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DOI :
10.3791/51974-v
August 1st, 2014
Chapters
0:05
Title
2:02
Prepare Retrievable Donor Substrate
4:04
Printing and Bonding Process
6:09
Results: Microscale Structures and Devices Assembled by Micro-masonry
7:48
Conclusion
本論文では、微小電気機械システム(MEMS)の構造及び装置の柔軟な製造のための3D加法micromanufacturing戦略(と呼ばれる「マイクロ石造 ')を導入しています。このアプローチは、急速熱アニール·イネーブル材接合技術と組み合わせてミクロ/ナノスケール材料の転写印刷ベースの組立体を含む。
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