamental point of view ...

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Simulation, Fabrication and Characterization of THz Metamaterial Absorbers

Simulation, Herstellung und Charakterisierung von THz Metamaterial Absorber

Metamaterials (MM),  artificial materials engineered to have properties that may not be found in  nature, have been widely explored since the first ...

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