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DOI :
10.3791/50676-v
July 30th, 2013
Chapters
0:05
Title
1:57
Microscope Setup, Preparation, and Mounting of the High Electron Mobility Transistor Circuit
6:37
Capacitance Mode Measurements
8:05
Results: Scanning Charge Accumulation and Capacitance-voltage Spectroscopy of Doped Semiconductors
10:17
Conclusion
走査プローブ単電子容量分光法は、ローカライズされた地下の地域での単一電子の運動の研究を促進する。敏感な電荷検出回路は、半導体試料の表面の下にドーパント原子の小規模システムを調査するために極低温走査型プローブ顕微鏡に組み込まれる。
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