Name: patterning via optical saturable transitions - fabrication and characterization
Uploaded: 2014-12-11T14:00:00
Description: Watch this Scientific Journal Video about Patterning via Optical Saturable Transitions - Fabrication and Characterization at JoVE.com

Thanks to Michael Knutson, Paul Hamric, Greg Scott, and Chris Landes for helpful discussions and assistance related to the custom inert atmosphere sample holder and assistance in the University of Utah student machine shop. P.C. acknowledges the NSF GRFP under Grant No. 0750758. P.C. acknowledges the University of Utah Nanotechnology Training Fellowship. R.M. acknowledges a NSF CAREER Award No. 1054899 and funding from the USTAR Initiative.

הערה: לבצע את כל השלבים תחת כיתת חדר נקי 100 תנאים טובים יותר או הבאים. הכנת 1. לדוגמא <ol style=";text-align:right;direction:rtl"><li style=";text-align:right;direction:rtl"> נקה רקיק 2 קוטר &quot;סיליקון עם נאגר תחמוצת Etch פתרון (BOE) (6 חלקים 40% 4 F NH וHF 49% חלק 1) למשך 2 דקות (זהירות: כ...

<ol>
	<li>Brimhall, N., Andrew, T. L., Manthena, R. V., Menon, R. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Breaking+the+far-field+diffraction+limit+in+optical+nanopatterning+via+repeated+photochemical+and+electrochemical+transitions+in+photochromic+molecules.">Breaking the far-field diffraction limit in optical nanopatterning via repeated photochemical and electrochemical transitions in photochromic molecules.</a> Physical Review Letters. 107 (20), 205501 (2011).</li><li>Cantu, P., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Subwavelength+nanopatterning+of+photochromic+diaryethene+films.">Subwavelength nanopatterning of photochromic diaryethene films.</a> Applied Physics Letters. 100 (18), 183103 (2012).</li><li>Cantu, P., Andrew, T. L., Menon, R. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Nanopatterning+of+diarylethene+films+via+selective+dissolution+of+one+photoisomer.">Nanopatterning of diarylethene films via selective dissolution of one photoisomer.</a> Applied Physics Letters. 103 (17), 173112 (2013).</li><li>Abbe, E. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Beitr&#228;ge+zur+Theorie+des+Mikroskops+und+der+mikroskopischen+Wahrnehmung.">Beitr&#228;ge zur Theorie des Mikroskops und der mikroskopischen Wahrnehmung.</a> Archiv f&#252;r mikroskopische Anatomie. 9 (1), 413-418 (1873).</li><li>Li, L., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Achieving+&#955;/20+resolution+by+one-color+initiation+and+deactivation+of+polymerization.">Achieving &#955;/20 resolution by one-color initiation and deactivation of polymerization.</a> Science. 324 (5929), 910-913 (2009).</li><li>Fischer, J., von Freymann, G., Wegener, M. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=The+materials+challenge+in+diffraction-unlimited+direct-laser-writing+optical+lithography.">The materials challenge in diffraction-unlimited direct-laser-writing optical lithography.</a> Advanced Materials. 22 (32), 3578-3582 (2010).</li><li>Mirkin, C. A., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Beam+pen+lithography.">Beam pen lithography.</a> Nature Nanotechnology. 5, 637-640 (2010).</li><li>Xie, X., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Manipulating+spatial+light+fields+for+micro-+and+nano-photonics.">Manipulating spatial light fields for micro- and nano-photonics.</a> Physica E: Low-dimensional Systems and Nanostructures. 44, 1109-1126 (2012).</li><li>Leroy, J., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=High-speed+metal-insulator+transition+in+vanadium+dioxide+films+induced+by+an+electrical+pulsed+voltage+over+nano-gap+electrodes.">High-speed metal-insulator transition in vanadium dioxide films induced by an electrical pulsed voltage over nano-gap electrodes.</a> Applied Physics Letters. 100 (21), 213507 (2012).</li><li>Carr, D., Sekaric, L., Craighead, H. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Measurement+of+nanomechanical+resonant+structures+in+single-crystal+silicon.">Measurement of nanomechanical resonant structures in single-crystal silicon.</a> Journal of Vacuum Science &amp; Technology B. 16 (6), 3821-3824 (1998).</li><li>Wilhelmi, O., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Rapid+prototyping+of+nanostructured+materials+with+a+focused+ion+beam.">Rapid prototyping of nanostructured materials with a focused ion beam.</a> Japanese Journal of Applied Physics. 47 (6), 2010-5014 (2008).</li><li>Hell, S. W. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Far-field+optical+nanoscopy.">Far-field optical nanoscopy.</a> Science. 316 (5828), 1153-1158 (2007).</li><li>Chou, S. Y., Krauss, P. R., Renstrom, P. J. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Nanoimprint+lithography.">Nanoimprint lithography.</a> Journal of Vacuum Science &amp; Technology B. 14, 4129 (1996).</li><li>Guillemette, M. D., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Surface+topography+induces+3D+self-orientation+of+cells+and+extracellular+matrix+resulting+in+improved+tissue+function.">Surface topography induces 3D self-orientation of cells and extracellular matrix resulting in improved tissue function.</a> Integrative Biology. 1 (2), 196-204 (2009).</li></ol>

The fabrication, experimental setup and related operational procedures of Patterning via Optical Saturable Transitions (POST) have been described. By exploiting the linear switching properties of thermally stable photochromic molecules, POST offers new perspectives on circumventing the far-field diffraction limit.1-2,4
Previously long-term storage requirement of the samples was solved by storing the samples under N2, directly after the initial evaporation.2 How...

ליתוגרפיה אופטית היא בעל חשיבות מרכזית בייצור של מבנים ננומטריים והתקנים. יש התקדמות מוגברת בטכניקות ליתוגרפיה רומן היכולת לאפשר דורות חדשים של מכשירי רומן. 8-11 במאמר זה, סקירה מוצגת בכיתה של טכניקות ליתוגרפי אופטיות כי להשיג רזולוציה תת-גל עמוק באמצעות מולקולות photoswitchable רומן. גישה זו נקראת דפוסים באמצעות אופטי-Saturable מעברים (POST). 1-3 POST הוא שיטה חדשנית nanofabrication שמשלבת באופן ייחודי את הרעיונות של להרוות מעברים אופטיים של מולקולות Photochromic, במיוחד (1,2-bis (5,5&#39;-דימתיל-2,2&#39;-bithiophen-י.ל.)) perfluorocyclopent-1-ENE. בפיהם, תרכובת זו נקראת BTE, איור 1, כגון אלו המשמשים במיקרוסקופ פליטה המאולץ-דלדול (STED) 12, עם יתוגרפיה הפרעות, שהופך אותו לכלי רב עוצמה לlargnanopatterning דואר האזור המקביל של תכונות subwavelength עמוקות על מגוון משטחים עם סיומת פוטנציאל 2 ו 3-ממדים. שכבת Photochromic היא מדינת מקור בהומוגנית אחת. כאשר שכבה זו נחשפה לתאורה אחידה של λ 1, זה הופך למדינה השנייה isomeric (ג 1), איור 2. ואז המדגם חשוף לצומת ממוקדת בλ 2, אשר ממיר את המדגם לתוך מדינת isomeric הראשונה ( 1o) בכל מקום מלבד בסביבה הקרובה לצומת. על ידי שליטה על מינון החשיפה, גודל האזור לא מומר יכול להיעשות באופן שרירותי קטן. הצעד הבא של תיקון אחד של איזומרים ניתן להמרה באופן סלקטיבי ובלתי הפיך (נעול) למצב 3 rd (בשחור) כדי לנעול את התבנית. בשלב הבא, השכבה חשופה באופן אחיד לλ 1, אשר ממיר כל דבר פרט לאזור הנעול חזרה למצב המקורי.רצף של צעדים ניתן לחזור עם תזוזה של המדגם ביחס לאופטיקה, וכתוצאה מכך שני אזורים נעולים ריווחה קטן מגבול השתברות השדה הרחוק. לכן, כל גיאומטריה שרירותית ניתן בדוגמת באופנה &quot;סיכות&quot;. 1-3

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	<tbody>
		<tr height="42">
			<td height="42" style="height:42px;width:216px;">Name of Material/ Equipment</td>
			<td style="width:205px;">Company</td>
			<td style="width:119px;">Catalog Number</td>
			<td style="width:239px;">Comments/Description</td>
		</tr>
		<tr height="63">
			<td height="63" style="height:63px;width:216px;">Isopropanol</td>
			<td style="width:205px;">Fisher Scientific</td>
			<td style="width:119px;">P/7500/15</td>
			<td style="width:239px;">CAUTION: flammable, use good 
			ventilation and avoid all ignition 
			sources.</td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:216px;">Buffered Oxide Etch</td>
			<td style="width:205px;"></td>
			<td style="width:119px;"></td>
			<td></td>
		</tr>
		<tr height="63">
			<td height="63" style="height:63px;width:216px;">Methanol</td>
			<td style="width:205px;">Ricca Chemical</td>
			<td style="width:119px;">48-293-2&#160;</td>
			<td style="width:239px;">CAUTION: flammable, use good 
			ventilation and avoid all ignition 
			sources.</td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:216px;">Ethylene Glycol</td>
			<td style="width:205px;">Sigma-Aldrich</td>
			<td style="width:119px;">324558</td>
			<td>CAUTION: Harmful if swallowed</td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:216px;">Silicon wafer</td>
			<td style="width:205px;"></td>
			<td style="width:119px;"></td>
			<td></td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:216px;">Diamond Scribe</td>
			<td style="width:205px;"></td>
			<td style="width:119px;"></td>
			<td></td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:216px;">Glass Beakers</td>
			<td style="width:205px;"></td>
			<td style="width:119px;"></td>
			<td></td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:216px;">Tweezers</td>
			<td style="width:205px;">Ted Pella</td>
			<td style="width:119px;">5226</td>
			<td></td>
		</tr>
		<tr height="42">
			<td height="42" style="height:42px;width:216px;">Reactive Ion Etching System</td>
			<td style="width:205px;">Oxford</td>
			<td style="width:119px;">Plasma Lab 80 Plus</td>
			<td></td>
		</tr>
		<tr height="42">
			<td height="42" style="height:42px;width:216px;">Inert Atmosphere Sample Holder</td>
			<td style="width:205px;">Proprietary In-house Designed</td>
			<td style="width:119px;"></td>
			<td></td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:216px;">Polarizing beamsplitter cube</td>
			<td style="width:205px;">Thorlabs</td>
			<td style="width:119px;">PBS052</td>
			<td></td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:216px;">HeNe Laser</td>
			<td style="width:205px;">Melles Griot</td>
			<td style="width:119px;">25-LHP-171</td>
			<td>CAUTION: Wear safety glasses</td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:216px;">Half-wave plates</td>
			<td style="width:205px;">Thorlabs</td>
			<td style="width:119px;">WPH05M-633</td>
			<td></td>
		</tr>
		<tr height="42">
			<td height="42" style="height:42px;width:216px;">Thermal Evaporator</td>
			<td style="width:205px;">Proprietary In-house Designed</td>
			<td style="width:119px;"></td>
			<td></td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:216px;">TMV Super</td>
			<td style="width:205px;">TM Vacuum Products</td>
			<td style="width:119px;">TMV Super</td>
			<td></td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:216px;">Voltammograph</td>
			<td style="width:205px;">Bioanalytical Systems</td>
			<td style="width:119px;">CV-37</td>
			<td></td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:216px;">Shortwave UV lamp 365nm</td>
			<td style="width:205px;">UVP Analytik Jena Company</td>
			<td style="width:119px;">UVGL-25</td>
			<td>CAUTION: Wear UV safety glasses</td>
		</tr>
	</tbody>
</table>

patterning via optical saturable transitions - fabrication and characterization

This protocol describes the fabrication and characterization of nanostructures using a novel nanolithographic technique called Patterning via Optical Saturable Transitions (POST). In this technique the chemical properties of organic photochromic molecules that undergo single-photon reactions are exploited, enabling rapid top-down nanopatterning over large areas at low light intensities, thereby, allowing for the circumvention of the far-field diffraction barrier.4 Simple, cost-effective, high throughput and resolution alternatives to nanopatterning are being explored, such as, two-photon polymerization5,6, beam pen lithography (BPL)7, scanning electron beam lithography (SEBL), and focused ion beam (FIB) patterning. However, multi-photon approaches require high light intensities, which limit their potential for high throughput and offer low image contrast. Although, electron and ion beam lithographic processes offer increased resolution, the serial nature of the process is limited to slow writing speeds, which also prevents patterning of features over large areas. Beam-pen lithography is an approach towards parallel near-field optical lithography. However, the gap between the source of the beam and the surface of the photoresist needs to be controlled extremely precisely for good pattern uniformity and this is very challenging to accomplish for large arrays of beams. Patterning via Optical Saturable Transitions (POST) is an alternative optical nanopatterning technique for patterning sub-wavelength features1-3. Since this technique uses single photons instead of electrons, it is extremely fast and does not require high light intensities1-3, opening the door to massive parallelization.

דגימות מפוברקות: פעמים חמצון שונות אופיינו כפי שמודגמים על ידי micrographs הכוח האטומי באיור 3 במתח חמצון של 0.85 V נקבע מvoltammetry המחזורית. סרטי 50 ננומטר בעובי נחשפו לגל עומד בλ = 647 nm של nm 400 תקופה של 60 שניות בצפיפות הספק של...

Watch this Scientific Journal Video about Patterning via Optical Saturable Transitions - Fabrication and Characterization at JoVE.com

Patterning via Optical Saturable Transitions - Fabrication and Characterization

We report that the diffraction limit of conventional optical lithography can be overcome by exploiting the transitions of organic photochromic derivatives induced by their photoisomerization at low light intensities.1-3 This paper outlines our fabrication technique and two locking mechanisms, namely: dissolution of one photoisomer and electrochemical oxidation.

דפוסים באמצעות מעברי Saturable אופטיים - ייצור ואפיון

This protocol describes the fabrication and characterization of nanostructures using a novel nanolithographic technique called Patterning via Optical ...

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