Name: fabrication of spatially confined complex oxides
Uploaded: 2013-07-01T13:00:00
Description: Watch this Scientific Journal Video about Fabrication of Spatially Confined Complex Oxides at JoVE.com

这方面的努力是完全支持由美国能源部基础能源科学，材料科学和工程处办公室。

1。样品生长制备<ol><li>清洁一个5毫米×5毫米×0.5毫米的单晶衬底具有带状漏切角度小于0.1度，如用丙酮，然后加入水，每次10分钟的超声波清洗器中的SrTiO 3或铝酸镧。 SrTiO 3的蚀刻基板，持续30秒的10％的氟化氢得到的TiO 2终止，并在水冲洗1分钟，然后在1100℃下退火10小时。清洗后，安装在基板上的加热器适用于超高真空条件。 </li><li>安装加热器到PLD真空室，打?...

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	<li>Ahn, C. H., Triscone, J. -. M., Mannhart, J. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Electric+field+effect+in+correlated+oxide+systems.">Electric field effect in correlated oxide systems.</a> Nature. 424, 1015-1018 (2003).</li><li>Basov, D. N., Averitt, R. D., Van der Marel, D., Dressel, M., Haule, K. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Electrodynamics+of+correlated+electron+materials.">Electrodynamics of correlated electron materials.</a> Reviews of Modern Physics. 83, 471-541 (2011).</li><li>Waser, R., Aono, M. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Nanoionics-based+resistive+switching+memories.">Nanoionics-based resistive switching memories.</a> Nat. 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C. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=.">.</a> Reflection High Energy Electron Diffraction. , (2004).</li><li>Guo, H., Sun, D., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Growth+diagram+of+La0.7Sr0.3MnO3+thin+films+using+pulsed+laser+deposition.">Growth diagram of La0.7Sr0.3MnO3 thin films using pulsed laser deposition.</a> arXiv. , 1210.5989 (2012).</li><li>Ward, T. Z., Gai, Z., Guo, H. W., Yin, L. F., Shen, J. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Dynamics+of+a+first-order+electronic+phase+transition+in+manganites.">Dynamics of a first-order electronic phase transition in manganites.</a> Physical Review B. 83, 125125 (2011).</li><li>Ward, T. Z., Liang, S., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Reemergent+Metal-Insulator+Transitions+in+Manganites+Exposed+with+Spatial+Confinement.">Reemergent Metal-Insulator Transitions in Manganites Exposed with Spatial Confinement.</a> Physical Review Letters. 100, 247204 (2008).</li><li>Ward, T. Z., Zhang, X. G., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Time-Resolved+Electronic+Phase+Transitions+in+Manganites.">Time-Resolved Electronic Phase Transitions in Manganites.</a> Physical Review Letters. 102, 87201 (2009).</li><li>Zhai, H. -. Y., Ma, J. 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不同于单元素半导体材料，例如Si，复杂的材料制造，可以是更困难的，因为这样的事实，该配合物的结构和多个元素都必须予以考虑。光刻制造复合氧化物装置的使用是相对较低的成本和快速的原型，而不是其他坐月子技术。但也有一些重要的限制了解。光刻创造约1微米的结构具有空间限制，所以不适合于真正的纳米级器件的制造。同样重要的是，化学蚀刻过程中所产生的边缘粗糙度为50nm的顺...

在第一和最重要的步骤之一，实现高品质的设备是外延氧化物薄膜的生长。甲单晶衬底被用作“模板”的靶材料沉积。脉冲激光沉积（PLD）是在不同的沉积方法，以获得良好的品质薄膜4,5的最佳途径之一。成长的过程涉及到把衬底加热到​​800℃左右，在氧气环境中，并使用激光脉冲击中目标的材料和要沉积到衬底上产生的磁通。 图1中所示的典型的系统。 虽然没有图案的薄膜已被证明揭示异国情调的新的物理6，减少膜的尺寸提供了更多的机会去探索新的现象和设备制造。光刻法可以用来缩小在面内的样本维数的顺序为1μm。光刻工艺的详细协议在下面讨论。这种技术是最广泛使用的基板可以举行不同的应变状态的外延片的局限效应对调查兼容。 由于许多复合氧化物具有有趣的特性在低温和/或高的磁场，电子的移动设备和测量设备之间的连接是非常重要的。可以形成高品质的接触，通过蒸发互惠在4 - 探头的几何形状和使用的引线接合器之间进行连接的焊盘和测量装置的接触垫。如果做得正确的话，这些连接可以轻松抵御极端的测量环境，在很宽的温度范围内的4 K到400 K和磁场范围可达±9 T.

<table border="1">
 <tbody>
 <tr>
 <td>&nbsp;</td>
 <td>&nbsp;</td>
 <td>&nbsp;</td>
 <td>Reagent/Material</td>
 </tr>
 <tr>
 <td>SrTiO3(001) &amp; LaAlO3(100) substrates</td>
 <td>CrysTec GmbH</td>
 <td>&nbsp;</td>
 <td>&nbsp;</td>
 </tr>
 <tr>
 <td>Microposit S1813 Photoresist</td>
 <td>Shipley</td>
 <td>&nbsp;</td>
 <td>&nbsp;</td>
 </tr>
 <tr>
 <td>CD-26 Developer</td>
 <td>Shipley</td>
 <td>38490</td>
 <td>&nbsp;</td>
 </tr>
 <tr>
 <td>GE varnish</td>
 <td>Lakeshore</td>
 <td>VGE-7031</td>
 <td>&nbsp;</td>
 </tr>
 <tr>
 <td>&nbsp;</td>
 <td>&nbsp;</td>
 <td>&nbsp;</td>
 <td>Equipment</td>
 </tr>
 <tr>
 <td>Reflected High Energy Electron Diffraction (RHEED)</td>
 <td>Staib Instruments</td>
 <td>&nbsp;</td>
 <td>35 kV TorrRHEED</td>
 </tr>
 <tr>
 <td>Mask Aligner</td>
 <td>ABM</td>
 <td>Model 85-3 (350 W) Lightsource</td>
 <td>&nbsp;</td>
 </tr>
 <tr>
 <td>Resistivity Puck</td>
 <td>Quantum Design</td>
 <td>P102</td>
 <td>&nbsp;</td>
 </tr>
 <tr>
 <td>Wire Bonder</td>
 <td>Kulicke &amp; Soffa</td>
 <td>04524-0XDA-000-00</td>
 <td>&nbsp;</td>
 </tr>
 </tbody>
</table>

fabrication of spatially confined complex oxides

复杂材料，如高温超导，多铁，和巨大的磁阻驻留在固有的强电子关联产生的电子和磁性性能。这些材料也具有很大的不同的电阻和磁的行为在哪个区域可以共存于一个单一的非晶合金材料的电子相分离。通过减少规模这些材料固有的大小的电子域及以下的长度尺度，新颖的行为可以被暴露。因为这和理解的基本物理驱动复杂的行为的事实，每个自旋电荷格子轨道有序参数涉及相关长度，空间减少这些材料的输运测量是关键的一步。这些材料也提供了很大的潜力成为下一代电子设备1-3。因此，在制造低维纳米或微细结构是非常重要的，以实现新的功能。这涉及到多个可控的高品质薄膜生长过程精确的电子性能表征。在这里，我们提出了高品质的微结构复杂的氧化锰酸装置的制造协议。详细的描述和薄膜生长的所需设备，光刻法，引线接合。

本文的重点主要是样品制备光刻和焊线方面。薄膜生长过程的更多细节，可以发现在我们最近的其他出版物8。 光刻法是一个重要的控制维度在调查电子相关长度和电子相分离9-13为目的的复合氧化物的方法， 图2示出了在这个过程中的部分步骤的光学图像。有必要指出的是，在所有这些步骤中，显影，蚀刻时间的精确控制是最关键的成功制造设备?...

Watch this Scientific Journal Video about Fabrication of Spatially Confined Complex Oxides at JoVE.com

Fabrication of Spatially Confined Complex Oxides

我们描述了使用脉冲激光沉积（PLD），光刻法和引线接合技术来创建微米尺度的复合氧化物的设备。利用PLD生长外延薄膜。光刻和引线键合技术被引入到创建实用的设备测量目的。

空间密闭的复合氧化物制备

Complex materials such as high Tc superconductors, multiferroics, and colossal magnetoresistors have electronic and magnetic properties that arise from ...

Research

JoVE Journal

Engineering

Measuring Spatially- and Directionally-varying Light Scattering from Biological Material

从生物材料空间定向变化的光散射测量

Light interacts with an organism's integument on a variety of spatial scales. For example in an iridescent bird: nano-scale structures produce color; the ...

科研

工程学

Fabrication of Nano-engineered Transparent Conducting Oxides by Pulsed Laser Deposition

制备纳米设计的脉冲激光沉积透明导电氧化物

Nanosecond Pulsed  Laser Deposition (PLD) in the presence of a background gas allows the deposition  of metal oxides with tunable morphology, structure, ...

Experimental Measurement of Settling Velocity of Spherical Particles in Unconfined and Confined Surfactant-based Shear Thinning Viscoelastic Fluids

无约束和封闭表面活性剂中球形粒子沉降速度的实验测量 剪切变薄粘性流体

An experimental study is performed to measure the terminal settling velocities of spherical particles in surfactant based shear thinning viscoelastic ...

Fabrication and Testing of Microfluidic Optomechanical Oscillators

制造和微流控光机振荡器测试

Cavity optomechanics experiments that parametrically couple the phonon modes and photon modes have been investigated in various optical systems including ...

Atomically Traceable Nanostructure Fabrication

原子纳米结构可追溯制造

Reducing the scale of etched nanostructures below the 10 nm range eventually will require an atomic scale understanding of the entire fabrication process ...

Fabrication and Characterization of Superconducting Resonators

制备与表征超导谐振器的

Superconducting microwave resonators are of interest for a wide range of applications, including for their use as microwave kinetic inductance detectors ...

Simultaneous Multi-surface Anodizations and Stair-like Reverse Biases Detachment of Anodic Aluminum Oxides in Sulfuric and Oxalic Acid Electrolyte

阳极氧化铝在硫酸和草酸电解质中的同时多表面 Anodizations 和阶梯式反向偏置剥离

After reporting on the two-step anodization, nanoporous anodic aluminum oxides (AAOs) have been widely utilized in the versatile fields of fundamental ...

Fabrication of Superhydrophobic Metal Surfaces for Anti-Icing Applications

防结冰用超疏水性金属表面的制备

Several ways to produce superhydrophobic metal surfaces are presented in this work. Aluminum was chosen as the metal substrate due to its wide use in ...

Bulk and Thin Film Synthesis of Compositionally Variant Entropy-stabilized Oxides

组分变熵稳定氧化物的体积和薄膜合成

Here, we present a procedure for the synthesis of bulk and thin film multicomponent (Mg0.25(1-x)CoxNi0.25(1-x)Cu0.25(1-x)Zn0.25(1-x))O (Co variant) and ...