Name: nanofabrication of gate-defined gaas/algaas lateral quantum dots
Uploaded: 2013-11-01T19:15:00
Description: Watch this Scientific Journal Video about Nanofabrication of Gate-defined GaAs/AlGaAs Lateral Quantum Dots at JoVE.com

作者感谢Michael Lacerte的技术支持。 MP-L。承认加拿大研究所高级研究（CIFAR），自然科学和工程研究理事会（NSERC），加拿大的加拿大创新基金会（CFI）全宗de魁北克RECHERCHE - 的性质等技术（FRQNT）的财政支持。这里介绍的设备制造在的CRN2和IMDQ设施，部分资金由NanoQuébec。砷化镓/砷化铝镓基板制造ZR瓦希勒夫斯基在加拿大国家研究理事会微结构科学研究所。 JCL和CB-O。提供财政支持的承认CRSNG FRQNT。

下面描述的制造工序上的砷化镓/砷化铝镓基板的尺寸为1.04 x 1.04厘米。 20个相同的器件制作在衬底上的这个大小。在洁净室中完成所有步骤的过程，并在任何时候都必须使用适当的防护装备。在整个过程中使用去离子水，但被简称为“水”在下面的协议。 1。蚀刻梅萨 该制造步骤的结果， 如图4a所示。 <ol><li>与O 2等离子体等?...

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上述过程描述一个量子点能够达到几个电子政权的制造协议。然而，给定的参数可能会有所不同，这取决于所使用的设备的型号和校准。因此，剂量暴露于电子束光刻步骤的参数，如将前进行校准的设备的制造。定义其他类型的底物，诸如Si / SiGe的，也提出了2DEG的量子点的方法，可以很容易地适应制造栅极。 对于某些类型的设备，如垂直量子点，该点的源极和漏极的隧道势?...

量子信息科学已经引起了很多的关注，自从它表明，量子算法可以用来解决某些问题成倍的速度比最知名的经典算法1。量子位（量子比特）的一个明显的候选是自旋单电子局限在量子点，因为它是一个两级系统。已经提出了大量的硬件架构的量子点，其中包括半导体纳米线，碳纳米管3，自组装量子点4，半导体的垂直和横向的量子点6为实施。门定义的横向量子点砷化镓/砷化铝镓异质一直非常成功，因为它的多功能性，他们的制造过程是本文的重点。 在横向量子点中的电子约束于样品表面垂直的方向（z方向 ），我小号通过选择适当的基板来实现。该GaAs / AlGaAs多调制掺杂异质结构提出的AlGaAs和GaAs层之间的界面局限于一个二维电子气（2DEG）。这些样品获得低杂质密度调制掺杂技术，结合分子束外延生长，导致2DEG高电子迁移率。的不同层的异质结构，以及它的能带结构的示意图示于图1。高的电子迁移率，需要在二维电子气，以确保在整个表面上的量子点的电子状态的连贯性。为下面描述的制造过程中所用的基材购自加拿大国家研究委员会提出的电子密度为2.2×10 11 cm -2的和电子迁移率为1.69×10 6厘米2 / VSEC。 约束中的电子的方向PARALLEL于样品表面放置在衬底的表面上的金属电极来实现。当这些电极沉积在GaAs样品的表面上，形成肖特基势垒。负电压施加到这些电极导致2DEG仅低于该电子有足够的能量可以穿过的地方障碍。二维电子气的耗损发生时施加的电压足够为负，没有电子有足够的能量，跨越屏障。因此，通过仔细选择电极的几何形状，它是能够捕获样品之间的耗尽区域的一个小数目的电子。上的点和点之间的隧道的能量和样品的其余部分中的二维电子气的电子的数量的控制，可以实现通过微调在电极上的电压。 图2中所示的栅电极和贫电子气的示意图。门结构的设计形成点尖塔巴特尔等人所使用的设计。 为了控制和读出点的电子的数目有关，它是有用的诱导和测量电流通过点。利用量子点接触（QPC），这也需要通过2DEG电流读数也可以做。 2DEG和电压源之间的接触确保了欧姆接触。这些金属焊盘扩散，从样品表面的所有的方式下降到使用一个标准的快速热退火过程7的二维电子气（参见图3a和图4b）。源极和漏极之间的，以避免短路，样品的表面进行蚀刻，因此，二维电子气耗尽后，在某些地区和电流被迫穿越某些特定的信道（参见图3b和图4a）。二维电子气的区域中仍然被称作“台面”。栅极定义的横向量子点上的砷化镓/砷化铝镓基板的整个制造过程中的下面的协议的细节。的方法，是可伸缩的，因为它仍然是一样的，不管正在制造的，如果该设备是单，双或三量子点或量子点的数组。使用这种方法制造的双量子点操纵，测量，结果在进一步的章节讨论。

<table border="1">
		<tbody>
 <tr>
 <td>Name of the reagent/material</td>
 <td>Company</td>
 <td>Product number</td>
 <td>CAS number</td>
 </tr>
 <tr>
 <td>Acetone - CH3COCH3</td>
 <td>Anachemia</td>
 <td>AC-0150</td>
 <td>67-64-1</td>
 </tr>
 <tr>
 <td>Isopropyl Alcohol (IPA) - (CH3)2CHOH</td>
 <td>Anachemia</td>
 <td>AC-7830</td>
 <td>67-63-0</td>
 </tr>
 <tr>
 <td>1165 Remover</td>
 <td>MicroChem Corp</td>
 <td>G050200</td>
 <td>872-50-4</td>
 </tr>
 <tr>
 <td>Microposit MF-319 Developer</td>
 <td>Shipley</td>
 <td>38460</td>
 <td>75-59-2</td>
 </tr>
 <tr>
 <td>Sulfuric Acid - H2SO4</td>
 <td>Anachemia</td>
 <td>AC-8750</td>
 <td>766-93-9</td>
 </tr>
 <tr>
 <td>Hydrogen Peroxide (30%) - H2O2</td>
 <td>Fisher Scientific</td>
 <td></td>
 <td>7722-84-1</td>
 </tr>
 <tr>
 <td>LOR 5A Lift-off resist</td>
 <td>MicroChem Corp</td>
 <td>G516608</td>
 <td>120-92-3</td>
 </tr>
 <tr>
 <td>Microposit S1813 Photo Resist</td>
 <td>Shipley</td>
 <td>41280</td>
 <td>108-65-6</td>
 </tr>
 <tr>
 <td>Microposit S1818 Photo Resist</td>
 <td>Shipley</td>
 <td>41340</td>
 <td>108-65-6</td>
 </tr>
 <tr>
 <td>PMMA LMW 4% in anisole</td>
 <td>MicroChem Corp</td>
 <td></td>
 <td>100-66-3, 9011-14-7</td>
 </tr>
 <tr>
 <td>PMMA HMW 2% in anisole</td>
 <td>MicroChem Corp</td>
 <td></td>
 <td>100-66-3, 9011-14-7</td>
 </tr>
 <tr>
 <td >GaAs/AlGaAs wafer</td>
 <td>National Research Council Canada</td>
 <td>See detailed layer structure in Figure 1.</td>
 <td></td>
 </tr>
 <tr>
 <td>Ni (99.0%)</td>
 <td>Anachemia</td>
 <td></td>
 <td></td>
 </tr>
 <tr>
 <td>Ge (99.999%)</td>
 <td>CERAC inc. </td>
 <td></td>
 <td></td>
 </tr>
 <tr>
 <td>Au (99.999%)</td>
 <td>Kamis inc. </td>
 <td></td>
 <td></td>
 </tr>
 <tr>
 <td>Ti (99.995%)</td>
 <td>Kurt J Lesker</td>
 <td></td>
 <td></td>
 </tr>
 <tr>
 <td>Al</td>
 <td>Kamis inc.</td>
 <td></td>
 <td></td>
 </tr>
 <tr>
 <td>Silver Epoxy</td>
 <td>Epoxy Technology</td>
 <td>H20E</td>
 <td></td>
 </tr>
	 </tbody>
 </table>

nanofabrication of gate-defined gaas/algaas lateral quantum dots

量子计算机是利用量子效应，如叠加态和纠缠，解决某些问题上最知名的算法成倍的速度比传统计算机的量子位（量子比特）组成的计算机。门定义的横向的GaAs / AlGaAs多量子点是探索实施一个量子比特的众多途径之一。当正确制​​造，这样的设备是能够捕获目标的空间区域中的一个小的电子数。这些电子的自旋态，然后，可以用来实现量子比特的逻辑0和1。鉴于这些量子点的纳米尺度，洁净室设施，提供专门的设备，如扫描电子显微镜和电子束蒸发器需要为他们制造。在整个制造过程中必须小心，夏日的样品表面，以保持清洁，以避免损坏的结构脆弱的栅极。本文栅极定义从晶片的横向量子点的详细的制造协议的工作装置。表征方法和代表性的结果还简要讨论。虽然本文集中在双量子点，单次或三次点，甚至量子点阵列的制作过程中保持不变。此外，该协议可以适应其它底材，诸如Si / SiGe半导体制造横向的量子点。

在上述处理中的关键步骤之一是在台面蚀刻（步骤1）。这是重要的，同时避免过刻蚀，刻蚀到足以去除的2DEG如下。因此，建议使用GaAs体材料样品模型测试前的蚀刻液进行蚀刻的砷化镓/砷化铝镓样品。的砷化镓/砷化铝镓异质结构的刻蚀速率比GaAs的大，但虚拟对象的蚀刻可以给出指示是否比平常更多或更少的反应溶液和实际样品的蚀刻时间可作相应调整。 一旦设备已被制造?...

Watch this Scientific Journal Video about Nanofabrication of Gate-defined GaAs/AlGaAs Lateral Quantum Dots at JoVE.com

Nanofabrication of Gate-defined GaAs/AlGaAs Lateral Quantum Dots

本文提出了一个详细的制作门定义的半导体横向量子点砷化镓异质协议。这些纳米器件被用来捕获一些电子作为量子比特的量子信息处理或其他细观实验，如相干电导测量使用。

纳米加工门定义的GaAs / AlGaAs多量子点横向

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Research

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Compact Quantum Dots for Single-molecule Imaging

紧凑型量子点的单分子成像

Single-molecule imaging is an important tool for  understanding the mechanisms of biomolecular function and for visualizing the  spatial and temporal ...

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Gradient Echo Quantum Memory in Warm Atomic Vapor

梯度回波量子存储在温暖的原子蒸气

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Since their development in the late 1980s, cheap, reliable external cavity diode lasers (ECDLs) have replaced complex and expensive traditional dye and ...

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Selective Area Modification of Silicon Surface Wettability by Pulsed UV Laser Irradiation in Liquid Environment

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Measurement of Quantum Interference in a Silicon Ring Resonator Photon Source

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Silicon photonic chips have the potential to realize complex integrated quantum information processing circuits, including photon sources, qubit ...

Resonance Fluorescence of an InGaAs Quantum Dot in a Planar Cavity Using Orthogonal Excitation and Detection

用正交激励和检测方法研究平面腔内铟量子点的共振荧光

The ability to perform simultaneous resonant excitation and fluorescence detection is important for quantum optical measurements of quantum dots (QDs). ...

Fabrication of Flexible Image Sensor Based on Lateral NIPIN Phototransistors

基于侧向 NIPIN Phototransistors 的柔性图像传感器的研制

Flexible photodetectors have been intensely studied for the use of curved image sensors, which are a crucial component in bio-inspired imaging systems, ...