Name: preparation of silicon nanowire field-effect transistor for chemical and biosensing applications
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This research was financially supported by Ministry of Science and Technology, Taiwan (104-2514-S-009 -001, 104-2627-M-009-001 and 102-2311-B-009-004-MY3). We thank the National Nano Device Laboratories (NDL) for its valuable assistance during device fabrication and analysis.

1. Herstellung und Konservierung von pSNWFET Devices <ol><li> Vorrichtung Fabrication Hinweis: Die pSNWFET wurde unter Verwendung eines Seitenwandabstandshalter Technik wie zuvor 23,24 berichtet. <ol><li> Bereiten Sie die Gate-Dielektrikum-Schicht. <ol><li> Kappe mit einer 100 nm dicken thermischen Oxid (SiO 2) Schicht auf einem Si - Substrat durch das Naßoxidationsprozeß 25 mit (O 2 und H 2 Prozessgas bei 980 ° C für 4 h). </li><li> Ab...

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Die Kommerzialisierung der Top-down und Bottom-up - Herstellungsansätze für sSNWFETs schwierig wegen der Kosten betrachtet 32,33, SNW Positionssteuerung 34,35 und seiner niedrigen Produktionsmaßstab 36. Im Gegensatz dazu ist pSNWFETs Herstellung einfach und kostengünstig 37. Durch den Top-Down - Ansatz und die Verbindung mit dem Seitenwandabstandshalter Bildungstechnik (Figur 1) kann die Größe des SNW durch Einstellen der Dauer des reaktiven Plasmaätzen...

Silizium-Nanodraht-Feldeffekttransistoren (SNWFETs) haben die Vorteile der extrem hohe Empfindlichkeit und eine direkte elektrische Reaktionen auf Umweltladungsänderung. In n-Typ SNWFETs Wenn beispielsweise ein negativ (oder positiv) geladenen Molekül die Silizium-Nanodraht (SNW) nähert, werden die Träger in der SNW abgereichertes (oder akkumulieren). Folglich nimmt die Leitfähigkeit des SNWFET (oder erhöht) 1. Daher kann jedes geladene Molekül in der Nähe der Oberfläche der SNW SNWFET Vorrichtung detektiert werden. Vital Biomolekülen einschließlich Enzymen, Proteinen, Nukleotiden und viele Moleküle auf der Zelloberfläche sind Ladungsträger und kann mit SNWFETs überwacht werden. Mit geeigneten Modifikationen, insbesondere eine biomolekulare Sonde auf der SNW Immobilisierung kann ein SNWFET in einen markierungsfreien Biosensor entwickelt werden. Überwachungs Biomarkern verwendet ist kritisch für die Diagnose von Krankheiten. Wie in Tabelle 1 gezeigt, haben mehrere Studien verwendet NWFET-basierten Biosensoren für die markierungsfreie, ultra-hoher Empfindlichkeit und Echtzeit - Erkennung von verschiedenen biologischen Ziele, einschließlich eines einzelnen Virus 2, Adenosintriphosphat und Kinase - 3 - Bindung, neuronale Signale 4, Metallionen 5,6, bakterielle Toxine 7, Dopamin 8, DNA 9-11, RNA 12,13, Enzym und Krebs - Biomarker 14-19, menschliche Hormone 20 und Zytokine 21,22. Diese Studien haben gezeigt, dass NWFET-basierten Biosensoren eine leistungsfähige Detektionsplattform für ein breites Spektrum an biologischen und chemischen Spezies in einer Lösung darstellen. In SNWFET-Biosensoren, die Sonde auf der SNW immobilisierte Oberfläche der Vorrichtung erkennt eine spezifische BioTarget. ein bioPROBE immobilisieren beinhaltet in der Regel eine Reihe von Schritten, und es ist wichtig, dass jeder Schritt richtig, das ordnungsgemäße Funktionieren des Biosensors, um sicherzustellen, durchgeführt wird. Verschiedene Techniken wurden zur Analyse der s entwickelturface Zusammensetzung, einschließlich der Röntgenphotoelektronenspektroskopie (XPS), Ellipsometrie, Kontaktwinkelmessung, Rasterkraftmikroskopie (AFM) und Rasterelektronenmikroskopie (SEM). Methoden wie AFM und SEM bieten einen direkten Beweis für bioPROBE Immobilisierung auf der Nanodraht-Gerät, während Methoden wie XPS, Ellipsometrie und Kontaktwinkelmessung auf parallelen Versuchen an anderen ähnlichen Materialien durchgeführt abhängig sind. In diesem Bericht beschreiben wir die Bestätigung jeder Änderung Schritt durch zwei unabhängige Methoden. XPS wird verwendet, um die Konzentrationen an spezifischen Atome auf Polysilicium-Wafern und Variationen in den elektrischen Eigenschaften der Vorrichtung gemessen werden, direkt auf die Ladungsänderung an der Oberfläche zu bestätigen SNW zu untersuchen. Wir beschäftigen DNA Biosensor von polykristallinem SNWFETs mit (pSNWFETs) als ein Beispiel dieses Protokoll zu illustrieren. eine DNA-Sonde auf der SNW Oberfläche immobilisieren umfasst drei Schritte: Amingruppe Modifikation auf der nativen Hydroxyl-Oberfläche des SNW, aldehyd Gruppe Modifikation und 5&#39;-aminomodifizierten DNA-Sonde Immobilisierung. An jedem Änderungsschritt kann die Vorrichtung direkt auf die Veränderung in der Ladung der funktionellen Gruppe an der Oberfläche immobilisiert SNW erfassen, weil die Oberflächenladungen lokale Grenzflächenpotentialänderungen über dem Gate - Dielektrikum führen, die den Kanalstrom und Konduktanz 1 verändern. Kosten der SNW Oberfläche umgibt, kann elektrisch die elektrischen Eigenschaften der pSNWFET Gerät modulieren; Daher spielen die Oberflächeneigenschaften der SNW eine entscheidende Rolle bei der elektrischen Eigenschaften von pSNWFET Geräte zu bestimmen. In den berichteten Verfahren kann die Immobilisierung eines bioPROBE auf der SNW Oberfläche direkt durch elektrische Messung bestimmt und bestätigt werden, und das Gerät ist für die Biosensorik Anwendungen vorbereitet.

<table border="0" cellpadding="0" cellspacing="0" width="862">
	<tbody>
		<tr height="20">
			<td height="20" style="height:20px;width:327px;">Acetone</td>
			<td style="width:191px;">ECHO</td>
			<td style="width:179px;">AH-3102</td>
			<td style="width:167px;"></td>
		</tr>
		<tr height="40">
			<td height="40" style="height:40px;width:327px;">(3-Amonopropyl)triethoxysilane (APTES), &#8805;98%</td>
			<td style="width:191px;">Sigma-Aldrich</td>
			<td style="width:179px;">A3648</td>
			<td>Danger</td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;width:327px;">Ethanol, anhydrous, 99.5%</td>
			<td style="width:191px;">ECHO</td>
			<td style="width:179px;">484000203108A-72EC</td>
			<td></td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;width:327px;">Glutaraldehyde solution (GA), 50%</td>
			<td style="width:191px;">Sigma-Aldrich</td>
			<td style="width:179px;">G7651</td>
			<td>Avoid light</td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;width:327px;">Sodium cyanoborohydride, &#8805;95.0%&#160;</td>
			<td style="width:191px;">Fluka</td>
			<td style="width:179px;">71435</td>
			<td>Danger and deliquescent</td>
		</tr>
		<tr height="40">
			<td height="40" style="height:40px;width:327px;">Sodium phosphate tribasic dodecahydrate, &#8805;98%</td>
			<td style="width:191px;">Sigma</td>
			<td style="width:179px;">04277</td>
			<td></td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;width:327px;">Phosphoric acid, &#8805;99.0%</td>
			<td style="width:191px;">Fluka</td>
			<td style="width:179px;">79622</td>
			<td>Deliquescent</td>
		</tr>
		<tr height="40">
			<td height="40" style="height:40px;">Photoresist (iP3650)</td>
			<td style="width:191px;">Tokyo Ohka Kogyo Co., LTD</td>
			<td style="width:179px;">THMR-iP3650 HP</td>
			<td></td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;width:327px;">Synthetic oligonucleotides, HPLC purified</td>
			<td style="width:191px;">Protech Technology</td>
			<td style="width:179px;"></td>
			<td></td>
		</tr>
		<tr height="40">
			<td height="40" style="height:40px;width:327px;">Tris(hydroxymethyl)aminomethane (Tris), &#8805;99.8%</td>
			<td style="width:191px;">USB</td>
			<td style="width:179px;">75825</td>
			<td></td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;width:327px;">Keithley 2636 System SourceMeter</td>
			<td style="width:191px;">Keithley</td>
			<td style="width:179px;"></td>
			<td></td>
		</tr>
		<tr height="40">
			<td height="40" style="height:40px;width:327px;">SR830 DSP Lock-In Amplifier</td>
			<td style="width:191px;">Stanford Research Systems</td>
			<td style="width:179px;"></td>
			<td></td>
		</tr>
		<tr height="40">
			<td height="40" style="height:40px;width:327px;">SR570 Low-noise Current Preamplifier</td>
			<td style="width:191px;">Stanford Research Systems</td>
			<td style="width:179px;"></td>
			<td></td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;width:327px;">Ni PXI Express</td>
			<td style="width:191px;">National Instruments</td>
			<td style="width:179px;"></td>
			<td></td>
		</tr>
	</tbody>
</table>

preparation of silicon nanowire field-effect transistor for chemical and biosensing applications

Surveillance using biomarkers is critical for the early detection, rapid intervention, and reduction in the incidence of diseases. In this study, we describe the preparation of polycrystalline silicon nanowire field-effect transistors (pSNWFETs) that serve as biosensing devices for biomarker detection. A protocol for chemical and biomolecular sensing by using pSNWFETs is presented. The pSNWFET device was demonstrated to be a promising transducer for real-time, label-free, and ultra-high-sensitivity biosensing applications. The source/drain channel conductivity of a pSNWFET is sensitive to changes in the environment around its silicon nanowire (SNW) surface. Thus, by immobilizing probes on the SNW surface, the pSNWFET can be used to detect various biotargets ranging from small molecules (dopamine) to macromolecules (DNA and proteins). Immobilizing a bioprobe on the SNW surface, which is a multistep procedure, is vital for determining the specificity of the biosensor. It is essential that every step of the immobilization procedure is correctly performed. We verified surface modifications by directly observing the shift in the electric properties of the pSNWFET following each modification step. Additionally, X-ray photoelectron spectroscopy was used to examine the surface composition following each modification. Finally, we demonstrated DNA sensing on the pSNWFET. This protocol provides step-by-step procedures for verifying bioprobe immobilization and subsequent DNA biosensing application.

Verschiedene SNWFETs wurden als Wandler von Biosensoren (Tabelle 1) dienen berichtet. Einkristalline SNWFETs (sSNWFETs) und pSNWFETs zeigen vergleichbare elektrische Eigenschaften als Wandler in wässrigen Lösungen, und beide haben viele Biosensor-Anwendungen berichtet. Ein vorteilhaftes Merkmal der pSNWFET Gerät in dieser Studie verwendet wird , ist seine einfache und kostengünstige Herstellungsverfahren. 1a zeigt die wichtigsten Schritte , die in de...

Watch this Scientific Journal Video about Preparation of Silicon Nanowire Field-effect Transistor for Chemical and Biosensing Applications at JoVE.com

Preparation of Silicon Nanowire Field-effect Transistor for Chemical and Biosensing Applications

We describe key steps for biosensing by using polysilicon nanowire field-effect transistors, including the preparation of the device and the immobilization and confirmation of a DNA molecular probe on the nanowire surface, as well as conditions for DNA sensing.

Herstellung von Silizium-Nanodraht-Feldeffekttransistor für chemische und Biosensorik Anwendungen

Surveillance using biomarkers is critical for the early detection, rapid intervention, and reduction in the incidence of diseases. In this study, we ...

The overall goal of this protocol is to verify bioprobe immobilization and subsequent DNA biosensing on polysilicon nanowire field-effect transistors. This method can help answer important questions in the bioelectric sensing field, such as bioprobe immobilization and nucleic acid detection. Our biosensing device is a promising transistor for real-time, labor-free, and also high-sensitivity biosensing application.The implications of these biosensors extend toward clinical diagnosis of emerging infectious disease, because it can readily, sensitively, and accurately detect the specific bio-target. Though this method can provide insight into nucleic acid detection, it can also be applied to detection of other molecules, such as cytokines, hormones, proteins, and viruses. Generally, individuals new to this method will struggle because it requires interdisciplinary collaboration between biology and the electrical engineering fields.The preparation of the polycrystalline silicon nanowire field-effect transistor is covered by the text protocol. The device is formed from a six-inch wafer. The silicon nanowires on the device are about 100 nanometers wide and 1.6 microns long.To pre-treat the device, first remove it from storage in an electronically dry cabinet and open the sealed vacuum bag that contains it. Clean the biosensor in a Sonicator loaded with pure acetone for 10 minutes. Then, change the bath to pure ethanol and repeat the sonication for another five minutes.After this second bath, use a stream of nitrogen gas to dry the device. Next, treat the device with oxygen plasma at 18 watts for 30 seconds. Now take AC conductance measurements and measure the drain current electric properties on the device, as explained in the next section.Then, proceed with immobilizing DNA on the device surface while taking additional measurements, both AC conductance and drain current, after each modification. First, prepare for the pH profiling. Make 10 millimolar sodium phosphate tribasic dodecahydrate in deionized water, which has a pH of 11.6.Then, make a 10 millimolar phosphoric acid solution in deionized water, which has a pH of 2.35. Now make seven 10 millimolar buffer solutions with pH values ranging from three to nine by mixing the two stock solutions. With the test solutions and microfluidic channel prepared, measure real-time conductance using a lock-in technique.Place two needle probes on each of the source and drain pads. Convert the AC current signal into an AC voltage signal using a low-noise current preamplifier. Then set the optimal liquid gate voltage and proceed with delivering each buffer solution while measuring conductance at a drain voltage of 10 millivolts.Next, measure the drain current with neutral buffer. Flow pH 7 buffer onto the device from a syringe pump at five milliliters per hour. Then, using commercial semiconductor analysis software, measure the drain current in N MOSFET mode.Set the bias voltage to 0.5 volts and sweep the gate potential from negative one to three volts at 0.2-volt intervals. Now run the test and obtain the data. Begin with immersing the biosensor in 2%APTES in ethanol for 30 minutes to covalently link the nanowire surface.Then wash the biosensor three times for 30 seconds with ethanol, and then clean it in a Sonicator loaded with ethanol. Now, to create amine groups on the silicon nanowires, place the biosensor on a 120-degree Celsius surface for 10 minutes. Following the heating step, take measurements on the device as described in the previous section.Next, to create aldehyde groups on the silicon nanowires, immerse the device in 12.5%glutaraldehyde in 10 millimolar sodium phosphate pH 7 for one hour at room temperature. Limit any light exposure during this step. After the glutaraldehyde treatment, wash the device with 10 millimolar sodium phosphate buffer three times for 30 seconds per wash.Then blowdry the biosensor under pure nitrogen gas and take measurements to confirm the surface modification. The next step is to incubate the biosensor in one micromolar of probe solution overnight to thus apply the DNA probe. The following day, block the unreacted aldehyde groups by immersing the device in 10 millimolar Tris with four millimolar sodium cyanoborohydride for half an hour.Then wash the device off with 10 millimolar sodium phosphate buffer at pH 7 three times, followed by blowdrying the device under nitrogen gas, as before. Then take a final set of measurements to confirm the surface modification before proceeding to use it as a biosensor. Begin with taking a baseline measurement.Flow pH neutral sodium phosphate buffer into the device for 10 minutes. During this procedure, the solution flow rate is always five milliliters per hour. Then wait 30 minutes, flow pH neutral buffer over the biosensor for 10 minutes again, and measure the current of the device.Next, load 10 picomoles of DNA, complementary to the probe, onto the silicon nanowire surface by flowing the solution over the device for 10 minutes. Then incubate the biosensor for 30 minutes. As a negative control, apply 100 picomoles of non-complementary DNA to the device.After the incubation, flow pH neutral buffer over the biosensor for 10 minutes to wash off unbound target DNA. Following this step, measure the current of the device as before. Next, load one nanomolar of recovery DNA onto the DNA probe immobilized silicon nanowire surface for 10 minutes.Then incubate the biosensor for 30 minutes, as before. Finally, flow pH neutral buffer over the device for another 10 minutes, and then take current measurements once again. A DNA probe was immobilized on the silicon oxide surface and each modification step was confirmed using X-ray photoelectron spectroscopy.For the unmodified pSNWFET containing the native oxide layer on the SNW surface, the hydroxyl groups were ionized to form charged groups with increasing pH values. Conductance likely varied at different pHs. The shift in the electric properties of the device after different modifications confirms the change in the wire surface.In such experiments, the current voltage curve of the unmodified device was used as the baseline. After the device was immersed in APTES, the current voltage curve of the device shifted to the left because of the positive charge on the wire surface. After conjugating glutaraldehyde to the APTES modified device, the current voltage curve shifted back to the right because of neutrally-charged MI bond formation.Finally, a five prime amine-modified DNA probe was introduced to bind to the APTES glutaraldehyde-modified device. The backbone of the DNA caused the current voltage curve to shift to the far right. After watching this video, you should have a good understanding of how to confirm the bioprobe immobilization and DNA sensing application on polysilicon nanowire field-effect transistors.Once mastered, this technique of the preparation for nucleic acid detection can be done within one hour, if it is performed properly, which can be performed in advance. The final biosensing takes less than 10 minutes. While attempting this procedure, it's important to remember to analyze the electric properties of the device at each step of the bioprobe modification.This technique paved the way for researchers in the field of semiconductor-based sensors to its broader application of biosensing. Following these procedures, other methods like immobilizing cancer biomarker probe, can be performed in order to answer additional questions in fields such as clinical cancer diagnosis.

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